1. MSTMSTMSTMSTManufacturing Systems & Technology Manufacturing Systems and Technology Programme Flagship Research Project: The Manufacturing Science of Polymer Microfabricaton for Microfluidic Devices

2. M anufacturing S ystems and T echnology PRSC Review June 20, 2007 2 Create fundamental basis for the design and optimal operation of the processes used to manufacture microfluidic devices with micron and sub-micron sized capillaries. Identify the ultimate process limits in terms of cost, quality, rate and flexibility. Application Examples: micro-reactors for biomedical diagnosis, and fluidic photonic devices. Research Overview http://news- service.stanford.edu/news/2006/january18/fluidics- 011806.html http://www2.mic.dtu.dk/research/microta s/research/research%20projects.htm

3. M anufacturing S ystems and T echnology PRSC Review June 20, 2007 3 Polymer Micro-fluidic Devices Tooling and Equipment Metrology Materials and Materials Modeling Process Control Manufacturing Process Research Overview

4. M anufacturing S ystems and T echnology PRSC Review June 20, 2007 4 Research Objectives Basic understanding of the processing characteristics of polymers at the micron and sub micron scale Basic understanding of process mechanics, surface modification and layer bonding methods Principles of equipment design, automation and control for key micro-scale processes Development of process measurement, control and optimization methods Volume Production Focus on Full-Scale

5. M anufacturing S ystems and T echnology PRSC Review June 20, 2007 5 Research Plan Task 1- Materials and MechanicsTask 1- Materials and Mechanics Develop engineering-science-based processing procedures for producing polymer-based micro- and nano-structuresDevelop engineering-science-based processing procedures for producing polymer-based micro- and nano-structures Task 2- Tooling, Equipment and AutomationTask 2- Tooling, Equipment and Automation Develop fundamental methods for design of high- throughput machines for micro-casting, micro-forging and micro-injection molding suitable for commercial scale productionDevelop fundamental methods for design of high- throughput machines for micro-casting, micro-forging and micro-injection molding suitable for commercial scale production Task 3 - Metrology and Process ControlTask 3 - Metrology and Process Control Develop methods for ensuring optimal process performance in a large scale, high volume, high flexibility manufacturing environmentDevelop methods for ensuring optimal process performance in a large scale, high volume, high flexibility manufacturing environment

6. M anufacturing S ystems and T echnology PRSC Review June 20, 2007 6 Key Accomplishments Fully Coupled High Strain Constitutive Model for PMMA and Zeonex 2D Fully Coupled FEM Simulation of Micro Embossing Constitutive Modeling of Amorphous Metals for Embossing of Tooling Methods for Layer Bonding Task 1 Materials and Mechanics

7. M anufacturing S ystems and T echnology PRSC Review June 20, 2007 7 PMMA Model and Simulation Constitutive Model and Data Isothermal Simulation and Data Fully Coupled Simulation Materials and Mechanics

8. M anufacturing S ystems and T echnology PRSC Review June 20, 2007 8 Bonding and Alignment Microscope objective to align fiduciary marks Both stages sit atop microscope stage for XY-translation to align multiple alignment marks Transparent/rigid top piece to vacuum chuck PDMS PDMS Hard - hard Soft - hard Soft - soft Plasma-activated bonding Materials and Mechanics

9. M anufacturing S ystems and T echnology PRSC Review June 20, 2007 9 Key Accomplishments New Tooling Methods for Improved Life and Demolding –Powder Metal Injection Molding –Embossed High Temp. Polymers –Metal Vapor Deposition Scale-up of the PDMS Casting Process Full Scale (4” tool) Microembossing Machine with Rapid Thermal Cycle Addressing the Alignment of Layers for Assembly Equipment & Automation Task 2

10. M anufacturing S ystems and T echnology PRSC Review June 20, 2007 10 Tooling and Demolding Equipment & Automation

11. M anufacturing S ystems and T echnology PRSC Review June 20, 2007 11 PDMS Scale-up Mix and Measure Degas Pour in Vacuum Cure Separate Polymer from Mold Make Multiple Parts (> 50) Quantify Repeatability, Cost, Quality, and Rate Vary Mold Material Vary Processing Conditions Equipment & Automation

12. M anufacturing S ystems and T echnology PRSC Review June 20, 2007 12 Key Accomplishments Development of Multi-Scale Data Fusion Approaches to Device Metrology –Mixture of Platforms –Manipulation of Objects –High Speed Data Acquisition and Blending Multi-Layer Inspection with Co-Focal Microscopy Spatial Variation Analysis for Tooling and Parts Analysis of Fiducial Marks for Measurement and Layer Alignment Initial Variation Analysis of Microembossing and PDMS Casting Task 3 Metrology & Control

13. M anufacturing S ystems and T echnology PRSC Review June 20, 2007 13 Metrology 3D profile of both top and bottom layers Top layer Bottom layer Confocal Microscopy of Multilayer PDMS Device Precision, High Speed Stage for Part Alignment x y z Metrology & Control

14. M anufacturing S ystems and T echnology PRSC Review June 20, 2007 14 Outreach Efforts Creation of the “Center for Polymer Microfabrication” CPM –Aimed at Emerging Industries –Basis for Consortium Webpage Launch 7-07 –Archive of Publications –Student Projects –“Members Only” Area Industry Research Community

15. M anufacturing S ystems and T echnology PRSC Review June 20, 2007 15 Collaboration Task 1 –Sharing of Tools, Tooling Designs and Experimental Facilities –Joint Supervision of PhDs on Demolding Task 2 –Joint work on Novel Tooling methods - sharing of tools and methods –Joint PhD supervision Task 3 –Use of tools/masks of common design –Sharing of parts for metrological comparison –Sharing of Data from Various Platforms January 2007 –MIT PhD Students spent 2 weeks at NTU Joint Experiments Tooling Design and Manufacture Metrology NTU/NUS/MIT

16. M anufacturing S ystems and T echnology PRSC Review June 20, 2007 16 Collaboration MAXA Award Programme –Joint effort of MST, Mc Kinsey with EDB –MST Fellows as Evaluators and Representatives of SMA Basis for Industry Connection with MST –Research –Teaching –Recruitment Student Involvement EDB McKinsey

17. M anufacturing S ystems and T echnology PRSC Review June 20, 2007 17 Role of Research Institutes IBN –Nano-imprinting facility for baseline experiments in Variation SIMTech –Leadership by Dr. Reading in Task 3 –Use of Metrology Facilities Interferometers and Confocal microscope

18. M anufacturing S ystems and T echnology PRSC Review June 20, 2007 18 Plans for Next Year NB: 6 new “Direct” PhD’s at NTU in 3 Tasks 3D simulation of embossing –Isothermal and Fully Coupled Cases –PMMA and Zeonex Basis for Tooling Design –Materials and Treatments for Robustness Demolding Ease –Novel Concepts such as High Temperature Polymer Tools Embossed Amorphous Metal Tools

19. M anufacturing S ystems and T echnology PRSC Review June 20, 2007 19 Plans for Next Year Novel Equipment –“Right Sized” Embossing –PDMS automation - critial process analysis for Repetitive Production –Assembly alignment –Two sided through-hole embossing Integrated Metrology Methods –Multi-scale Measurements –Multi-scale Objectives Screening Process Health Product Health

20. M anufacturing S ystems and T echnology PRSC Review June 20, 2007 20 ISNM 2008 MST will Host and Coordinate We plan multiple invited and plenary sessions on Polymer Micro- Fabrication Will use as MST - FRP Showcase as per proposal International Symposium Nano Manufacturing