1. EPFL – October 7 th 2008 1 Introduction to software J.Ph.PIEL (PhD) Application Lab Manager SOPRALAB

2. EPFL – October 7 th 2008 2 II - WINSE SOFTWARE II - WINELLI II SOFTWARE III - SOPRA R&D SOFTWARE

3. EPFL – October 7 th 2008 3 WINSE SOFTWARE Full measurements Basic analysis Recipe buiding Two working modes : Engineer Mode Buiding recipe Measuement testing Basic analysis testing Operator Mode Loading recipe Fully automatic measurement and analysis

4. EPFL – October 7 th 2008 4 Starting Screen Need to Log on Select the User type

5. EPFL – October 7 th 2008 5 Recipe loading Start Measure and Analysis Main Screen

6. EPFL – October 7 th 2008 6 First : Initialisation Define recipe step by step measurement and analysis Main Screen

7. EPFL – October 7 th 2008 7 How to define a recipe Sample Description

8. EPFL – October 7 th 2008 8 How to define a recipe Operation

9. EPFL – October 7 th 2008 9 How to define a recipe Analysis Definition of the model

10. EPFL – October 7 th 2008 10 Analysis Definition of the fitted parameters How to define a recipe Definition of Spectral range

11. EPFL – October 7 th 2008 11 How to define a recipe Sites description

12. EPFL – October 7 th 2008 12 Measurement Spectrum

13. EPFL – October 7 th 2008 13 WINELLI II SOFTWARE Research analysis software For Simulation : Tan ( , Cos ( , T p, T s, R p,R s For fitting using Levenberg Marquard approach On Ellipsometric data: Tan (  ) and Cos (  ) spectra On photometric data : T p, T s, R p, R s spectra Using : Effective Medium approximation Polynomial law Harmonic oscillator function Drude Model Rough layer Anisotropic layer

14. EPFL – October 7 th 2008 14 Starting Screen Click to select analysis mode : Standard, Xray or Porosimetry Click to select analysis unit Right click on current session in tree view allows to add functions

15. EPFL – October 7 th 2008 15 How to load a measurement Click to open one or several data file(s) in current session Click with right button

16. EPFL – October 7 th 2008 16 How to display the measurement graph Click on icons to zoom, refresh or use cursor mode Click with right button

17. EPFL – October 7 th 2008 17 How to display a default structure Click on icons to add or remove layers For each layer enter thickness, optical index model and gradient profile (for homogeneous/ inhomogeneous layers) Click with right button

18. EPFL – October 7 th 2008 18 How to define a model for each layer Click to select optical model : Material of the current layer can be defined by single or mixed N&K files tired from sopra’s data base or by dispersion laws, alloy models, diffusion layers…

19. EPFL – October 7 th 2008 19 Dispersion Law builder Click ok to accept

20. EPFL – October 7 th 2008 20 How to a add a Lorentz harmonic oscillator

21. EPFL – October 7 th 2008 21 How to define a Drude Law

22. EPFL – October 7 th 2008 22 How to enter in the regression parameters window Click with right button

23. EPFL – October 7 th 2008 23 How to define the fitting parameters Select regression function Click to start regression Check boxes if you need to fit it on Select the spectral range of the regression

24. EPFL – October 7 th 2008 24 Fitting procedure

25. EPFL – October 7 th 2008 25 Result of the fitting procedure If solution is good : update structure with regression results Check the goodness both of the fit and the regression results (both parameter value & error to assure that solution is a physical one)

26. EPFL – October 7 th 2008 26 Select the spectral range Select the spectral résolution Select the appropriate Angle Of Incidence  Using Winelli 2, the n&k database and the simulation function How to optimise measurements

27. EPFL – October 7 th 2008 27  Start with the simplest model  Select the appropriate model for the optical index determination: Bruggeman : Poly silicon, Roughness, Porous Materials Dispersion law : need appropriate started values SDF-UV term and Lorentz peaks for dielectrics (most of the time) SDF-Drude and Lorentz peaks for metals Forouhi Model (FIM) for amorphous as SiONx Model Dielectric Function (MDF) for Alloy materials (SiGe, Si…) Bulk calculation : for substrate or fully absorbing layers. Point by point : need a well defined model (included T knowledge and interfaces if necessary) How to optimise analysis

28. EPFL – October 7 th 2008 28  Select the appropriate model for the regression Tan Psi&Cos Delta for « ultra thin layers » Alpha&Beta for « thin and thick layers » Pseudo Dielectric Functions:  r and  i useful for alloy material for instance.  Optimise the analysis Adjust the spectral range Add interface (rough layers) or/and gradient (inhomogeneous layers). Use special option (Aperture for microspot measurements…) How to optimise analysis

29. EPFL – October 7 th 2008 29 SOPRA R&D SOFTWARE Basic displacements of the different motor axis Basic acquisition of the signal : Show mode Basic measurements Calibration of the system Spectrometer Spectrograph Non lineary of the detectors Polariser and analyzer axis versus the plane of incidence : A0 and P0 Hardware Setting

30. EPFL – October 7 th 2008 30 Starting Screen

31. EPFL – October 7 th 2008 31 Main Screen Need to hit the key « F1 » Need to enter a password

32. EPFL – October 7 th 2008 32 Basic Displacements of each axis

33. EPFL – October 7 th 2008 33 Show Mode Hit this button To enter in the show mode

34. EPFL – October 7 th 2008 34 Measurements Parameters Window

35. EPFL – October 7 th 2008 35 During Acquisition …

36. EPFL – October 7 th 2008 36 General Calibration menu

37. EPFL – October 7 th 2008 37 Polariser and Analyser offset calibration

38. EPFL – October 7 th 2008 38 Hardware setting Select Maintenance in the menu