1. Industrial Atomic Layer Deposited Ultrabarriers Jacques C. S
Industrial Atomic Layer Deposited Ultrabarriers   Jacques C. S. Kools   ENCAPSULIX SAS, 481 Chemin Des Vignes, Simiane-Collongue, France  

2. Device Integrated nano oxide ultrabarriers
Many devices require a moisture barrier for long lifetime
Traditional approach to laminate with barrier foil reaches its limits
Sideways diffusion through epoxy
High performance barrier foils are costly
Our approach is to depositing a transparent ALD barrier directly onto the moisture sensitive devices
Better sealing
Lower cost
OLED light
Organic, perovskite PV
Thin Film, Heterojunction PV
OLED display

3. UltraBarrier Performance Independently Confirmed
MOCON Aquatran (Peter Carcia ; Dupont Research)
100 mm diameter PET foil
38°C /85% RH
WVTR below detection limit ( 2e-4 g/m2/dy)
Ca Test Millimeter size PET foil
65°C /85%RH/1000 hrs
WVTR below detection limit ( 5e-4 g/m2/dy)
Helium Mass Spec (Stephane Cros ; CEA INES )
75 mm diameter PET foil ( 3x) RT
HeTR 10 x better than reference
WVTR consistently in the 5e-6-1e-5 g/m2/dy range over macroscopic substrates
Data
Reference :
Barrier with 6e-5 g/m2/dy WVTR
9/17/2018

4. Equipment Platforms M200 M500 M750 Substrate Type & Size
200 mm x 200 mm
Glass , Silicon wafer, PV, Double sided coating of foil
2 x Gen 2.5 ( 400 mm x 500 mm glass, )
12 x 156 mm x 156 mm Si
8 x 200 mm round Si
2 x Gen 4.5 ( 730 mm x 920 mm glass, )
8 x Gen 2.5
Applications
R&D in OLED, OPV, PV, thin film battery,..
OLED microdisplay manufacturing
OLED lighting & Display Manufacturing
Thin Film battery
Printed Electronics
Cell Level PV
Manufacturing AMOLED lighting & Display

5. Typical Process Performance
0,884 Å
1.589
0,866 Å
1,585
0,890 Å
1,59
0,861 Å
1,590
0,87 Å
1,59
0,892 Å
1,586
0,92 Å
1,594
0,9 Å
1,594
0,91 Å
1,591
Test substrate = Gen 2 Glass / reflective layer / ALD Al2O3
Measured by Spectral Ellipsometry ( SemiLab )
Optical Index above literature values
Uniformity : 1s= 2.5% over Gen 2 glass ( 370 x 470 mm)
Repeatibility : less than 2% variation over 1 month of production
9/17/2018