1. (ZnO,250°C)
(ZnO,250°C)
(ZnO,250°C)
ZnO and Indium-Doped ZnO Films Deposited by Spray Pyrolysis Technique at Different Substrate Temperatures
N. BENCHERIF M. BENHALILIBA
Materials Technology Department, Physics Faculty POBOX 1505 USTO-MB University , Oran, Algeria.
1. Introduction a a
Zinc oxide (ZnO), a representative (II-VI) semiconductor nanostructures materials; have attracted much attention for many applications, electrical[1], optical properties[1-2] and optoelectronics [2-3]. The conductivity of ZnO film can be improved by adding doping elements such as Al, Ga, In, Mo and Co-doping process [4,5].
Transmittance (%)
Intensity (a.u)
2. Experimental details
Wavelength (nm)
In the present work, zinc oxide thin films were prepared onto corning glass substrate using by Spray Pyrolysis Technique M of Zn(C4H6O4). 2H2O) was dissolved in methanol , while the doping source (InCl3) of which the morality and the deposition time are set at respectively 1% (In / Zn = 1%) and 10 minutes. The thin films were deposited at different substrate temperatures 250 °C, 300 °C, 350 °C and 400 ° C. b b
Transmittance (%)
Intensity (a.u)
3. Results in graphs
Wavelength ( nm)
2Ɵ ( Deg. )
Figure 1. XRD spectra of (a) ZnO and (b) In-doped ZnO films deposited at different substrate temperatures of °C, 300 °C, 350 °C and 400 °C.
Figure 2. Transmission spectra T(%) of (a) ZnO and (b) indium-doped ZnO thin film as a function of substrate temperatures of 250°C, 300 °C, 350 °C and 400 °C.
ZnO,Ts=250°C
ZnO,Ts=300°C
ZnO,Ts=350°C
ZnO,Ts=400°C
ZnO:In,Ts=350°C
ZnO:In,Ts=250°C
ZnO:In,Ts=300°C
ZnO:In,Ts=250°C
Figure 3. 3D-AFM pictures of ZnO and In-doped ZnO sprayed layers.
Conclusion
Structural study. It is revealed that the as-grown films are polycrystalline with a hexagonal wurtzite-type structure and a preferred orientation along the c axis perpendicular to the substrate. Indeed, our films have grown according to the same (002) dominant orientation.
Optical study. ZnO and In-doped ZnO layers are highly transparent with a transmittance reaching 80-90% with​in the VIS-IR ranges.
Microscopic study. The atomic force microscope analysis shows the nanostructured morphology of ZnO and In-doped ZnO thin films. 3D images of non-uniform. mountain forms are obtained and the morphology of these clusters becomes pyramidal-shaped.
REFERENCES
[01] Zhiyong Zhang, Yuanyuan Lv, Junfeng Yan, Dandan Hui,Jiangni Yun, Chunxue Zhai, Wu Zhao Journal of Alloys and Compounds 650 (2015)
[02] Ni Huang, Jinxia Shu, Zhonghua Wang, Ming Chen, Chunguang Ren,Wei Zhang , Journal of Alloys and Compounds 648 (2015)
[03] H.W. Wu, C.H. Chu, Structural and Optoelectronic Properties of AZO/Mo/AZO Thin Films Prepared by RF Magnetron Sputtering, Mater. Lett. 105 (2013)65–67.
[04] M. Benhaliliba, C.E. Benouis, F. Yakuphanoglu, A. Tiburcio-Silver, C. Aydin, Journal of Alloys and Compounds 527 (2012) 40– 47.
[05]M. Benhaliliba, C.E. Benouis, Z. Mouffak, Y.S. Ocak, A. Tiburcio-Silver, M.S. Aida, A.A. Garcia, A. Tavira, A. Sanchez Juarez. Superlattices and Microstructures 63 (2013)
ACKNOWLEDGMENTS
The work is included in the PNR projects under contract number 8/U311/R77 and U311/R81, supported by ‘‘Agence thematique de recherche en science et technologie’’ (ATRST) and national administration of scientific research It is included in CNEPRU project N° B00L02UN supported by Oran University of Sciences and Technology Mohamed Boudiaf