X-Ray Reflection Data Analysis Update Information can be extracted from XRR data: - Film thickness - Roughness

Pilatus 100K Detector System Pixel size172 x 172 μm 2 Format487 x 195 = pixels Active area83.8 x 33.5 mm 2 Counting rate> 2x10 6 counts/s/pixel Energy range3 – 30 keV Readout time< 2.7 ms Framing rate> 200 Hz K i is the direction of incident X- ray, pointing to sample. The recorded image is the reflected beam intensity image K i is the direction of incident X- ray, pointing to sample. The recorded image is the reflected beam intensity image Schematic of Experiment Geometry

Sb thickness: t = (# of intensity peaks* Sb film lattice) =21* nm = 23.7 nm Specular reflection peak The movie is in the link, watch the oscillation of the specular reflection peak during Sb growth Specular reflection peak The movie is in the link, watch the oscillation of the specular reflection peak during Sb growth Intensity of the peak Monitor Oscillation of Specular Reflection Peak during Sb Growth

Film Thickness vs Growth Time Film thickness obtained methods: Quartz crystal microbalance: Directly from the calibrated QCM read out. Specular Reflection beam: Count the peak number and calculate the thickness Two methods agree well, Confirm the Sb film growth is layer by layer Two methods agree well, Confirm the Sb film growth is layer by layer

Slice 1 Linear scale Intensity vs pixel # Log scale Intensity vs pixel # Convert pixel # to Qz value, plot Intensity vs Qz. Note that the x axis is reversed due to the experiment set up, fringes along Qz can be observed. Background Area Background was subtracted to obtain accurate data. Analysis of the image frame after deposition: off-specular reflection peak Analysis of the image frame after deposition: off-specular reflection peak

Fourier Transform 23 nm Transformed peak position tells Sb film thickness around 23 nm, agree well with thickness obtained from quartz crystal microbalance monitor during growth. The signal is not so clear, may due to the background is not perfectly handled. Need to further modify the codes for background consideration. Roughness (peak broaden), will be easier when the peak is sharper. Transformed peak position tells Sb film thickness around 23 nm, agree well with thickness obtained from quartz crystal microbalance monitor during growth. The signal is not so clear, may due to the background is not perfectly handled. Need to further modify the codes for background consideration. Roughness (peak broaden), will be easier when the peak is sharper.

FFT Consider background and different data analysis methods to improve the result Clearer peak