1. Use of HF and BOE in NanoFab
Training Presentation
September 2007

2. Use of HF and BOE in Nanofab
Only trained users may use HF or BOE
Visor, gloves and apron must be used when pouring or handling
Waste must be removed from beakers/baths with aspirator tube
Do NOT use glass around HF
Do NOT mix with other chemicals without prior approval and supervision.

3. Use of HF and BOE in NanoFab
Do not cover beaker with metal foil or use with metal holders
Do NOT heat HF/BOE
Use dedicated tanks at acid hood for large volumes eg 1 liter or more
Use funnels for pouring; neutralize and clean up spills immediately

4. Use of HF and BOE in NanoFab
BOE stands for buffered oxide etch
It is a mixture of NH4F and HF
Extra fluorine acts as a buffer to preserve etch rate due to load effects or bath aging
Very dangerous-same as HF
We use 6:1 (6 NH4F to 1 HF)
BOE/HF is one of the most useful chemicals in the semiconductor industry

5. Use of HF and BOE in NanoFab
• Many useful mixtures & applications of BOE and HF/H2O:

6. Use of HF and BOE in NanoFab
Label the setup:
Use only in approved locations
Concentration/mixture
Your name and phone
Date & time poured
Date & time finished
Fill out log book for in-deck HF/BOE baths and label bath cover with mixture eg 10:1 H2O:HF, BOE 6:1 etc
Setups cannot remain longer than 24 hours
Exception: In deck HF tanks & Porous Si Setup

7. Use of HF and BOE in NanoFab
Allowed locations for HF/BOE in NanoFab
In deck acid sink

8. Use of HF and BOE in NanoFab
Know the safety procedure for exposure
Remove affected clothing
Wash with water
Apply calcium gluconate cream
See the Doctor
Report the incident
See attached detailed procedure

9. Use of HF and BOE in NanoFab
In case of HF/BOE spill:
Wear gloves, visor and apron
Evacuate area
Neutralize with lime or neutraspray
Use spill towels or pillows to collect waste
Put waste in yellow bags and label it HF/BOE Hazardous Waste; Put it in Haz Waste Cabinet
Report spill to lab staff
Do NOT attempt to clean up large or unknown spills

10. Use of HF and BOE in NanoFab
HF/BOE is extremely dangerous and can cause severe burns and even death.
HF/BOE attacks bone tissue by reacting with calcium in the bone
HF/BOE attacks most organs including the heart by disrupting Ca ions
HF/BOE in dilute concentrations may not even cause any pain initially but is easily absorbed through the skin to attack bone and other tissue

11. Use of HF and BOE in NanoFab
• NH4F MSDS DATA

12. Use of HF and BOE in NanoFab
Sections 1 and 2 of HF MSDS
Section 2 - Compositon/Information on Ingredients
HYDROFLUORIC ACID 48% ACS REAGENT
Ingredient Name: HYDROFLUORIC ACID, HYDROGEN FLUORIDE
Ingredient CAS Number: Ingredient CAS Code: M
RTECS Number: MW RTECS Code: M
% Text: N/K
% Enviromental Weight:
Other REC Limits: 2.5 PPM
OSHA PEL: N/K OSHA PEL Code: M
OSHA STEL: OSHA STEL Code:
ACGIH TLV: C 2.6 MG/CUM ACGIH TLV Code: M
ACGIH STEL: N/P ACGIH STEL Code:
EPA Reporting Quantity: 100 LBS
DOT Reporting Quantity: 100 LBS
Ozone Depleting Chemical: N
Section 1 - Product and Company Identification
HYDROFLUORIC ACID 48% ACS REAGENT
-Product Identification: HYDROFLUORIC ACID 48% ACS REAGENT
Date of MSDS: 01/01/1997 Technical Review Date: 05/08/1998
FSC: 6550 NIIN: LIIN: 00F056013
Submitter: F BT
Manufacturer's Name: SIGMA CHEMICAL COMPANY
Post Office Box: 14508
Manufacturer's Address1: 3050 SPRUCE ST
Manufacturer's Address2: SAINT LOUIS, MO
General Information Telephone: /
Emergency Telephone: /

13. Use of HF and BOE in NanoFab
Sections 3 and 4 of HF MSDS
Section 3 - Hazards Identification, Including Emergency Overview
HYDROFLUORIC ACID 48% ACS REAGENT
Health Hazards Acute & Chronic: FATAL IF INHALED, SWALLOWED/BY SKIN ABSORPTION. MATERIAL IS EXTREMELY DESTRUCTIVE TO TISSUE OF THE MUCOUS MEMBRANES & UPPER RESPIRATORY TRACT, EYES & SKIN. FATAL AS A RESULT OF SPASM, INFLAMMATION & E DEMA OF THE LARYNX & BRONCHI, CHEMICAL PNEUMONITIS/PULMONARY EDEMA. MAY AFFECT THE LIVER & KIDNEYS. POSSIBLE MUTAGEN.
Signs & Symptoms of Overexposure:
IRRITATION, INFLAMMATION, BURNING SENSATION, COUGHING, WHEEZING, LARYNGITIS, SHORTNESS OF BREATH, HEADACHE, NAUSEA, VOMITING
Medical Conditions Aggravated by Exposure:
N/K
LD50 LC50 Mixture: N/P
Route of Entry Indicators:
Inhalation: YES
Skin: YES
Ingestion: YES
Section 4 - First Aid Measures
HYDROFLUORIC ACID 48% ACS REAGENT
First Aid:
EYES/SKIN: IMMEDIATELY FLUSH W/COPIOUS AMOUNTS OF WATER FOR 15 MINS. INHALATION: REMOVE TO FRESH AIR. GIVE CPR/OXYGEN IF NECESSARY. INGESTION: DON'T INDUCE VOMITING. IF CONSCIOUS AFTER INGESTION OF MA TERIAL, IMMEDIATELY GIVE 4-8 OUNCES OF MILK/WATER. OBTAIN MEDICAL ATTENTION IN ALL CASES.