1. Energy Savings Projects
ON Semiconductor
Energy Savings Projects

2. History of Phoenix (52nd St.) Site
In 1999, ON Semiconductor was born from a division of the semiconductor sector of Motorola.
The 52nd Street Site was one of the oldest semiconductor site within Motorola.
The first building was constructed in 1956.
The latest was built in 1996.
Many of Motorola’s manufacturing fabs were closed or moved offsite from
The site once hosted 1.5 million square feet of space on 104 acres.
There were approximately 8 manufacturing fabs, and a multitude of labs at the site.

3. Pressure to Success A severe economic downturn in 2000-2003
ON Semiconductor was struggling with high debt
Cost savings was a critical company initiative

4. Opportunities Energy Savings had many “low hanging fruit”
With the separation and closures of manufacturing, the site was very fragmented.

5. Execution – 5 Year Effort
Space consolidation.
Shut down central plants and reconfigured piping.
Utilized heat exchangers
Shut down unnecessary air handling systems, pumps, compressors, etc.
Relocated personnel and shutdown buildings and areas
Consolidated RODI facilities

6. Execution – 5 Year Effort
Low Hanging Fruit.
Reduced light lumens where appropriate
Light reduction during off-hours.
Night temperature setbacks
CDA system improvements
Steam system improvements
Reduction in Chemical Usage, RODI, Waste Treatment Systems, & Cooling Towers

7. Execution – 5 Year Effort
Additional Efforts
Optimized boiler and chiller operating parameters.
Reduced factory operating parameters.
Added some VFDs on large motors.
Significant improvements to DI Water plant.
Added controls to many systems

8. Electricity Results

9. Natural Gas Results

10. Water Results

11. Sewer Results

12. Sample Project Details
Convert an Reverse Osmosis unit to 2nd pass
Converted a four array single pass unit to dual 2 array double pass.
Reduced load on Dual Beds,
Regenerations of Dual Beds went from 4 days to 15 days.
Savings
1.4 Mgal / year in DI water
$140k / year on HCl and NaOH

13. Sample Project Details
Reduce Cleanroom Airflow from 120fpm to 100fpm
Shutdown 6 large recirculation air handlers.
Savings 611 MWh / yr.
Future 100fpm to 70fpm?

14. Sample Project Details
Consolidate RODI plants
Shutdown south side RODI plant and connected plants from north side system.
Very little usage from south manufacturing site.
Large cost to operate Ultra Pure Water plant.
North side plant had plenty of capacity, lower cost to run.
Savings $15,000 / month in electricity, water, sewer, labor, and maintenance costs.

15. Future – No time for rest
Projects become harder to do, but necessary!
Still have 100+ cost savings project ideas. Prioritized based on benefit and effort.
Implement Rinse Reclaim in 1970s vintage fab.
Replace older inefficient equipment
Boilers
Premium Efficiency Motors
More significant improvements to DI Water system.
Further large equipment operating efficiencies.

16. Lessons Learned All the little things do add up!
Most projects saved less than $10,000 annually
Consider all energy savings ideas, then prioritize them based on payback and effort needed to accomplish.
Internal facilities operators, techs, and engineers probably know best what can be done.
Design energy savings into new installations.
Design “Green” where feasible.