1. Ivan Peric, CLIC Workshop 2014 1 HVCMOS for CLICPix V2

2. Ivan Peric, CLIC Workshop 2014 HVCMOS CCPD 2 …. LV NMOSPMOS

3. Ivan Peric, CLIC Workshop 2014 Plans AMS H18 on high resistive substrate run ~November 2015 Substrate resistivities 20 Ohm – 1k Ω cm Depleted zone thicknesses: 15/30um (20/80Ω cm), 50um (200Ω cm), 100um (1kΩ cm) Improvements – added source follower for better timing and less power constumption Segmented pixels (16.6 um) Run shared within ATLAS, Mu3e and CLIC CLIC area ~ 5cm x 5cm Cost ~ 160k for two substrate types Intended power CLIC power per pixel ~1-2uW – peaking time 20ns (capacitance 20fF) 160- 320mW Pixel size 25 um x 25 um Probably possible 16 um Present scheme ~10uA for 200fF (50 x 250) – peaking time 20ns 3

4. Ivan Peric, CLIC Workshop 2014 4 CLIC Pixel A BL BLR OutBLOutAmp To CLICPIX CLIC Pixel Size: 25um x 25um Analog signal is transferred to CLICPIX readout chip, no discriminator in pixel Simple and small pixels, small capacitance, smaller noise Spatial resolution can be improved and time-walk can be corrected by measuring of signal amplitudes Second stage amplifier added to increase output amplitude 2nd Stage

5. Ivan Peric, CLIC Workshop 2014 5 Improvement A BL BLRes OutBL OutAmp … 2nd Stage VNClic, VNLoad VNFB RED: Bias Voltages generated internally BLUE: External Voltages VNFoll

6. Ivan Peric, CLIC Workshop 2014 6 Segmented pixel A BL BLRes OutBL OutAmp … 2nd Stage VNClic, VNLoad VNFB RED: Bias Voltages generated internally BLUE: External Voltages VNFoll InR/L=En Variable voltage Saturated signal

7. Ivan Peric, CLIC Workshop 2014 7 ATLAS pixel A BL BLRes OutBL OutAmp To FEI4 Analog pixel Size: 25um x 250um Analog signal is transferred to the readout chip, no discriminator in pixel Second stage amplifier added to increase the output amplitude Simulated noise ~30e 2nd Stage VNClic, VNLoad VNFB RED: Bias Voltages generated internally BLUE: External Voltages VNFoll InR/L=En Middle pixels send two signal copies to two pads Variable voltage

8. Ivan Peric, CLIC Workshop 2014 ATLAS Analog pixel: layout 8

9. Ivan Peric, CLIC Workshop 2014 ATLAS pixel 9 L0R0L1R1L2R2StrLd(0:2)dcao Col(0:2)Col(3:5) ampout ao0ao1 ampout InL0 SerOut EnR InR(3:0) EnL InL(3:0) En(5:0) InL/R(0:3) row0(R),row1(L) row2(R),row3(L) En(11:6) En(5:0) InL1InL2InL3 InR0InR1InR2InR3 ++++

10. Ivan Peric, CLIC Workshop 2014 CCPDv4 Amplitude coding 10

11. Ivan Peric, CLIC Workshop 2014 11 CLIC Pixel Chip Layout 1.6mm

12. Ivan Peric, CLIC Workshop 2014 12 CLIC Pixel Simulation: Response to 1500 e input signal (MIP) Signal amplitude: 370mV 370mV

13. Ivan Peric, CLIC Workshop 2014 13 TSV

14. Ivan Peric, CLIC Workshop 2014 14 Assembly Possibilities … Readout chip Detector as it is done now: Diode based pixel sensor bump-bonded to readout ASICs Present development: CMOS pixel sensor capacitively coupled to readout ASICs With TSVs CMOS pixel sensor with backside contacts capacitively coupled to readout ASICs PCB Pixel sensor (diode based) (e.g. 8 x 2cm) CMOS pixel sensor several reticles (e.g. 4 x 2 cm) Readout chip Pixel sensor Readout chips Wire bond for sensor bias Wire bonds for RO chips Wire bonds for sensor chip Readout chips CMOS pixel sensor Capacitive signal transmission CMOS pixel sensor several reticles (e.g. 4 x 2 cm) Readout chip Wire bonds for sensor chip Wire bonds for RO chips CMOS pixel sensor with backside contacts TSVs Backside contact PCB Capacitive signal transmission

15. Ivan Peric, CLIC Workshop 2014 15 Thank you!

16. Ivan Peric, CLIC Workshop 2014 Chip-Top CLIC pixels, size 25 x 25um ATLAS Type A sub pixel size 33um x 125um ATLAS Type B sub pixel size 25um x 125um 16 AN 2x3-col mon AO Mon-AmplifierAnalog-multiplexer Bias Block CLIC 2x4-col64 x 25um col Diode for laser tests Separated guard bias 4 special columns (CLIC)