Www.HidenAnalytical.com Hiden Compact SIMS Mass Spectrometry in solid material.

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Presentation transcript:

Hiden Compact SIMS Mass Spectrometry in solid material

Quadrupole Mass Spectrometers for Advanced Science Compact SIMS Overview The Hiden Compact SIMS tool is designed for fast and easy characterisation of layer structures, surface contamination and impurities with sensitive detection of positive ions being assisted by the oxygen primary ion beam and provides isotopic sensitivity across the entire periodic table. The ion gun geometry is set to provide for ideal nanometre depth resolution and near surface analysis.

Quadrupole Mass Spectrometers for Advanced Science Features Small footprint Easy “user friendly” layout Requires only single phase electrical power – plugs into standard outlet Wheeled trolley design Positive SIMS and SNMS Depth Profiling 3D characterisation and imaging Mass spectra Isotopic analysis

Quadrupole Mass Spectrometers for Advanced Science Applications Thin films Surface coatings Semiconductors Catalysis Magnetic media Pharmaceuticals Corrosion studies Nanotechnology

Quadrupole Mass Spectrometers for Advanced Science Specifications Primary ions Energy/current: 1 to 5 keV / up to 400nA Gases:Oxygen for high sensitivity Spot size: under 50µm (imaging) 80 µm depth profiling Sensitivity Boron in Silicon (SIMS): 2ppm (10 17 atoms cm -3 ) Vacuum Pump down to operation 10 minutes with inert gas vent Ultimate <5x10E-8mbar

Quadrupole Mass Spectrometers for Advanced Science Sample loading A rotary carousel enables 10 samples to be simultaneously loaded for measurement into the dry-pumped vacuum chamber. Custom carousels are easily changed and custom carousels can be manufactured for specific sample applications. 8mm diameter

Quadrupole Mass Spectrometers for Advanced Science IG20 gas ion gun MAXIM-600P SIMS detector Rotary carousel Loading door

Quadrupole Mass Spectrometers for Advanced Science SNMS facility that is useful for quantification of high concentration elements, such as alloys. The MAXIM SIMS/SNMS spectrometer has an electron impact ion source fitted close to its entrance. An external deflector plate removes the secondary ions (which generally constitute less than 1% of the sputtered flux) and allows the neutrals to enter the ioniser. Once ionised, the neutrals follow the same path that SIMS ions would have taken.

Quadrupole Mass Spectrometers for Advanced Science Depth Profile from Compact SIMS SiGe with Boron Doping Primary ions 5keV O2+ Positive secondary ions

Quadrupole Mass Spectrometers for Advanced Science Ion Gun Control PC controlled Settings can be saved and recalled Automatic ion source warm up / cool down EHT ramp rate control Gun diagnostics Upgradeable software and firmware

Quadrupole Mass Spectrometers for Advanced Science Control of the overall experiment and connection to the mass spectrometer Hiden SIMS Mapper Software

Quadrupole Mass Spectrometers for Advanced Science Mass for analysis is chosen from a periodic table and can include molecules and multiply charged species. Experienced users can also input data directly.

Quadrupole Mass Spectrometers for Advanced Science An integral interference calculator identifies possible mass interferences and suggests relative signal intensities

Quadrupole Mass Spectrometers for Advanced Science The experiment flow shown here has three channels (Si, Ge and B). Species can be selected or deselected for analysis – this allows a non-expert user to control a range of experiments from a single template.

Quadrupole Mass Spectrometers for Advanced Science During analysis the live acquisition window displays the signal so that the progress of the experiment can be monitored and surface features observed.

Quadrupole Mass Spectrometers for Advanced Science During analysis the analysis window displays the depth profile, image data and a 3D representation of the distribution. It also controls the electronic gating. The electronic gate can be optimised independently and interactively for each mass and does not have to be concentric or square.

Quadrupole Mass Spectrometers for Advanced Science The video shows the mass resolved aluminium signal arising from aluminium oxide grit particles embedded in the work-piece after a grinding operation. Volume is 800µm square x 35 µm deep. 3D Profiling by SIMS

Quadrupole Mass Spectrometers for Advanced Science MASsoft 7 Professional control software A multilevel software package allowing both simple control of mass spectrometer parameters and complex manipulation of data plus control of external devices.

Quadrupole Mass Spectrometers for Advanced Science Elemental Surface Mapping Easy to use elemental surface mapping software. Elemental Surface Map of semiconductor resistor array. 1 mm

Quadrupole Mass Spectrometers for Advanced Science Small and easy to use SIMS and SNMS Fast characterisation of 3D and layered structures Nanometre depth resolution Summary

Quadrupole Mass Spectrometers for Advanced Science Hiden Analytical Ltd. 420 Europa Boulevard Warrington, WA5 7UN, England HidenAnalytical.com Tel: +44 (0)