1. Meso Machining Norman Salmon Engineering Program Manager
Lawrence Berkeley National Lab

2. Meso-scale machining: 10 µm ~ 1mm
bridging the gap between silicon based MEMS and conventional miniature machining.
meso machining
miniature machining
silicon µ-machining
[m]
Critical dimensions

3. Micro Milling, Drilling and Turning
Micro Stepper Motor Laminates - Produced Using 100 Micron Diameter Rotary Cutting Tools - Tech Transfer Grant for Empire Magnetics FY2002
100 Micron Diameter Micro Electrodes Produced for Alexander Zholents 2002 AFRD LDRD
Holes as small as 40 Microns can be drilled in Stainless Steel - Shown is a 70 Micron Drill compared with a Human Hair

4. Micro Engine Components
1mm
Micro Rotor
Micro Turbine
1mm
1mm

5. Electroplated RF Electrode
125 micron

6. Meso-Machining Examples
FIB
Milling
37µm cutting tool
10µm gears on silicon
25µm channel on diamond
39µm channel on graphite

7. Micro Tooling tooling design tooling application materials
Diamond tools cut by FIB
New workpiece materials
analysis of cutting performance
Force sensing (MEMS)
Acoustic emissions
25 micron End Mill
10 micron End Mill

8. LBL - MESO Machining Lab
Long Term Vision
Micro Turning
Micro EDM
Laser Cutting and Welding
Micro Milling
LBL - MESO Machining Lab
AFM Nano- Machining
LIGA
Micro Molding & Casting
FIB
Micro Wire EDM

9. Micro Manipulation Stage for Lift-Out Specimen Preparation with FIB

10. Nano-Manipulator for the Molecular Foundry
120mm x y z

11. Micro Assembly Station
MEMS Grippers
Gripper Changer
Nanometer resolution
Haptic Feedback?

12. Meso machine tool with in situ metrology
High Speed 170K RPM Hydrostatic Spindle
Sub-Micron Accuracy
Integrated CMM Probing, Laser, and Capacitance Inspection

13. Objectives
Develop Leading Technology Program in Meso Machining, Assembly, and Metrology
Develop Partnerships and Collaborative efforts that support and compliment our Technology