1. 1. INTRODUCTION OF COMPANY
Mecaro Co., Ltd is No.1 Best Semiconductor parts company authorized in parts area by producing optimal semiconductor part of equipment through ceaseless technology development and research for about 15 years.
Company Name : Mecaro CO., Ltd.
Foundation Date :
CEO : Jaejung, Lee
Business Field : Semiconductor Heater Block, Semiconductor Chemical Source, GEM Foil, Etc.
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2. 1. INTRODUCTION OF COMPANY
GEM foil production milestone
2012: MOU between Korea CMS and MECARO for the industrialization of GEM foil production
2012: Technology transfer agreement with CERN
: 1st 3-year government funding (~$2M) for facility set-up
: 2nd 3-year government funding (~$2M) for the large GEM foil production for the CMS Muon Upgrade for LHC Long Shutdown 2
Technology Transfer
CMS Upgrade MOU
Production MOU
RD51 MPGD team
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3. 2. GEM FOIL PRODUCTION FACILITIES
CLEAN ROOM
Clean room is composed of a variety of rooms. : Room for production of GEM foil, Room for analysis of GEM foil
Clean room is always maintained at less than Class.
The equipment will be constructed for the production of super large size GEM foil. (Supersized Double mask align exposure machine, DES line ) ※ DES : Development & Etching & Strip
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4. 2. GEM FOIL PRODUCTION FACILITIES
FACILITIES (Current)
Various size bath facilities are set-up. > To produce a GEM foil of various sizes. (Small, Large, Super Large size) > To produce a large number of GEM foil.
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5. 2. GEM FOIL PRODUCTION FACILITIES
FACILITIES (Current)
Various equipment has been built for the production of GEM.
Through a variety of analysis equipment to produce the highest quality GEM.
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6. 2. GEM FOIL PRODUCTION FACILITIES
FACILITIES (Proceeding)
The new equipment will be constructed to produce a super large size of GEM : Supersized Double mask align exposure machine will be installed. (~ ) : DES (Development & Etching & Strip) line machine (~ )
Expected to enhance productivity and improve quality of large size GEM
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7. 3. DEVELOPMENT STATUS MECARO GEM FOIL
50x50, 100x100, 300x300 GEM Foil Developed for Double Mask Method
100x100 GEM Foil test completed (CERN CMS, ) > Gain 2x higher than CERN foils (Triple-GEM)
IBS GEM Foil(135x175) test completed (IBS, ) > Gain 10x higher than other company foils (Triple-GEM)
500 x 1000 GEM Foil developing for Single & Double Mask Method ( ~)
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8. 3. DEVELOPMENT STATUS MECARO GEM FOIL
IBS GEM Foil(135x175 Custom Design) delivery completion (IBS, )
100x100 GEM Foil delivery completion (Korea University, )
100x100 GEM Foil delivery planning (IBS, )
300x300(Custom Design) GEM Foil delivery planning (IBS, )
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9. 4. MAIN PRODUCTS
Available in various sizes and designs produced within 1250mm X 710mm.
Capacity : Small & Large size (2000 foils/year), Super Large(700 foils/year)
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10. 5. CONTACT
Head Office , Sandan-ro, Pyeongtaek-si, Gyeonggi-do, Korea(Mogok-dong 439-5)
TEL : FAX :
Eumseong Office 261, Wonnamsandan-ro, Wonnam-myeon, Eumseong-gun, Chungcheongbuk-do,
Korea (717) TEL : FAX :
Homepage :
The person in charge
Sales team - Sangwook, Park (TEL : ,
Engineer - Yeonsu, Yu (TEL : , - Taejun, Kim (TEL : ,
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