1. Maximal Permissible Error on the positioning: MPEE [µm] = 0.3 + L/1000
100mm
1250mm
Seismic sensor
Wire going through the BPM and the magnet
700mm
BPM
Magnet
Nano-positioning system
Stretcher
Manual pre-alignment system
CMM granite table
Maximal Permissible Error on the positioning: MPEE [µm] = L/1000

3. Air bearings
Lock
Scale reader
Motor
Sensor
Lock command
Stator
Rotor
Aim: If the measurements were performed on a perfect cylinder with a diameter of 0.1 mm, the form error measured by the sensor should be smaller than 0.1 µm.
NB: Smallest measurement uncertainty linked to the circularity measurement of a gage (METAS): 10 nm

4. Allowing high repositioning accuracy Sensor (next slide)
Air bearings:
Vibrations
The rotor + stator
Motion error < 0.1 µm
Thickness
Scale & readers
Allowing high repositioning accuracy
Sensor (next slide)
Precitec sensor
Micro-Epsilon sensor
White light interferometre
Motor
Must not generate too much heat nor vibrations
Must stand strong magnetic fields
Lock: mechanical re-positioning using the elasticity: which size for the aperture?
Total system
Weight < 1.2 Kg (might be possible to increase to 3)
Communication: synchronization of the data from the sensor with the CMM
Possibility of air supply
Possibility of energy supply
Optical fiber
Electricity for the motor
Clamping system adapted to the CMM
Air bearings
Lock
Scale reader
Motor
Sensor
Lock command
Stator
Rotor
Possibility of measuring from 100 µm up to 250 µm features (wires)
Possibility to measure vertical wire?!

5. Micro-Epsilon sensors
Spot sizes: 6 µm or 9 µm
Resolution (claimed): 10 nm or 16 nm
Precitec white light sensor
Spot size: 3.5 µm
Resolution (claimed): 3 nm
66 mm * φ 8mm, 36 g
White light interferometric sensor
I do not know more about it

6. Z
Function Analysis System Technique: FAST diagram X Y
Why?
How?
Technical solutions

8. Air bearings :
12x24 mm size
47,7N load
5 µm gap
323 €
The error motion is a function of the bearing surface