1. Diffusion Furnace Controller Design Team 14 Joe Grady James Crow Hongyu Chen Prakalp Sudhakar Victor Villagomez Client/Faculty Advisor: Dr. Gary Tuttle

2. Project Goals The objective of the senior design project is to design a new set of temperature controllers to use on a set of diffusion furnaces located at the Microelectronics Research Center. The project goals include: Updating analog controlled furnace to a digitally controlled furnace. Implementation of a new digital temperature controller integrated into the current microelectronics oven Providing a computer interface so that temperature of the furnaces can be controlled and monitored remotely.

3. What is due?  Prototype testing of the hardware – Oct 14  Revised circuit testing of hardware – Oct 21  Layout of circuit completed – Oct 28  Implementation of controller, circuit, oven and software – Nov 14

4. System Overview

5.  Circuit schematic is done and properly interfaces in theory.  Get a bare minimum of 270mA to the SCR gates

6. Software  Implementation Done  Website login system  Website database  Website basic GUI interface  Testing  Black box testing

7. To be done Software  Get an USB – RS232 (Serial) Adaptor  Write low level interface in Mac’s Xcode  Write the interface between the webpage and the controller software Testing/Evaluation:  Test RS232 com in Mac  Test the webserver

8. Two levels of success criteria in this project: Critical level – SCR Gate current must be comfortably above 270mA @ 2V Dream level – Critical level reached plus software integration Assessment of Overall Completion: fully successful, mostly, partially, or unsuccessful

9. Questions ?