1. 14ME404 INTRODUCTION TO MEMS DISCIPLINE ELECTIVE-II Thanking everyone for MEMS as an elective subject Dr.J.S.Senthilkumaar, Professor Mechanical Engineering.

2. Objectives  Gain a fundamental understanding of standard micro fabrication techniques and its issues  Know the major classes, components and applications of MEMS devices / systems and to demonstrate an understanding of the fundamental principals behind the operation of these devices / systems.  Understand the unique requirements, environments and applications of MEMS  Apply the knowledge of micro fabrication techniques and applications to the design and manufacturing of MEMS device or a Microsystems.  Foster interest for further study.

3. Syllabus  Unit 1: OVERVIEW AND WORKING PRINCIPALS OF MEMS AND MICROSYSTEMS  UNIT 2: ENGINEERING SCIENCE FOR MICROSYSTEMS DESIGN AND FABRICATION  UNIT 3: MICROSYSTEMS DESIGN  UNIT 4: MATERIALS FOR MEMS  UNIT 5: MICROSYSTEMS AND THEIR FABRICATION

4. UNIT 1: OVERVIEW AND WORKING PRINCIPLES OF MEMS AND MICROSYSTEMS  Evolution of microfabrication,  Microsystems and microelectronics  Microsystems and miniaturization  Applications of MEMS in Industries  Micro sensors, micro actuation, MEMS with micro actuators  Micro accelerometers  Micro fluidics

5. WHAT IS MEMS?  MEMS = MicroElectroMechanical System  Any engineering system that performs electrical and mechanical functions  with components in micrometers is a MEMS. (1 μm = 1/10 of human hair)  Available MEMS products include:  ● Micro sensors (acoustic wave, biomedical, chemical, inertia, optical, pressure, radiation, thermal, etc.)  ● Micro actuators (valves, pumps and microfluidics; electrical and optical relays and switches; grippers, tweezers and tongs; linear and rotary motors, etc.)  ● Read/write heads in computer storage systems.  ● Inkjet printer heads.  ● Micro device components (e.g., palm-top reconnaissance air-crafts, mini robots and toys, micro surgical and mobile telecom equipment, etc.)

6. HOW SMALL ARE MEMS DEVICES?  They can be of the size of a rice grain, or smaller!  Two examples:  - Inertia sensors for air bag deployment systems in automobiles  - Microcars

7. Inertia Sensor for Automobile “Air Bag” Deployment System

8. Micro Cars

9. MEMS  MEMS = a pioneer technology for Miniaturization –  A leading technology for the 21 st Century, and  an inevitable trend in industrial products and  systems development

11. MINIATURIAZATION  – The Principal Driving Force for the 21 st Century Industrial Technology  There has been increasing strong market demand for: “ Intelligent,” “ Robust,” “ Multi-functional,” and “Low-cost” industrial products. Miniaturization is the only viable solution to satisfy such market demand

12. Market Demand for Intelligent, Robusting, Smaller, Multi-Functional Products

13.  Small systems tend to move or stop more quickly due to low mechanical inertia.  It is thus ideal for precision movements and for rapid actuation.  Miniaturized systems encounter less thermal distortion and mechanical vibration due to low mass.  Miniaturized devices are particularly suited for biomedical and aerospace applications due to their minute sizes and weight.  Small systems have higher dimensional stability at high temperature due to low thermal expansion.  Smaller size of the systems means less space requirements.  This allows the packaging of more functional components in a single device.  Less material requirements mean low cost of production and transportation.  Ready mass production in batches. Miniaturization Makes Engineering Sense!!!