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Laboratory: A Typical Evaporation Process

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Presentation on theme: "Laboratory: A Typical Evaporation Process"— Presentation transcript:

1 Laboratory: A Typical Evaporation Process

2 - Open evaporator.

3 - Remove wafer holder.

4 - This is where the wafers will be during the evaporation process.

5 - Remove the bell jar.

6 - Prepare metal: e. g., use metal wire.

7 - The metal will be placed in a "basket".

8 - Some evaporators use a "coil" instead of a "basket".

9 - Both metal and basket/coil should be cleaned.

10 - They should then be dried in the dehydration oven.

11 - The basket/coil should be installed between the two electrodes,
and the metal placed inside the basket or around the coil.

12 - Move shutter to cover the filament.

13 - Put on the bell jar.

14 - Carefully load the wafers onto the wafer holder.

15 - One of the wafers may be a "test" wafer for measuring the metal layer thickness.

16 - Replace the wafer holder back on top of the bell jar.

17 - Place the cover back onto the bell jar.

18 - Lower pressure ( ~ 10-6 Torr ).

19 - Heat the filament to evaporate the metal.

20 - Cool and remove wafers.

21 - The test wafer allows measurement of film thickness.


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