1. Kyoto UniversityHong Kong University of Science and Technology Coventor Tutorial Bi-Stable Mechanical Beam Simulation -Remote Desktop Connection -Material definition -Fabrication (Process flow design) -Layout (Structure design) -Device fabrication (Meshing and Naming Entities) -Analyzer setting (Boundary conditions) -Simulation (Finite State Analysis) -Viewing result

2. Kyoto UniversityHong Kong University of Science and Technology Remote Desktop Connection 5 IP addresses for the course ELEC5010: tmp234.ece.ust.hk tmp235.ece.ust.hk tmp236.ece.ust.hk tmp237.ece.ust.hk tmp238.ece.ust.hk Login:.\elec5010 Password: 5010user Two students share one virtual computer, it is important to log off to release computer for your partner.

3. Kyoto UniversityHong Kong University of Science and Technology Coventor Tutorial Bi-Stable Mechanical Beam Simulation -Remote Desktop Connection -Material definition -Fabrication (Process flow design) -Layout (Structure design) -Device fabrication (Meshing and Naming Entities) -Analyzer setting (Boundary conditions) -Simulation (Finite State Analysis) -Viewing result

4. Kyoto UniversityHong Kong University of Science and Technology Material Definition 1.Create a project first or open your unfinished projects For detailed information on Material Definition, please refer to the Section 2.3 of the manual “Designer” ! ! ! 2.After opening a project, you will have models here 3. Press this button

5. Kyoto UniversityHong Kong University of Science and Technology Material Definition 1.Choose MPD materials database 2.Set the all parameters of Silicon_100

6. Kyoto UniversityHong Kong University of Science and Technology Coventor Tutorial Bi-Stable Mechanical Beam Simulation -Remote Desktop Connection -Material definition -Fabrication (Process flow design) -Layout (Structure design) -Device fabrication (Meshing and Naming Entities) -Analyzer setting (Boundary conditions) -Simulation (Finite State Analysis) -Viewing result

7. Kyoto UniversityHong Kong University of Science and Technology Create Substrate For detailed information on editing process, please refer to the Section 2.4 of the manual “ Designer ” ! ! ! 1.Create a new process and define the substrate 2.Define thickness and material

8. Kyoto UniversityHong Kong University of Science and Technology Oxide Formation 1.Double click 2.Thickness 3.Layer Name

9. Kyoto UniversityHong Kong University of Science and Technology Si Formation Only this Si layer for simulation: Accurate “Thickness”!! Si layer for layout: Accurate “Layer Name”!!

10. Kyoto UniversityHong Kong University of Science and Technology Si Patterning

11. Kyoto UniversityHong Kong University of Science and Technology Metal Formation Metal layer for layout: Accurate “Layer Name”!!

12. Kyoto UniversityHong Kong University of Science and Technology Metal Patterning

13. Kyoto UniversityHong Kong University of Science and Technology Coventor Tutorial Bi-Stable Mechanical Beam Simulation -Remote Desktop Connection -Material definition -Fabrication (Process flow design) -Layout (Structure design) -Device fabrication (Meshing and Naming Entities) -Analyzer setting (Boundary conditions) -Simulation (Finite State Analysis) -Viewing result

14. Kyoto UniversityHong Kong University of Science and Technology Create Layout For detailed information on editing layout, please refer to the Section 2.5 & 3.2.1 of the manual “Designer”! ! ! 1.After saving the process file, we will create a new layout and check the layer names just defined

15. Kyoto UniversityHong Kong University of Science and Technology Edit Your Layout 2.Standard drawing For detailed information on editing layout, please refer to the Section 2.5 & 3 of the manual “Designer” ! ! ! 1.Choose the layer you will draw 3.Other functions

16. Kyoto UniversityHong Kong University of Science and Technology Edit Your Layout How to draw a curving beam The important thing is the equation Also the rectangle

17. Kyoto UniversityHong Kong University of Science and Technology Edit Your Layout For Bended beam: The beam and anchor should be merged. How? Select beam and anchor and then using “boolean- >Or” for merge. Otherwise, solid model can’t be built!! ERROR

18. Kyoto UniversityHong Kong University of Science and Technology Edit Your Layout For insert other cell’s graphs and define Cell. Otherwise, solid model can’t be built!! ERROR

19. Kyoto UniversityHong Kong University of Science and Technology Finish Layout 1. Just draw the structures of two layers: SILICON!! METAL!! 2.You can hide the layer with turn off the light ahead layer name 3. Save the two layers layout and separate different parts in your structure as different cells.

20. Kyoto UniversityHong Kong University of Science and Technology Flat Hierarchy This is for the final output!! (Don’t care it in the simulation) Before exporting the layout, find your final structure cell and flatten. Then…. For detailed information on editing layout, please refer to the Section 2.5.7 of the manual “ Designer ” ! ! !

21. Kyoto UniversityHong Kong University of Science and Technology Gds Out Chose a file to output the layout. For detailed information on editing layout, please refer to the Section 2.6.6 of the manual “ Designer ” ! ! !

22. Kyoto UniversityHong Kong University of Science and Technology Coventor Tutorial Bi-Stable Mechanical Beam Simulation -Remote Desktop Connection -Material definition -Fabrication (Process flow design) -Layout (Structure design) -Device fabrication (Meshing and Naming Entities) -Analyzer setting (Boundary conditions) -Simulation (Finite State Analysis) -Viewing result

23. Kyoto UniversityHong Kong University of Science and Technology Initial Solid Model 2.Since only SILICON layer is simulated, other can be hided. (Right- Click) For detailed information on solid model, please refer to the Section 4.5 of the manual “ Designer ” ! ! ! 1.Select a top cell to build the solid model

24. Kyoto UniversityHong Kong University of Science and Technology Partition Partition the Si into several parts. (Partition the beam (moved parts) from the anchor (fixed parts). 1.Ctrl choose 3 points 2.Add a plane 3.Ctrl select the plane and layer which will be parted 4.Partition

25. Kyoto UniversityHong Kong University of Science and Technology Partition (After) After partition, one Silicon bulk is cut into many parts. After several times of partition, the beams will be completely separated from the anchor. After partition, the plane can be hided. Finally, the one Silicon bulk will be cut into many Layer3.

26. Kyoto UniversityHong Kong University of Science and Technology Add Layer to Mesh Model Select ALL Silicon parts and add them to Mesh Model For detailed information on solid model, please refer to the Section 4.7 of the manual “ Designer ” ! ! !

27. Kyoto UniversityHong Kong University of Science and Technology Add Layer to Mesh Model ALL Silicon parts move into Mesh Model For detailed information on Mesh model, please refer to the Section 4.7 of the manual “ Designer ” ! ! !

28. Kyoto UniversityHong Kong University of Science and Technology Meshing Settings Smaller element size means more accurate simulation. Please try from larger size as saving simulation time at the beginning.

29. Kyoto UniversityHong Kong University of Science and Technology Generate Meshing Select ALL Silicon parts and Generate Mesh.

30. Kyoto UniversityHong Kong University of Science and Technology Finish Meshing

31. Kyoto UniversityHong Kong University of Science and Technology Naming Entities Name the top faces which will be used as electrodes “Potential” will be applied on these faces.

32. Kyoto UniversityHong Kong University of Science and Technology Naming Entities Name all the bottom faces which connects substrate Anchors “Fixall” and “Temperature” will be applied on these faces.

33. Kyoto UniversityHong Kong University of Science and Technology Naming Entities For detailed information on Mesh model, please refer to the Section 4.6 of the manual “ Designer ” ! ! ! Name the front faces or other needed faces of the actuator, amplifier or bistable beam on the side faces! “Pressure” or “Displacement” will be applied on these faces

34. Kyoto UniversityHong Kong University of Science and Technology Coventor Tutorial Bi-Stable Mechanical Beam Simulation -Remote Desktop Connection -Material definition -Fabrication (Process flow design) -Layout (Structure design) -Device fabrication (Meshing and Naming Entities) -Analyzer setting (Boundary conditions) -Simulation (Finite State Analysis) -Viewing result

35. Kyoto UniversityHong Kong University of Science and Technology Solver Setting After saving the mesh model, we will have it here.

36. Kyoto UniversityHong Kong University of Science and Technology Solver Setting Which be talked in the slide page 40

37. Kyoto UniversityHong Kong University of Science and Technology Surface Boundary conditions Example: apply voltage to actuator to analysis the temperature, displacement, stress and so on. 1.Fixall for anchor 2.Set the temperate of all anchor as room temperature (300K). The units is “K”. 3.Apply voltage to electrodes. The units is “voltage”. For detailed information on setting boundary conditions, please refer to the Section 3.5.3 of the manual “analyzer_standard” ! ! !

38. Kyoto UniversityHong Kong University of Science and Technology Surface Boundary conditions For other simulations: 1.“Fixall” and “Temperature” are always applied on anchor faces. 2.“Potential” can be applied on electrode faces. 3.“Pressure” or “Displacement” can be applied on side faces

39. Kyoto UniversityHong Kong University of Science and Technology SBCs for Bistable Beam Apply one Displacement to get one Force For detailed information on Simulation methodology of Bistable Beam, please refer to the “ Tutorial on simiulation of bistable beam ” ! ! !

40. Kyoto UniversityHong Kong University of Science and Technology Displacement-Force Simulation For simulation, one can not solve an arbitrary displacement directly, according to my experience. Instead, one need to increase the displacement bit by bit from zero, and telling Coventor to start the analysis from the result of the previous one. In this manner, the simulation will not fail easily, because defining the displacement resolves the large non- linearity of buckling.

41. Kyoto UniversityHong Kong University of Science and Technology One or Multi Point Simulation 1.Correspond the displacement to a variable, “mechBC1”, based on “MemMech” Solver. 2. Start to set Variable 3. Correspond the “mechBC1” to a Trajectory 3. Set the Trajectory 4. Set the value 5. Run here for simulating a series of values 6. Run here for simulating one value

42. Kyoto UniversityHong Kong University of Science and Technology Contact Boundary Conditions Plan: AMP CON2 Plan: BEAM CON Otherwise, they actuator will move across the amplifier, or the amplifier will move across the beam rather than push it. Plan: ACT CON Plan: AMP CON1 If you want to use the actuator to push the amplifier, or use the amplifier to push the beam you need to define the Planes of actuator, amplifier and beam as contact planes.

43. Kyoto UniversityHong Kong University of Science and Technology Coventor Tutorial Bi-Stable Mechanical Beam Simulation -Remote Desktop Connection -Material definition -Fabrication (Process flow design) -Layout (Structure design) -Device fabrication (Meshing and Naming Entities) -Analyzer setting (Boundary conditions) -Simulation (Finite State Analysis) -Viewing result

44. Kyoto UniversityHong Kong University of Science and Technology Simulation After simulation, no matter success or not, you view the results or debug the errors.

45. Kyoto UniversityHong Kong University of Science and Technology View Resluts For detailed information on Visualizer, please refer to the Section 9 of the manual “ analyzer_standard ” ! ! ! By click the displacement, you can switch to other parameters.

46. Kyoto UniversityHong Kong University of Science and Technology 3D Result Viewing For detailed information on Visualizer, please refer to the Section 9 & 9.1 of the manual “ analyzer_standard ” ! ! !

47. Kyoto UniversityHong Kong University of Science and Technology Simulation Result of the Displace-Fore of Bistable Beam Checking the displacement deformation using Geometry Scaling

48. Kyoto UniversityHong Kong University of Science and Technology Simulation Result of the Displace-Fore of Bistable Beam Checking the Force Value using Table – rxnForces. Sign of rxnForces changes from + to – or – to +, indicating two stable states.

49. Kyoto UniversityHong Kong University of Science and Technology Last year’s Design