1. Joint Excite – MoreMoore meeting on EUV Resist Technology Athens 12 May 2005

2. Few Notes … Lunch break after the end of joint Excite – MoreMoore meeting (12.30 – 14.30). Optional Visit to IMEL labs (~15min). Two groups at 14.00 and 14.15. MoreMoore meeting starts at 14.30 and ends 18.00 at the same room An extra room for informal meetings is available at IMEL’s building Ride to airport, hotels by taxi: Fill the form and give it back until the end of coffee break. Destinations: Airport, Metro Station, … Dinner at Plaka area. Start from Hotel Herodion at 20.30 (10-15minutes walk) Tomorrow: We will meet again at 08.30 at the Ethniki Amina Metro station.

3. 09:00Welcome Ioannis Raptis 09:05Objectives, agendaPeter Zandbergen / Serge Tedesco 09:10Introduction EXCITE ResistWolf-Dieter Domke 09:20Introduction More Moore ResistKarl van Werden 09:30CAR limits / LER / Diffusion 5 min. - IMEC 8 min. - IMEL 5 min. - TNO 5 min. - Philips 10 min.Wrap-up CAR Limits / LER / DiffusionW-D.D.; K.v.W. 10.05Screening and Patterning 5 min. - IMEC 5 min. - ASML 5 min. - CEA-Leti 10 min.Wrap-up Screening and PatterningW-D.D.; K.v.W. 10.30Coffee Break 10.45Outgassing 5 min. - CEA-Leti 5 min. - Infineon 5 min. - Elettra 5 min. - AZ-EM 10 min.Wrap-up OutgassingW-D.D.; K.v.W. 11.15Materials/Characterization 5 min. - AZ-EM 5 min. - Infineon 8 min. - IMEL 5 min. - CNRS 10 min.Wrap-up MaterialsW-D.D.; K.v.W. 11:50Discussion on task overlaps, gaps, synergies, …All 12:10Coordination EXCITE/More Moore Resist path forwardP.Z.; W-D.D.; K.v.W.; All 12:35Adjourn / LunchAll