Instrumentation and Metrology for Nanocharacterization

State of the Art Where is it? 3D Structural Morphology (critical dimensions) Atomic Structure Defects What is it? 3D Chemical Chemical Composition Electronic Structure What does it do? – How does it behave? What must be measured? Physical and mechanical Properties Performance Biological function Optical Properties Electronic Properties Magnetic Properties Mechanical Properties

State of the Art Where is it? What is it? What does it do – How does it behave ? Techniques AFM, STM, SEM,Optical, X-ray,… Capability Laboratory Static Insitu Dynamic Robustness Statistics Accuracy Modeling

Vision Strive to develop advanced methods and metrology techniques to characterize complex, heterogeneous samples (organic and inorganic systems) in 3 dimensions over all relevant time and length scales (e.g. with 1 nm spatial resolution). This characterization is to be done quickly and practically and should include the structure and chemistry of the sample as well as physical properties (electronic, mechanical, magnetic,...), and it should be done in-situ in the sample's natural environment if possible. Effort should focus on those techniques that will have the greatest impact on existing needs and industries, and that will enable new breakthroughs and promote the commercialization of nanotechnology. The techniques should provide the basis for understanding and leveraging measurement results from bulk techniques and tools that measure collective systems and distributions in a statistical fashion, and support a global measurement infrastructure based on intercomparability and multi-modal compatibility. Development efforts should be aware of practical constraints, including safety, reliability, time-to-market, cost effectiveness, and intellectual property concerns.

Barriers Speed and throughput limitations Automated Control Portable Probe-sample interaction Sample Handling Calibration/standards issues Multiphase System & Interfaces Resolution (Spatial) Resolution  Sensitivity tradeoff Dearth of 3D-capable techniques Chemical Specificity Life Cycle Data Processing and Analysis Bridging Scales Modeling and Simulation “Holy Grails” Roadmap

R&D Needs Standards and Calibration Reference Materials – known heterogeneity on the nanoscale Standard Methods Chemical Composition and Structure Heterogeneous and 3D Instrument Development Resolution Speed New Measurement Approaches Sample Prep Data Processing and Integration

3D Chemical Characterization of Individual Nanostructures Reference materials Characterization of probes Registering different modes of data…. Speed and Dynamics Sensitivity, Resolution, Rapid, Real time Measurement of processes inside cells and following particles into living tissues Nanomaterials dispersions in a matrix Interfaces Bio, protein arrays, … In-Situ Characterization of “Interface” Phenomena Process, reactors, devices Cells/Biological systems and interfaces Hard Problems/Grand Challenges

VISION: Develop a suite of tools and techniques that will allow a detailed characterization (structure, function, & chemistry) of 3-D complex nanostructures at relevant time and length scales. Composition analysis with a sensitivity of a few atoms Structural properties (dimension, crystalline structure, heterogeneities) on a scale of 1 nm Ability to characterize the 3D relationship of components and their interfaces Ability to measure physical properties such as electrical, magnetic, catalytic, electrochemical, and mechanical properties APPLICATIONS: Semiconductor devices, catalyst-by-design, biotechnology, environmental & aerosol, coatings and thin films, high energy-density materials (HEDMs) IMPACTS: Correlate 3D structure and chemistry with bulk property measurement results, provides experimental data to validate modeling results, speeds identification of surrogate methods for commercial testing, allows quality control in nanomaterials and nanomanufacturing. 3D Chemical Characterization of Individual Nanostructures

VISION: Increasing the speed of characterization will lead to productivity improvements, high through-put and dynamic- time resolved capabilities that will improve our understanding of materials and accelerate the commercialization of nano- scale materials.  Ten fold increase in efficiency and productivity for R&D experiments  High trough-put tools enabling morphological, chemical, structural and property determination for a broad range of nano-scale materials  Ability to study dynamic processes in near real time (heating, cooling, deformation and electrical, mechanical, magnetic and chemical perturbations. APPLICATIONS: All manufacturing sectors IMPACTS: Current technology does not exist Reliability and reproducibility of measurements Use across many applications Relevance to known commercial applications Flexibility Speed and Dynamics

VISION: Complete identification and track biological processes at the molecular scale in living cells A tool for mapping protein interactions with high parallelism A tool for imaging dell funciton In 3D An informatic tool and protocols for sharing and collecting system biology information. APPLICATIONS: Medicine, Agriculture, Health Care, Drug Production IMPACTS: Success would lead to a genuine revolution in the diagnosis and treatment of disease including drug design, molecular clinical medicine and precision agriculture. Measurement Processes Inside Cells & Following Particles in Living Tissues

VISION: Develop a robust, quantitative efficient method to evaluate the dispersion of nanoscale materials in a given matrix from synthesis all the way to the final manufactured part. Measure dispersion over all length scales Statistically validated result Fast, simple Capable of measurements in solution and solid matrices and aerosols in air Sensitive (carbon in a carbon based polymer is tough!). APPLICATIONS: Nanocomposites, nano and mesoporous dielectric films, coatings, sensors,.. IMPACTS: Improved reliability, improved processing capabilities, improved yield. Quantitative Measurement of Dispersion of Nanoscale Materials in a Matrix

VISION: Characterize chemical and physical properties of interfaces (burried, organic-organic/inorganic- organic/inorganic-inorganic) as the success or failure of modern devices of systems are determined by a few layuers of atoms at an interface. Nano particle – matrix interactions Structural analysis at the atomic or molecular level at any interface. Interface dynamics; temporal chemical & structural changes at the interface (diffusion). APPLICATIONS: Semiconductor industry, food packaging, pharmaceuticals/drug delivery, agriculture, high performance materials. IMPACTS: Understanding of organic/inorganic interfaces, semiconductor device interfaces (gate dielectrics),... Interface Characterization

VISION:Understand non-equilibrium (reaction) processes at the nanoscale. Includes growth of films, growth of atomic species into clusters into particles etc., under controlled atmospheres, temperatures, pressures, fields (electric, magnetic) and the like. Instrumental techniques using probes with appropriate resolutions and characteristics for the required measurements. Probe cannot be affected in any substantial way by the material, and probe cannot affect the material during the measurement in any substantial way. Special environmental cells required. APPLICATIONS: Interfaces in semiconductor materials  control of electronic properties; many $B economic impact. Catalysts and catalyst supports and their interactions; many $B economic impact. IMPACTS: In-Situ Characterization of “Interface” Phenomena