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4/2/2003P. Riedler/CERN SPD Team1 Testing Wafer test status Annealing tests on VTT ladder.

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Presentation on theme: "4/2/2003P. Riedler/CERN SPD Team1 Testing Wafer test status Annealing tests on VTT ladder."— Presentation transcript:

1 4/2/2003P. Riedler/CERN SPD Team1 Testing Wafer test status Annealing tests on VTT ladder

2 4/2/2003P. Riedler/CERN SPD Team2 Wafer Test Status Delivery 2000:4 wafers fully tested - preliminary test criteria - installation of the setup Delivery 2001:12 wafers fully tested (from 3 lots) - 1 wafer tested in Catania - 1 wafer tested in Legnaro - test criteria applied - FO test not included Total no. of chips tested: 1376

3 4/2/2003P. Riedler/CERN SPD Team3 Class I, II, III chips per Wafer Delivery 2001: CLASS I: 33-74% CLASS II: 9-27% CLASS III: 22-51% *4 wafers tested and classified by NA60 ** sample of 8 wafers

4 4/2/2003P. Riedler/CERN SPD Team4 Annealing Tests Singles: 2001 - 300µm detector Increased leakage current observed on most singles and ladders from VTT

5 4/2/2003P. Riedler/CERN SPD Team5 VTT Ladders 2001: VTT1-2001:1.2µA @ 80V(300µm) VTT2-2001:3.1µA @ 80V(300µm) 2002: VTT1-2002: 17µA @ 15V(200µm) VTT2-2002: 14µA @ 20V(200µm) VTT3-2002: 28µA @ 20V(200µm) VTT4-2002: 280nA @ 80V(300µm) Could the higher current be caused by humidity in the polyimide? Annealing could help……

6 4/2/2003P. Riedler/CERN SPD Team6 Candidate: Ladder-VTT-3-2002 (thin ladder) with damaged corner 99.7% 99.9% <80% 90 Sr: Leakage Current: 28.8µA @ 20V (V fd =15V) Test Procedure: measure I leak, metrology, source test -> Annealing repeat measurements

7 4/2/2003P. Riedler/CERN SPD Team7 1. Before Annealing: Leakage Current: 28.8µA @ 20V (V fd =15V) Long edge (on chips) Metrology:

8 4/2/2003P. Riedler/CERN SPD Team8 2. First Annealing Step: 48 hrs @ 120°C Leakage Current: 11.1 µA @ 20V (V fd =15V) Metrology: Bow Long edge (on chips): 53.13µm 3. Second Annealing Step: 136 hrs @ 140°C Leakage Current: 3.3 µA @ 20V (V fd =15V)

9 4/2/2003P. Riedler/CERN SPD Team9 Long edge (on chips)

10 4/2/2003P. Riedler/CERN SPD Team10 Leakage Current

11 4/2/2003P. Riedler/CERN SPD Team11

12 4/2/2003P. Riedler/CERN SPD Team12 Mean Threshold But baking is not without problems…….

13 4/2/2003P. Riedler/CERN SPD Team13 Chip 68 after baking

14 4/2/2003P. Riedler/CERN SPD Team14 Testbeam 2003 Proton Run: June 25 - July 9 H4 Long MD June 25/26 Short MD July 2 Setup similar to 2002 (4 reference planes, crossed?) Improvement of scintillator mounting to be done.. Program depends on progress in coming months… Thin ladders! Preparation should start well ahead

15 4/2/2003P. Riedler/CERN SPD Team15 Please join the testbeam crew !

16 4/2/2003P. Riedler/CERN SPD Team16 Short edge (on sensor)

17 4/2/2003P. Riedler/CERN SPD Team17 Long edge (on sensor)


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