1. MEMS Class 9 Modeling of Thermally Driven MEMS Mohammad Kilani

2. Thermoelectric V-Beam ActuatorF V-

3. Thermoelectric Bimorph Actuator
Hot arm
Cool arm V+ V-
Direction of Motion

4. Thermopnuematic Actuator

5. Governing Equations T(x,y,z,t) k: thermal conductivity : density
cp: specific heat
h: convective heat transfer coefficient

6. Lumped capacitance (parameter) model

7. Lumped capacitance (parameter) model

8. Lumped Capacitance Model
Linear PDE. 1st order in t, 2nd order in x. What B.Cs and I.Cs are needed?

9. Validity of the lumped capacitance model

10. Validity of the lumped capacitance model
Bi scales with Lc, In microstructures Bi is usually small.

11. Non-dimensional Solution
T(x,y,z,t)