PSL Metrology Pte Ltd – CSE Training Overview PSL Metrology Pte Ltd, confidential

History & Profile PSL Metrology Group Service Director Mr. Declan Farrelly Accounts & Admin: 2 Sales: & Operations : 3 TSE / CSE Service Engineers: 10 Started in 2000 Plasma Solutions Ltd (UK) originally delivered contract service and support on various front-end OEM processing equipment at many leading IC manufacturers and OEM companies saw the company change management and direction towards providing maintenance & expert level training on KLA Tencor equipment while renaming our business PSL-Metrology. It is our mission to become the premier equipment maintenance training company, delivering Fabs immediate return on investment through internalizing metrology equipment maintenance and ending expensive OEM service support. Time line 2000 – Plasma Solutions Ltd commenced services – Change direction to servicing KLA Tencor equipment, service renamed to PSL Metrology Group – PSL Metrology Pte Ltd started trading in Singapore. OEM PlatformsArcher 10 / 10XT / AIM+ / A200 / A300 Brightfield 23XX (all models) AIT (All Models) Puma 91XX / 95XX / 98XX SP1 & SP2 F5x / FX100 / FX200 Viper Brooks & Yaskawa robot handlers  Head Office & Service FacilitySingapore  Service & CR Facility’sSingapore & The Netherlands  Service RegionsGlobal, training offsite or customer Fab  Capital Sound, private limited company

Help Fabs end expensive OEM service agreements by providing first class high level maintenance training. # 1 Provide competitive expert level technical support when needed# 2 Help Fabs save money on OEM machine spare parts# 3 Our Service Objectives

CSE Maintenance Training "Our mission is to be the premier equipment maintenance training provider delivering immediate return on investment through helping Fabs internalize metrology equipment maintenance and ending expensive OEM service support” Training is provided up to OEM CSE level III & includes all hand-on calibrations, faultfinding & system diagnostics. All technical training levels are offered, nothing is left out! Maintenance manuals are provided with each class describing all PM and corrective maintenance tasks and system diagnostics. ► 14 Fabs / 19 classes ► 44 trainees / 6 platforms ► Archer ► 23XX ► AIT ► SP1 / SP2 ► F5x / FX100 / FX200 ► Puma ► Yaskawa Phoenix Handler Our training programs are tried, tested and proven to deliver! We design, manufacture and sell special maintenance tooling (SP1/SP2/AIT/F5x/FX200) for machine calibrations and laser replacements with each level III maintenance class. We provide all a Fab needs. Instructors are ex-KLA Tencor service engineers with many years platform experience. Our classes are tried and tested and have been received with 100% satisfaction from our customers. After training, Fab technicians can handle all common machine faults experienced within a normal year. Recent data show's that Fabs request outside maintenance support on average only 2 times in the first 12 months after training (based on 6 Fab tools / 2-3 week training class)

Given KLA Tencor’s business model and the high cost of spare parts, developing competitive alternative solutions for parts was seen early on as a key capability needed to succeed as a 2 nd source service provider. Optics Components PSL has developed relationships with high-end optical analysis labs and component manufactures who specialize in the supply of standard and custom optical components. Printed Circuit Boards Together with our PCB repair partners, located in Singapore, we have developed fault root cause analysis procedures, block functional diagrams and the stocking of key components for fast repairs for critical OEM PCBs. Mechanical Assemblies & XYT Stages High precision mechanical (EG Schneeberger / ETEL) and air stages (Eg Aerotech or KLA ) are one of our specialties and can be refurbished to as new condition at short notice. Partners & Networks Operating inside a global network of 2 nd source suppliers serves as a reliable back-up for unusual technical or spare needs requests outside of our standard offering. We are rapidly expanding our spare parts capabilities - Please contact us for your KLA Tencor spare parts needs, or add us to your parts request list. Specialist Capabilities – Spare Parts

Our engineers are highly experienced performing expert level repairs, installations or tool matching. PSL can manage your metrology tool projects on time and within budget. PSL engineers are highly experienced installing KLA Tencor system to the highest Fab standards. We have successfully completed many system installations including full turn-key projects from tool decommissioning to shipping, installation and process qualification. Applications training & tool process matching programs are supported just like the OEM. Our team will train Fabs how to monitor and keep tools matched, and our CSE’s can provide technical support during major excursions. Used tool sourcing: PSL can source, refurbish and provide warranty on various KLA Tencor platforms. We can also provide CSE maintenance training during the installation! Other Services After Training PSL-Metrology Pte Ltd 30 Marsiling Industrial Estate, Road 5 Widefield Industrial Building, Unit #05-02, , Singapore Mr. Declan Farrelly 1: Phone: Singapore: Phone USA Contact us to request further details on our KLA Tencor training packages or related services