Applications of Micro Electro Mechanical Systems (MEMS) Jobin Philip.

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Presentation transcript:

Applications of Micro Electro Mechanical Systems (MEMS) Jobin Philip

Introduction IC invention Large number of transistors on single silicon chip Interconnected to functional circuits

Micro-fabricated Membrane Mirrors 12 mm in diameter Less than 1um in thickness

Micro-fabricated Membrane Mirrors Optical Switching High optical efficiency Good potential for aberrations correction Coupling efficiency of 3000 interconnections

Micro-fabricated Membrane Mirrors

Two Axis Micro-mirror

Micro-Mirror

Optical Switch

2x2 Optical Switch Cross State Bar State

Optical Switch

NxN Optical Link

Agilent Bubble Switch

Segmented Mirrors Space Optical Telecommunication  Reliable, Small in size, Light in weight, & Easy to fabricate Air Turbulence causes optical aberrations Quick response time, therefore able correct optical aberrations

Segmented Micro-Mirrors

Grating Light Valve (GLV) IncidentReflected O th Mode Ribbons Silicon Light Machines: Incident Diffracted  +1 st Mode +3 rd Mode Down ribbons Up ribbons

GLV Projection System Digital Projection System using Grating Light Valve  If pixel is “off”, light is reflected straight off GVL into the absorbing screen  If pixel is “on”, light is diffracted at an angle, propagating through the lens to the focal plane GLV Color Wheel Lens Focal Plane Prism Screen Optical Input

Next Generation Projectors

Question…???

Optical Switch

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