(Status in) Silicon Photomultiplier developments 9/12/2018 (Status in) Silicon Photomultiplier developments Jelena Ninkovic MPG Halbleiterlabor Some properties and state of the art of SiPMs SiPM development at MPS Semiconductor Laboratory 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München Ladislav Andricek, MPI Munich

Avalanche PhotoDiode - APD An avalanche photodiode (APD) is a photodiode that internally amplifies the photocurrent by an avalanche process. p+ n+ Metal contact n type bulk (n-) l o g ( G a i n ) Reverse Bias Voltage Geiger mode Linear no gain Linear/ Proportional mode Bias: slightly BELOW breakdown Linear-mode: it’s an AMPLIFIER Gain: limited < 300 (1000) High temperature/bias dependence No single photo electron resolution Geiger mode Bias: (10%-20%) ABOVE breakdown voltage Geiger-mode: it’s a BINARY device!! Count rate limited Gain: “infinite” !! 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

The Silicon Photomultiplier 9/12/2018 The Silicon Photomultiplier An avalanche photodiode (APD) in Geiger mode is a highly efficient single photon counting device 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München Ladislav Andricek, MPI Munich

The Silicon Photomultiplier 9/12/2018 The Silicon Photomultiplier An avalanche photodiode (APD) in Geiger mode is a highly efficient single photon counting device BUT: Output signal of a single Geiger APD is independent of number of incident photons 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München Ladislav Andricek, MPI Munich

The Silicon Photomultiplier 9/12/2018 The Silicon Photomultiplier An avalanche photodiode (APD) in Geiger mode is a highly efficient single photon counting device BUT: Output signal of a single Geiger APD is independent of number of incident photons Solution: Combine an array of small Geiger APDs onto the same substrate and connect all cells in parallel 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München Ladislav Andricek, MPI Munich

The Silicon Photomultiplier 9/12/2018 The Silicon Photomultiplier An avalanche photodiode (APD) in Geiger mode is a highly efficient single photon counting device BUT: Output signal of a single Geiger APD is independent of number of incident photons Solution: Combine an array of small Geiger APDs onto the same substrate and connect all cells in parallel 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München Ladislav Andricek, MPI Munich

What is available MEPhI/Pulsar (Moscow) - Dolgoshein CPTA (Moscow) - Golovin Zecotek(Singapore) - Sadygov Amplification Technologies (Orlando, USA) Hamamatsu Photonics (Hamamatsu, Japan) SensL(Cork, Ireland) AdvanSiD (former FBK-irst Trento, Italy) STMicroelectronics (Italy) KETEK (Munich) RMD (Boston, USA) ExcelitasTechnologies (former PerkinElmer) MPS Semiconductor Laboratory (Munich) Novel Device Laboratory (Beijing, China) Philips (Netherlands) …. ……Every producer uses its own name for this type of device: MRS APD, MAPD, SiPM, SSPM, MPPC, SPM, DAPD, PPD, SiMPl , dSiPM… 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

Gain The gain is in the range of 105 to 107. Single photoelectrons produce a signal of several mV on a 50 W load. 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

DCR of most recent devices  few 10 kHz/mm² Dark count rates (DCR) Average frequency of the thermally generated avalanches breakdown process that result in a current pulse indistinguishable from a pulse produced by the detection of a photon. Few 100kHz/mm² < DCR < 1 MHz/mm² till 2013 @ room temperature DCR of most recent devices  few 10 kHz/mm² 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

Optical Crosstalk (OCT) A. Lacaita, et al., IEEE Trans. Electron Devices ED-40 (1993) 577 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

Optical cross talk suppression Optical barrier trench light Second pn junction 1: without optical crosstalk suppression 2: suppression by optical barrier 3: suppression by optical barrier and second pn-junction Buzhan et al., NIM A 610 (2009) 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

Optical cross talk 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

Most of the devices are below 10% Afterpulsing carriers can be trapped during the avalanche discharge and then released  trigger a new avalanche during a period of several 100 ns after the initial breakdown MPPC Most of the devices are below 10% 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

Photon Detection Efficiency PDE = Fill Factor * QE * Geiger probability Main limitations: Geometrical occupancy of the Geiger diodes (max 80%) Reflection losses on the SiPM surface (<10% possible) Can be tuned by coating λmin determined by thickness and quality of surface implantation λmax determined by thickness of active volume Breakdown Initiation Probability (~90%) Function of the electric field in the avalanche region End up with 50…60% PDE 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

Fill factor - Photoemission image MPPCs Old (2007) MEPHI device 42mm pitch size SENSL FF ~ 20-80% CMOS devices have lower 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

in the blue region: 35 – 60 % in the green region : 25 – 50 % PDE MPPC brochure in the blue region: 35 – 60 % in the green region : 25 – 50 % 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

PDE - NUV sensor size: 12×12mm² (cell size = 50 μm PDE (175 nm) = 17 % (best sample) Gain  106 @ 165 K DCR = 0 @ 165 K decay time  30 -60 ns 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

single photoelectron time resolution (SPTR) Timing Avalanche breakdown process is fast and the signal amplitude is big. very good timing properties even for single photons. Fluctuations in the avalanche are mainly due to a lateral spreading (~10 ps) by diffusion and by the photons emitted in the avalanche. A. Lacaita et al., Apl. Phys. Letters 62 (1992) A. Lacaita et al., Apl. Phys. Letters 57 (1990) single photoelectron time resolution (SPTR) 40 ps < SPTR (σ) < 60 ps 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

Recovery time 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

Current R&D Understanding and improving the radiation tolerance of SiPMs Large dynamic range: Hamamatsu R&D down to 10mm pitch Lowering of dark rate : all Increasing PDE at and lower 400nm : all Large area SiPMs : SiPMs with Area ≥ 3x3 mm2 produced by many companies: Hamamatsu, CPTA, Pulsar, Zecotek, SensL, FBK, STMicro… SiPM Arrays  further increase of sensitive area 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

Non conventional SiPM developments MAPDs from Zecotek SiMPl – MPS Semiconductor Lab dSiPMs from Philips 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

MPG semiconductor laboratory 1000m2 clean room up to class 1 6 inch silicon process line with custom made equipment design and simulation tools testing & qualification mounting capabilities 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

Bulk resistor type - SiMPl approach high field AD RQ CD CC Vbias p+ n n- non-depleted region n- depleted gap region n+ Sensor wafer Handle wafer SOI wafers 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

SiMPl : Advantages and Disadvantages no need of polysilicon free entrance window for light, no metal necessary within the array Smaller parasitic capacitance coarse lithographic level simple technology inherent diffusion barrier against minorities in the bulk  less optical cross talk Drawbacks: required depth for vertical resistors does not match wafer thickness wafer bonding is necessary for big pixel sizes significant changes of cell size requires change of the material vertical ‘resistor‘ is a JFET  parabolic IV  longer recovery times Jelena Ninkovic SLAC, July 2014

Prototype production High linearity! High homogeneity over big distances! 6 100 cells arrays placed over 6mm distance High linearity! 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

Detection of particles - High gain in the sensor - Excellent time stamping due to avalanche process (sub-ns) - Minimum ionizing particles generate about 80 e-h-pairs/µm - No need for high trigger efficiency 80e-h-pairs/um ist fraglich Reduction of dark rate and cross talk by order of magnitude 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

Next generation SiMPl devices - DSiPMl – collaboration with DESY Ultra fast particle tracker - High energy physics application Sensor @ MPG HLL: Topologically flat surface High fill factor Adjustable resistor value Low RC -> very fast Single pixel readout Position sensitivity ASIC @ DESY: Active recharge Ability to turn off noisy pixels Fast timing Pitch limited by the bump bonding Position resolving signal processing Individual cell electronics, Logic, TDC, Photon counter Ultra fast single photon sensitive imager – Photon science + Individual cell electronics, Logic, TDC, Photon counter Possible applications: Future trackers at colliders Detectors for hadron therapies X ray detectors PET detectors Adaptive optic sensors 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

Summary SiPMs have capacity to replace PMTs in many applications. Optimization of properties can be/must be done for every application. Experiments already using SiPMs: T2K ND280 – 60000 SiPMs in the experiment Calice Hadronic calorimeter – 8000 SiPMs FACT – small camera with 1440 SiPMs … studies for Belle II particle ID upgrade studies for CMS outer Hadron Calorimeter upgrade Medical applications are driving a lot of developments  Goal to have PET-MR scanner … 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München

Thanks for your attention!!! 8th Terascale Detector Workshop 2015 Jelena Ninkovic, MPG HLL, München