1. Date of download: 10/7/2017
Copyright © ASME. All rights reserved.
From: Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry
J. Micro Nano-Manuf. 2017;5(3): doi: /
Figure Legend:
Sketch of the imaging scatterometer setup. The liquid filter and the charged-coupled device (CCD) camera can be interchanged with a fiber coupled spectrometer turning the setup into a spectroscopic scatterometer.

2. Date of download: 10/7/2017
Copyright © ASME. All rights reserved.
From: Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry
J. Micro Nano-Manuf. 2017;5(3): doi: /
Figure Legend:
Experimental data and best fit for scatterometry data for a 1D grating with a pitch of 3.3 μm. (a) Spectrometer-based scatterometry. Best reconstruction for a height of (422 ± 4) nm and a width of (1230 ± 30) nm. (b) Imaging scatterometry. Best reconstruction for a height of (426 ± 6) nm and a width of (1240 ± 30) nm.

3. Date of download: 10/7/2017
Copyright © ASME. All rights reserved.
From: Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry
J. Micro Nano-Manuf. 2017;5(3): doi: /
Figure Legend:
Three-dimensional microscope images with corresponding profiles for a segment in the center of each image, for 3.3 μm one-dimensional (1D) silicon grating. (a) AFM, (b) confocal microscope, 150× objective, and (c) confocal microscope, 50× objective.

4. Date of download: 10/7/2017
Copyright © ASME. All rights reserved.
From: Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry
J. Micro Nano-Manuf. 2017;5(3): doi: /
Figure Legend:
BRDF measurements obtained with the Fourier lens system at a wavelength of 550 nm: (a) 1D grating with a pitch of 4 μm and a height of around 500 nm and (b) quadratic 2D grating with a pitch of 2 μm. The different diffraction orders are indicated. The parasitic light arises from multiple reflections in the optics and is avoided in the data analysis.

5. Date of download: 10/7/2017
Copyright © ASME. All rights reserved.
From: Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry
J. Micro Nano-Manuf. 2017;5(3): doi: /
Figure Legend:
Comparison of measurements results for ten 1D gratings of different heights. (a) Direct comparison of all the techniques compared individually. The name of the characterization method applies to graphs both horizontally and vertically. As a guide to the eye, a solid line is plotted to indicate when the two methods give the same result. Further away from this line indicates a deviation between the techniques. (b) Deviation of all measurements with respect to the AFM measurements plotted as a function of the heights found using AFM.

6. Date of download: 10/7/2017
Copyright © ASME. All rights reserved.
From: Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry
J. Micro Nano-Manuf. 2017;5(3): doi: /
Figure Legend:
AFM Profile averaged from 250 lines. A rounding of the corner is observed and highlighted by the dashed line.

7. Date of download: 10/7/2017
Copyright © ASME. All rights reserved.
From: Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry
J. Micro Nano-Manuf. 2017;5(3): doi: /
Figure Legend:
Experimental data obtaining using the Fourier lens scatterometer using a wavelength of 550 nm and best fitting models. Diffraction efficiencies are normalized with respect to the zeroth-order: (a) measurements on a 1D grating and (b) measurements on a 2D grating.

8. Date of download: 10/7/2017
Copyright © ASME. All rights reserved.
From: Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry
J. Micro Nano-Manuf. 2017;5(3): doi: /
Figure Legend:
Difference between the heights estimated by the imaging scatterometer and by the AFM. The error bar indicate a combination of the 95% confidence interval limits for the imaging scatterometer and the k = 2 uncertainties of the AFM measurements found by treating the 95% confidence interval as an uncertainty and performing standard error propagation. The dashed line is plotted through zero to guide the eye. A clear offset is observed.

9. Date of download: 10/7/2017
Copyright © ASME. All rights reserved.
From: Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry
J. Micro Nano-Manuf. 2017;5(3): doi: /
Figure Legend:
Experimental data and best fit for scatterometry data for a 1D grating with a pitch of 3.3 μm using a model with rounded top corners. (a) Sketch of the new model with rounded top corners. The rounding, r, is defined as the radius of the dashed circle while the height, h, and the width, w, are the same as in the rectangular model. (b) Spectrometer-based scatterometry, using a model with rounded corners. Best reconstruction is found for a height of (435 ± 4) nm and a rounding of (200 ± 20) nm. The chi-square found using rounded corners is: χ2 = 0.20, compared to χ2 = 0.55 for a rectangular model.