WAFERMAP Award winning software package Collect, edit, visualize and analyze measured physical parameters on semiconductor wafers Import data from various metrology tools -Ellipsometers -4 point probes -Thickness gauges Supported File Formats We add customer imports upon request

9 different visualization plots from 1D to 3D Data operations and filtering File comparison Statistical Process Control SPC -Browser -Trend chart Inter-application Communication (Active X) WAFERMAP

New features: New easy to use XML-based Boin file format Multiple wafers and multi-measurements in one file Import of multi-measurement wafers at once Free rotation of 3D plots WAFERMAP New Release: Version 3.0

WAFERMAP New features: Export of *.jpg and *.bmp Export of *.html … and many more New Release: Version 3.0

WAFERMAP Compare your measurements Work off-line Work outside the clean room  WAFERMAP is your choice

Advanced Micro Devices ASM Atmel Canon Hitachi Hypernex Infineon Intel Jordan Valley SC LSI Logic Mattson Technology Motorola/ Freescale Nicolet Osram Philips, Philips Analytical Mitsubishi Seagate Sematech ST Microelectronics Sumitomo Eaton Nova Silicon Valley Group Thermawave Tokyo Electron Tru-Si Varian WAFERMAP References – Partial List of WAFERMAP Customers

References – OEM Customers WAFERMAP Cyrium Foothill Instruments Jenawave Jordan Valley KLA - Tencor LayTec Napson Sigmatech SOPRA Technos Tepla AG Thermawave Thermo Electron Carl Zeiss  Sell WAFERMAP as analysis and visualization tool together with your equipment

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