1. "Microdevices et microsystems of detection"
Skills: the silicon- and polymers-based microtechnologies
Technological processes
Materials integration and study
Groupe M2D
"Microdevices et microsystems of detection"
Head director: P. Temple-Boyer
Senior researchers (11)
E. Bedel-Pereira (CR)
F. Cristiano (CR)
L. Fadel Taris (MC)
J. Launay (MC associé)
A. Martinez (P)
P. Ménini (MC)
F. Olivié (P)
P. Pons (CR)
G. Sarrabayrouse (DR)
E. Scheid (CR)
P. Temple-Boyer (CR-HDR)
Post-docs (3)
M. Al Bahri (post-doc)
I. Humenyuk (post-doc)
M.L. Pourciel-Gouzy (post-doc)
Ph-D students (21)
Others (3)
F. Kerrour (Constantine, ALGERIA)
L. Rabbia (RECIFE)
W. Sant (CAPTOMED/HEMODIA)
Microstructures and microdevices
Microsystems of detection

2. Objectives and motivations Development of microdevices
using silicon and polymers technologies,
Application to detection microsystems…
Integration
Technological processes and materials: structure, detection, actuation, packaging,…
Microstructures, microdevices, microsystems
Electronic interfaces: measurement, data treatment, communication,…
Development of technological platforms
Compatibility of the microelectronics technology
Mass fabrication at low cost
Adaptation according to application
Improvement, optimisation, reliability
Industrial transfer

3. Researches organisation
Technological building blocks
BASIC RESEARCH
IN SILICON & POLYMERS TECHNOLOGIES
Materials, processes
Microdevices platforms
MECHANICS, PHYSICS, (BIO)CHEMISTRY, BIOLOGY
MICROSYSTEMS
OF DETECTION
Micro/Nanoelectronics
Micro/Nanotechnologies
MICRODEVICES

4. Study of detection microsystems
Conception and realisation of demonstrators
Microdevices, microtransducers
Microsystems of detection, microsensors
Characterisation, instrumentation
Development of specific measurement stands
Study of transduction principles
Potentiometric transduction
Impedimetric transduction
Electro-mechanical transduction
Conception and realisation of specific interfaces
Development of data treatment methods
Theory, modelling, simulation
Understanding of the detection microsystems behaviour
Optimisation, reliability
Industrial transfer
MOS dosimeter

5. Development of detection microsystems
MOS dosimeters (RadFETs)
Ionizing radiations dosimetry
Neutrons dosimetry
Pressure/stress MEMS-based microsensors
Capacitive transducers
Piezoresistive transducers
MEMS-based conductimetric gas sensors
Chemical microsensors
Chemical field effect transistors (ChemFETs)
Chemical microelectrodes
Staff: 11 people
Senior researchers: 3 - Post-docts: 2
Engineers/Technicians: 3 - PhD student: 2
Private engineer: 1
1,5mm

6. Integration of ChemFET microsensors
Adaptation of the MOSFET to the detection in liquid phase
Substitution of the metallic gate by a chemical sensitive layer
Use of a electrolyte/insulator/silicon (EIS) gate structure
Detection principle
Charges (ions…) trapping on the chemical sensitive layer, variation of the electrolyte potential y0 (Nernst law) and measurement of the ChemFET threshold voltage VT*
Advantages and drawbacks
Compatibility with microelectronics (theory, technology, measurement interfaces,…)
Requirement of an optimised packaging adapted to the detection in liquid phase
Use of a (pseudo-)reference electrode to apply the Gate voltage bias to the electrolyte
electrolyte
Gate
P type silicon substrate
Source
Drain y0 +
SiO2
Si3N4

7. Integration of pH-metry techniques for biochemical analysis
Development of a SiO2/Si3N4 pH-ChemFET technological platform
Design and realisation using silicon and polymers technologies
Assembly, packaging and conditioning to the liquid phase
Test and characterisation
Simulation and modelling
pH-ISFET/q-ReMOS
microsensor
1cm 10 20 30 40 50 60 70
-1,65
-1,60
-1,55
-1,50
-1,45
-1,40
-1,35
-1,30
-1,25 pH
tension de sortie (V)
temps (min) 3 4 5 6 7 8 9
pH glass electrode
pH microsensor

8. Detection of bacterial activities
Monitoring of the bacterial medium pH using pH-ChemFETs
Fabrication of mass-fabricated PDMS microtanks (≈ 1 mm3)
Integration on the pH-ChemFET chip, connexion (electrical and fluidic) and packaging
Introduction to fluidic microsystems…
Study of the non pathogenic bacteria lactobacillus acidophilus
Main bacterial metabolism: consumption of specific sugars, fabrication of lactic acid and final decrease of the pH bacterial medium
Test of sugars characterised by different metabolisms: glucose (+) and sorbitol (-) 2 4 6 8 1 5 9 , 7
Vg/Vg0
time (min)
Test sorbitol
Test glucose

9. Adaptation of pH-ChemFETs to biochemical detection: development of EnFETs
Use of enzymatic reactions responsible for a pH variation, adaptation to the detection of biochemical species
Hydrolases: hydrolysis of the amine NH2 function and production of ammonia NH3
Example: urease: CO(NH2)2 (urea) + H2O ----> 2NH3 + H2CO3
R&D works
Mass integration of photosensitive polyvinyl alcohol (PVA) based enzymatic layers using spin coating and photolithography techniques
Realisation of enzymatic FETs for the detection of urea and creatinin
enzymatic reaction
Source
Drain
silicon substrate
H+/OH-
SiO2
Si3N4
PVA
PVA /enzyme
EnFET
pH-ISFET S s D G

10. Technological realisations
Mass fabrication of generic pH-ISFET chips using silicon technology
Development of "smart cards technology for the pH-ISFET chips wiring and packaging
Enzymatic layer deposition using ink jet printing technique
Fabrication of a specific flow cell adapted to haemodialysis
Use of standard electrical connexions
Development of specific measurement interfaces
Application to haemodialysis
EnFETs technology industrial transfer (collaboration: HEMODIA S.A. - France)
pseudo-Gate (Au)
Urea-EnFET
pH-
ISFET

11. EnFETs modelling Modelling of the EnFETs detection mechanisms
Enzymatic reaction (Michaelis-Menten equation)
Diffusion in the solution of the (bio)chemical species (Fick law)
Hydrodynamic laws
Acid/basic chemical reactions
pH-ISFET potentiometric response

12. Integration of chemical micro-electrodes
Gold/electrolyte/gold
conductive structure
Metal/electrolyte/Si3N4/ SiO2/silicon
capacitive structure
Development of a specific technological platform
Design and realisation using silicon and polymers technologies
Assembly, packaging and conditioning to the liquid phase
Test and characterisation
Simulation and modelling
Amplifying structure for ChemFEC

13. Applications to biological detection
Goal: characterisation of the oxidizing stress of red cells
Towards the paludism diagnosis…
Realisation of Ti/Au micro-electrodes on pyrex substrate
Integration of red cells using thiols and polylysine
Characterisation by impedance spectroscopy
blank test
parasitized cell
safe cell
Gold micro-electrodes on pyrex substrate

14. Conclusion and prospects
Development of chemical microsensors for the liquid phase analysis
Realisation of a generic detection microdevices (pH-ChemFET, micro-electrodes) using silicon and polymer technologies
Integration of the (bio)chemical sensitive materials
Packaging, hybrid integration
Adaptation to the chemical, biochemical and biological detection
Applications
Medical analysis: pH-ChemFETs for the analysis of bacterial activities
Plasma analysis: EnFETs pour biochemical detection
Water analysis: ISFETs pour the ion detection
Towards new microsensors concepts
Low-cost microsensors ( $)
Chemical microdevices: smart cards, probes, pipes,…
Chemical microsystems
Microsensors networks