1. Ajay P. Malshe, Tel (479) 575-6561 / E-mail Metrology and Instrumentation Challenges for Nanomanufacturing and Product Realization of Integrated Systems Ajay P. Malshe, Ph.D. Mechanical Engineering University of Arkansas, Fayetteville, AR, U.S.A. Convergence of Scales-Signals-Domains for Integrated Systems…

2. Ajay P. Malshe, Tel (479) 575-6561 / E-mail _____ _ Examples of integration of nano-micro-bio for nanomanufacturing of integrated systems, (a)nano mechanical machining system on chip (status- fabrication complete and is being released); (b)femto second, 380 fs, written periodic feature on diamond, smallest feature is about 50 nm; (c)E. Coli Cellular actuation using 30 nm flagilar motors (see attached movie); (d)3D assembled cBN 0-2 um sized particles in TiN matrix (technology used to spin-off NanoMech); (e)nanomechanical silicon beam for NEMS devices; (f)nano mechanical patterning of GaAs surface for growing array of quantum structures 1.5μm scan of sample after a 5x5 grid of 25 (30 nm) 40μN indents spaced approximately 200nm apart. (c) (d) 15nm (b) (a) 50nm (111) (c) cBN-TiN composite coating (d) (e) NanoMEEG (f) (d) Nanotechnology for Mechanical Engineers Glimpses of Work in Malshe’s Materials and Manufacturing Research Group:

3. Ajay P. Malshe, Tel (479) 575-6561 / E-mail Nano-Manufacturing new products or adding value to current products to improve quality of life through integration of nano materials. GRAND challenge: “Retaining functional signature of the NANO materials, devices, and components during nanomanufacturing and application.”

4. Ajay P. Malshe, Tel (479) 575-6561 / E-mail Typical needs of manufacturing: Dimensional Repeatability Functional Reproducibility Behavioral Reliability Low cost Known standards Evolutionary production Environmentally benign

5. Ajay P. Malshe, Tel (479) 575-6561 / E-mail Example 1: Nano Machining (Time 90sec)

6. Ajay P. Malshe, Tel (479) 575-6561 / E-mail Example 2: Nano Machining Time (120sec)

7. Ajay P. Malshe, Tel (479) 575-6561 / E-mail Key challenges for metrology and instrumentation… Nano materials- functional and dimensional classification Tools and systems for reproducible nano manipulation* and post-synthesis processing (* self and/or intentional)- tolerance, materials and interfacial analysis Integration and packaging- interconnects across the scale and functional boundaries Addressing component reliability and system durability- known standards Addressing “application specific” scientific and engineering designing-to- processing issues- proven design, modeling and scale up tools Integrated Circuits ICs Micro Electro Mechanical Systems (MEMS) Quantum structure, Laser Dots DNA Computing Trend of Progress in the Field of Micro and Nano Systems

8. Ajay P. Malshe, Tel (479) 575-6561 / E-mail ACKNOWLEDGEMENTS  DMII- National Science Foundation (NSF)  EPSCoR- National Science Foundation (NSF)  ECS- National Science Foundation (NSF)  Air Force Office of Scientific Research (AFOSR)  Students and post-doctoral fellows, and colleagues.  Collaborators from SNL, LBNL, UNL and OSU, Valenite, Coherent and Texas A&M.  Fayetteville and Springdale high schools.