60 beam 27 1/18/11A. Mapelli - GTK µcool1. Sensors + R/Ο chips (60 x 42 mm) Sensor + R/O chips 60 42 beam 27 1/18/11A. Mapelli - GTK µcool2.

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60 beam 27 1/18/11A. Mapelli - GTK µcool1

Sensors + R/Ο chips (60 x 42 mm) Sensor + R/O chips beam 27 1/18/11A. Mapelli - GTK µcool2

Sensors + R/Ο chips (60 x 42 mm) Canaux: 62 x 44 mm Manifold: 62 x 1.6 (le même que pour les tests en pression) Inlet: diam. 1.4 (au milieu du bord du rectangle, au sommet) Sensor + R/O chips beam 27 1/18/11A. Mapelli - GTK µcool3

Sensors + R/Ο chips (60 x 42 mm) Channels: 62 x 44 mm Section: 100 x 100 µm Fin width 100 µm Manifold depth 280 µm Triangle: 62 x 1.6 (same as for pressure tests) Inlet: diam. 1.4 Sensor + R/O chips beam 27 Tentative dicing lines (62 x 76) 1/18/11A. Mapelli - GTK µcool4

Alignment 1/18/11A. Mapelli - GTK µcool5 Sensor + R/O chips w.r.t edge? Extra alignment marks etched in Si? Additional photolitho after bonding Geometry Position

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