1. Hybrid Scanning Probe Microscopy For the Two Year College
Rick Vaughn, Ph.D.
Rio Salado College
Tempe, Arizona

3. Welcome and Introductions
Rick Vaughn, Faculty Chair STEM Initiatives
Rio Salado College is primarily a distance education institution offering over 40 degree and certificate programs in 43 states

4. Partnerships
Rio Salado College and Arizona State University have come together in a unique partnership to give students hands on clean room opportunities while earning their hybrid Nanotechnology certificate. This partnership allows for cost effective delivery of essential skills for micro and nanotechnology at the community college level
Rio Salado College also partners with the Southwest Center for Microsystems Education (SCME) implementing MEMS kits for teacher development, curriculum, course design, and community outreach

5. History with Nano and MEMS
2011 – RV Comes to Rio to head “STEM” initiatives
2012 – MNT Conference Penn State
NACK Workshops
2013 Began work on Nanotechnology AAS/Certificate of Completion
2015 Program Approved – expansion to include MEMS
2016 Expansion of SPM curriculum

6. Overview of program development process
Internal Vetting
Higher Learning Commission
Substantive Change
Early Alert
Instructional Council
DoE Approval
Program Live 2016
Summer 2017 – 3 students

7. Curriculum AAS – 62 Credits Gen Ed STEM Core (Restricted Electives)
General Principles of Nanotechnology
Intro to MEMS
CCL/Capstone (18 credits)

8. Curriculum CCL – Based on Penn State Model
MNT201 Materials, Safety and Equipment for Nanotechnology MNT210 Basic Nanotechnology Processes MNT220 Materials in Nanotechnology MNT230 Patterning for Nanotechnology MNT240 Materials Fabrication with Nanotechnology MNT250 Characterization of Nanotechnology Structures and Materials

9. Unique Program Features
Commitment to authentic training via distance and hybrid delivery
Proprietary Learning Management System
Kits by Mail
Virtual Field Trip
Remote Access
Lab partners

10. Virtual Field Trip
Designed to offer students an authentic lab experience in the cleanroom
Prepares students for actual lab experiences
Reduces errors in real cleanroom setting
Launching point for remote access

11. Demo of Virtual Field Trip
HTML Version
Remote Access at NCI-SW
VR Headset version also available

12. NT-MDT

13. A short silent film

14. AFM Basics https://www.youtube.com/watch?v=QZLda253cYE
Credit: Worcester Polytechnic Institute

15. AFM Modes Contact Mode – Sliding Allows fastest scanning
Allows computation of force and thus quantification of material properties
Friction often provides the greatest materials contrast
Wear can be analytically useful

16. AFM Modes
Force Curve Mapping: Intermittent Contact at frequencies below cantilever resonance
Removes shear nearly as well as dynamic mode, but sometimes allows faster scanning
Allows computation of force
Adhesion and stiffness can be separately interpreted
“Spectroscopic” distance-dependent measurements
Avoid instabilities of cantilever resonance

17. AFM Modes
Dynamic (AC/”tapping”) mode: intermittent or non-contact at/near cantilever resonance
Attractive regime is extremely delicate, even liquid surfaces can be imaged (noncontact)
Can choose to make slightest contact, thus extreme surface sensitivity on soft materials
Shortest contact time means greatest degree of dynamic stiffening and shear reduction
Enables other AC methods, electrostatic, Kelvin-probe, multi-frequency eigenmodes, contact resonance, super/sub harmonics

18. Credits Dalia Yablon, Surface Char LLC dalia.yablon@surfacechar.com
Greg Haugstad, University of Minnesota

19. Why does tip size matter?
Discuss the result of contact mode scanning on the following feature:

20. Some of the math involved
Use of the NanoSolver with Software simulator

21. Simulator Software
An excellent addition for our hybrid program

22. Next Steps
$100K grant from Workforce Development – Supplementary Prop 301 funds
Mask Aligner
Marketing
$100K more from regular Prop 301
Infrastructure and support
Other proposals pending

23. Questions? Rick Vaughn Rick.Vaughn@riosalado.edu 480-517-8661
Jeanne Ratliff- is sadly no longer at Rio