1. Capacitance extraction for Medipix- like Sensor using TCAD Simulation
Mathieu Benoit

2. Introduction
Goal : Predict Noise in Medipix3RX Microns n-in-p assemblies using Capacitance predicted using TCAD Simulation
Method :
Create a 3D model in TCAD of a Micron sensor, using mask and process simulation
Perform DC and AC simulation to extract Capacitance vs Frequency curve between each node of the model

3. Process Flow TCAD Simulation
Process flow is a method using GDS production files to simulate the fab process flow and generate a realistic structure for Electrical simulation
I wrote a generic GDSII Pixel mask generator that allow to draw realistic mask for various geometries

4. Python GDSII Generator
You specify:
Pitch
Implant/Al width
Passivation opening width
Contact to implant width
Guard Ring Dimensions
Full Timepix Matrix + GR
3x3 CLICPix Sensor
3x3 Timepix Sensor

5. Process Flow Simulation

6. Process Flow Simulation+ =

7. Pixel Profile after full process SimulationAl
P-Spray N+

8. Next Step
I have a fully simulated single pixel, after input of Micron, I will generate a 3x3 model
From the 3x3 model I will extract :
Interpixel Capacitance vs Frequency (what frequency ? )
Pixel-Backside Capacitance
Using GDSII python generator, we can generate many variation on the geometry to compare Capacitance results
Possibility to add Bumps and ASIC Using Sentaurus Interconnect