Nanowires growth and devices applications

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Presentation transcript:

Nanowires growth and devices applications Growth mechanism and methods Examples of device applications Trieste, 24.11.06 national laboratory for advanced Tecnologies and nAnoSCience

One dimensional nanostructures obtained by higly anisotropic growth Single crystal “bottom up” approache Not embedded in a matrix (≠ QWs, T-wires, self assembled Qdots) Nanodevices Interconnection in nano-optoelectronics Photonic crystal ...................... national laboratory for advanced Tecnologies and nAnoSCience

(111) oriented Si “whiskers”: a small Au particle on a Si(111) surface heated at 950° exposed to a flow of SiCl4 and H2 similar results obtained with: Pt, Ag, Pd, Cu and Ni national laboratory for advanced Tecnologies and nAnoSCience

Experimental evidences: no axial screw dislocation an “impurity” is essential a small “globule” is present at the tip of the whiskers during the growth The role of the impurity is to form a liquid alloy droplet at relatively low T. The selection of the impurity is important. The VLS model: The impurity melt at the surface making an alloy The liquid droplet is the preferred site for deposition and become supersaturated The whiskers grow by precipitation of Si from the droplet national laboratory for advanced Tecnologies and nAnoSCience

VLS growth of Ge nanowires with Au catalyst Ge particles+ Au nanoparticles on a TEM grid, heated in the TEM T= 500° C T=800 ° C national laboratory for advanced Tecnologies and nAnoSCience Wu et al, J. Am. Chem. Soc. 123, 3165 (01)

Different growth methods: laser ablation, thermal evaporation, MOCVD, MOVPE, CBE, MBE Different catalyst shape and processing: uniform layer, nanoparticle, patterned layer Different substrates: no substrate, oxide, oriented wafer, looking for oriented NWs national laboratory for advanced Tecnologies and nAnoSCience

Laser catalytic growth of Si NW with the Si0.9Fe0.1 target TF=1200°C 100 nm 10 nm national laboratory for advanced Tecnologies and nAnoSCience Morales et al, Science 279, 208 (98)

single cristal (111) GaAs nanowires Au is present at the tip. Laser catalitic growth of GaAs NWs using (GaAs)0.95M0.05 target (M=Au, Ag, Cu) TF=800-1030°C 50 nm 5 nm 5 μm 20 nm single cristal (111) GaAs nanowires Au is present at the tip. national laboratory for advanced Tecnologies and nAnoSCience Duan et al APL 76, 1116 (2000)

Self catalitic growth of GaN NWs self standing GaN layer thinned for TEM (≤ 300 nm) heated at 1050° C in a TEM Above 850 in high vacuum GaN(s) ―› Ga (l) + 0.5 N (g) + 0.25 N2 (g) GaN (g) or [GaN]x (g) in-situ study of the decomposition and resulting nanostructure evolution national laboratory for advanced Tecnologies and nAnoSCience Stach et al, Nano Lett. 3, 867 (2003)

room temperature analysis of the nanostructures: single crystal GaN NWs [0001] oriented av diameter 50 nm gr rate 300 nm/s self catalytic process could be important to avoid undesired contamination from foreign metal atom (catalyst) national laboratory for advanced Tecnologies and nAnoSCience

MOCVD grown ZnSe NWs on Si(100) uniform 1 nm Au catalyst 2 μm 200nm national laboratory for advanced Tecnologies and nAnoSCience Zhang et al APL 84, 2641 (2004)

Control of Diameter and lenght of NW 9.7±1.0 nm InP NW grown by laser ablation Si/SiO2 substrate size selected Au nanocluster solution 19.9±3.0 nm ≠0 nucleation time 30.0±6.0 nm Gudiksen et al, J. Phys. Chem. B 105, 4062 (2001) national laboratory for advanced Tecnologies and nAnoSCience

In group IV and III-V mainly [111] NW. On (111)B substrates, vertical NW! Colloidal solution of 20 nm Au particles MOVPE growth of InP NWs on (111)B InP wafer vertical NW uniform diameter ZB structure [111] oriented but high density of rotational twins national laboratory for advanced Tecnologies and nAnoSCience Bhunia et al, APL 83, 3371 (2003)

vertical NWs array: photonic crystal? EBL + metal lift-off Au discs annealing growth l= 3 μm, top Ø 50 nm l= 1 μm, top Ø 140 nm Mårtensson et al, Nanotechnology 14, 1255 (2003) national laboratory for advanced Tecnologies and nAnoSCience

Oriented NW could be usefull for “multi-wire” devices applications However, the “easy” growth direction [111] has two important drawbacks: it is the preferable direction for forming stacking faults one needs to use the technologically unfavourable (111)B substrate orientation instead of the widely used (001) national laboratory for advanced Tecnologies and nAnoSCience

preferential orientation depend on the annealing [001] NW defect free [111] NW twinned InP(001) surface Au nanoparticles + MOVPE preferential orientation depend on the annealing national laboratory for advanced Tecnologies and nAnoSCience Krishnamchari et al, APL 85 2077 (04)

NWs can grow epitaxially and defect free on highly mismatched substrate: (111) InP wires on Ge(111) Bakkers et al, Nat Mat 3,769 (2004) national laboratory for advanced Tecnologies and nAnoSCience

n-type InP NW on n-type Ge substrate I-V measurement between the NW tip and the substrate by using a AFM with conducting tip. Low resistance ohmic behavior Low resistance heterointerface national laboratory for advanced Tecnologies and nAnoSCience

Can VLS always explain NW’s growth? InAs NW growth by MOVPE on InAs(111)B Au nanoparticles 1 μm 1.3 nm SiOx, 580° C 1 μm 1.3 nm SiOx + Au nanop. , 580° C national laboratory for advanced Tecnologies and nAnoSCience Dick et al, Nano Lett. 5, 762 (2005)

from Au-In phase diagram: Tm= 490° 24.5-25.0% In SiOx, SiOx+Au Au + anneal from Au-In phase diagram: Tm= 490° 24.5-25.0% In Tm= 490° 28.8-31.5 % In Tm= 460° 35.4-39.5% In EDS on the NW’s tip: 25-30% In in Au. growth stops when the particle melts! Growth rate drop is not a matter of InAs decomposition. The oxide layer reduces In incorporation in Au, and prevents melting. Au is not a catalyst, but provide a low energy interface where material is collected, yealding higher growth rate. national laboratory for advanced Tecnologies and nAnoSCience

But also catalyst free growth of GaAs NWs! Selective Area MOVPE on GaAs (111)B d0=200 nm d0=50 nm national laboratory for advanced Tecnologies and nAnoSCience Noborisaka et al, APL 86, 213102 (05)

light collection in axis Optically pumped NW laser ZnO on sapphire, Au catalysed [1000] growth, exagonal facets. Optical pumping at 10° from the axis, light collection in axis Huang et al, Science 292, 1897 (2001) national laboratory for advanced Tecnologies and nAnoSCience

Single NW electrically driven laser Duan et al, Nature 421, 241 (2003) Single NW electrically driven laser [0001] wurzite Au cat. CdS NW NW as single mode optical cavity when 1≈(πD/λ)(n12-n02)0.5<2.4 for CdS D≥70 nm 100 nm 5 μm PL excited on the NW, emission at the tip! PL collected at the NW tip: Fabry-Perot cavity! m(λ/2n1)=L national laboratory for advanced Tecnologies and nAnoSCience

Optically pumped single mode lasing of single NW! emission from the NW end national laboratory for advanced Tecnologies and nAnoSCience

+ EBL and contact deposition= distributed p-n junction 5 μm n-type CdS wire on p+ Si wafer + EBL and contact deposition= distributed p-n junction RT electrically driven single NW lasing!! national laboratory for advanced Tecnologies and nAnoSCience

p-n junction by crossing p- and n-type NWs 5 μm p-n junction by crossing p- and n-type NWs electroluminescence from the NW end is modulated: optical cavity national laboratory for advanced Tecnologies and nAnoSCience Huang et al, Pure Appl. Chem, 76,2051 (2004)

Heterostructures technolgy + nanowhisker growth = one dimensional heterostructures small cross section, efficient lateral lattice relaxation one can combine different materials despite their bulk lattice mismatch CBE on GaAs(111)B 40 nm Au nanoparticles [100] oriented due to the GaAs/InAs misfit at the interface national laboratory for advanced Tecnologies and nAnoSCience Björk et al, APL 80, 1058 (2002)

single wire transport measurement: InAs/InP/InAs NW reference InAsNW barrier height qΦB=0.6 eV national laboratory for advanced Tecnologies and nAnoSCience

Core-shell heterostructures strong GaAs core PL in combination with modulation doping promising canditates for 1D electron gas structures MOVPE growth: GaAs first at 450°C, then AlGaAs at 630°C. enhanced lateral growth (non VLS) Seifert et al, JCG 272, 211 (2004)

Ethanol sensing ZnO NW-based device NW ultrasonically dispersed in ethanol, dried, deposited on interdigitated Pt contacts by spin coating. national laboratory for advanced Tecnologies and nAnoSCience Wan et al, APL 84, 3654 (2004)

In air high R due to O2- adsorbed at the surface capturing electrons. Ethanol reduces the density of O2- ions and increase the electron density.Transport properties of the entire NW change enhanced sensitivity at 300°C

Nanotrees by multistep seeding with Au nanoparticles GaP on GaP (111) by MOVPE national laboratory for advanced Tecnologies and nAnoSCience Dick et al, J. Cryst. Gr. 272, 131 (2004)

Position-controlled Inteconnected InAs Nanowire Networks InAs on InP (111) by MOVPE Au and Au-In assisted national laboratory for advanced Tecnologies and nAnoSCience Dick et al, Nano Letters (2006)

growth of the “trunks” in the wurtzite <0001> direction Litographycally defined Au seeds to form a nework in the <211> directions growth of the “trunks” in the wurtzite <0001> direction branches seeded by aerosol Au-In particles Growth of the branches in the six equivalent <1100> direction merge of the btranches with the neighboring trunks national laboratory for advanced Tecnologies and nAnoSCience

Branches grows epitaxially on the trunks and merge as single crystal to the neighboring trunks national laboratory for advanced Tecnologies and nAnoSCience Dick et al, Nano Letters 2006