1. Sensor Technology group
Read-out Electronics for Pixel Detectors
Establishment of Experimental Research Infrastructure
Departement of Information Technology and Media
Sensor Technology

2. Departement of Information Technology and Media
Establishment of Experimental Research Infrastructure
Introduction
Purpose
Establishment of experimental research infrastructure in processing of semiconductor radiation detectors
Educate undergraduate and graduate student in basic semiconductor processing
Support the simulation group with samples-test structures for measuring different kind of semiconductor parameters
Requirement
The equipment in the clean room must be easy to use and be as flexible as possible
The equipment must handle small pieces, to wafers with a diameter of 100mm
The most common processing steps must be represented
Departement of Information Technology and Media
Sensor Technology

3. Overview of the cleanroom
Departement of Information Technology and Media
Sensor Technology

4. Departement of Information Technology and Media
Outside the cleanroom
Infrastructure
Gas store rooms
Storage for chemicals
Deionised Water
Ventilation
Control of:
Particles
Temperature
Humidity
Exhaust
Drainage of acids and solvents
Vacuum (for wafer chuck)
Cooling water
Compressed air
Departement of Information Technology and Media
Sensor Technology

5. Departement of Information Technology and Media
Inside the cleanroom
Change to cleanroom clothes
Measurement laboratory
Departement of Information Technology and Media
Sensor Technology

6. Departement of Information Technology and Media
Dry etch (RIE)
Electrode distance
Etching chemistry
SF6, CH4, CHF3
Pressure
Bias
Power
Tegal 903e
Tegal 901e
Departement of Information Technology and Media
Sensor Technology

7. Departement of Information Technology and Media
Furnaces
Diffusion from solid sources
Boron
Phosphorus
Growth of silicondioxide
dry
wet (pyrogenic)
Annealing
FGA N2/H2
in N2 or O2 ambient
Departement of Information Technology and Media
Sensor Technology

8. Departement of Information Technology and Media
Wet etching
Cleaning
R/D
Anisotropic wet etch
Departement of Information Technology and Media
Sensor Technology

9. Departement of Information Technology and Media
Lithographic Processes
Mask aligner
Soft contact
Proximity
Plasma stripper
Development bench
Softbake furnace
Hardbake furnace
Hotplate
Spinner
HMDS furnace
Place for maskgenerator
Departement of Information Technology and Media
Sensor Technology

10. Departement of Information Technology and Media
Implantation
Varian DF4
Energy 10 keV-200 keV
BF3 (gas)
Arsenic (Solid)
Phosphorus (Solid)
Departement of Information Technology and Media
Sensor Technology

11. Departement of Information Technology and Media
Metallization
Sputter
Electron beam evaporator (to be delivered in august)
Six pocket crucible
High voltage power supply fully semiconductor equipped
Departement of Information Technology and Media
Sensor Technology

12. Departement of Information Technology and Media
Education
Course in “Vacuum Technology for Semiconductor Processing” (Given by Doc. Lars Westerberg, chairmen in Swedish Vacuum Society)
Lectures
Laboratory exercise
Study visit at The Svedberg laboratory in Uppsala
Planned Project
Pixel detector in silicon
Integrated DE-E detector in silicon
UV-detector in silicon with two layers antireflective coating
Quadrant detector in silicon
Test structures in SiC
Laboratory exercise for the students in the processing of pn-diodes
Recruit of PHD students to work in semiconductor processing
Departement of Information Technology and Media
Sensor Technology