International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 1 International.

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International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 1 International Students Summer School Nanotechnologies in materials engineering Warszawa-Koszalin 2006 Fundamentals of vacuum plasma technology for thin films deposition (some aspects)

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 2 HV (50)=2600 How the unvisible becomes visible MONO-LAYER MULTILAYER HV (50)=4800 HV (50) = 2800

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 3 DETAILS OF MULTILAYER STRUCTURE

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 4

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 5

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 6 Film Substrate Steel ball Substrate Film

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 7 CALOTEST

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 8

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 9

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 10

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 11

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 12

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 13 IDEA OF CVD PROCESS

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 14 IDEA OF PVD PROCESS

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 15 Zasilacz wysokiego napięcia Plazma Pompa Zasilacz łuku Zasilacz polaryzacji podłoży Podłoże Powłoka Pompa Zasilacz elektrody wnękowej Zasilacz polaryzacji podłoży Podłoże Powłoka Pompa Plazma Zasilacz polaryzacji podłoży Podłoże Powłoka Pompa Plazma Zasilacz wysoko- prądowy Zasilacz polaryzacji podłoży Podłoże Powłoka a) b) c) d) Plazma DIFFERENT PVD METHODS

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 16 Sposoby trawienia jonowego: a) katodowe, b) z pomocniczą anodą, c) w plazmie metalicznej wyładowania magnetronowego lub łukowego, d) trawienie wspomagane wyładowaniem łukowym, e) z emiterem plazmowym, f) wiązką jonów. ION CLEANING

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 17

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 18

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 19

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 20 ARC GUN WITH MECHANICAL IGNITION

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 21

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 22

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 23

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 24

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 25

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 26

International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz 27

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