Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 1 Chapter VIIIb June 18, 2015June 18, 2015June 18, 2015

Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 2 Current Technology Issues

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Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 9 Electrical Properties

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Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 14 plot of the photoconductivity as a function of the light intensity. Measurement of ambipolar diffusion length

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Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 17 Measurement of Staebler Wronski effect indicates that light induced defect generation saturates. The saturation value of defect density in room temperature is ~2x10 17 cm -3 and is independent of illumination intensity and sample temperature up to 70 o C.

Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 18 A charged version of Deep level transient spectroscopy (Q-DLTS) is used to evaluate electronic density of states for undoped a-Si:H. Negatively charged defect state distribution Neutral defects represents dangling bonds

Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 19 R=H 2 /SiH 4 >10: protocrystalline occurs for growth on glass: an evolution from amorphous Si to microcrystalline Si When R<10, the film grown is purely amorphous.

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Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 23 SiGe:H

Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB MHz, 200~250 o C, 0.5~0.7 mbar, 20~50 mW/cm 2, Growth rate~1-2A o s -1. Growth rate can be increased by increasing the pressure (5-10 mbar) or plasma frequency (40, 70, 150MHz).

Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 25 ETPCVD: (Expanded Thermal Plasma) Remote plasma enhanced CVD

Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 26 Cat-CVD or Hot wire CVD

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Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 28 Figure 5.12.

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Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 30 Design approaches

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Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 32 Light Trapping and Transparent Conductive Oxides

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Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 34 schemes are applied, such as a metal grid on the top of the TCO layer or special current collecting designs.

Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 35 η=9.47%

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Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 37 Current Matching

Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 38 Tunnel Recombination Junction

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Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 45 Temporary Superstrate Process for Roll-to-Roll Production

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