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Furnaces and Wet bench area Savitha P. Wet bench - Movement CMOS wet bench moving to the new clean room Purchase orders for chemicals still not released.

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Presentation on theme: "Furnaces and Wet bench area Savitha P. Wet bench - Movement CMOS wet bench moving to the new clean room Purchase orders for chemicals still not released."— Presentation transcript:

1 Furnaces and Wet bench area Savitha P

2

3 Wet bench - Movement CMOS wet bench moving to the new clean room Purchase orders for chemicals still not released MOS chemicals will take 3-4 months to ship after release of the purchase order

4 Furnaces - Movement All except annealing furnaces moving to Equip. dev. room Maintenance need to be done for all – Change thermocouple (Euros 625-650) – Gas connections to suit clean room – New tubes/ clean old tubes

5 Dektak, 4-probe, Film thickness probe measurement and CPD Moving to new clean room – Document made regarding precautions while moving Stylus/ probe tip to be protected Probe head to be cushioned – CPD moving to Equp. dev. room


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