1. PHASED: a Faster, Smarter & More Affordable Analysis Device - Update Ulrich.bonne@honeywell.com U.Bonne, J.Detry, R.Higashi, K.Newstrom-Peitso, H.Pham, T.Rezachek and S.Swanson Honeywell Labs, Plymouth, MN 55441, USA ulrich.bonne@honeywell.com Definition: PHASED (= Phased Heater Array Structure for Enhanced Detection) presently integrates multi-stage pre-concentration, separation, flow sensing and detection of gas components on one chip. Project Objectives: Develop and demonstrate the operation of a PHASED sensor, via: - Thermophysical analysis and simulations - Design and assemble a setup to check out the individual components - Design and fabricate a preliminary version of PHASED, with PCB electronics - Design and fabricate an integrated version of PHASED-on-a-chip Acknowledgment: This work is supported by ORNL/DoE

2. PHASED: Micro Gas Analyzer System Phased Heater Array Structure for Enhanced Detection Ulrich.bonne@honeywell.com Goal: Sensitivity <10 ppb, < 3 sec, ~ 1 in. 3, < 1 J/analysis, wireless output.

3. Multi-Stage Pre-concentration To Separator Multi-stage release of analyte increases its concentration: ~100-fold with 1st stage ~100 x n-fold after n stages Cross section of PHASED structure Side Views of PHASED structure and Operation PHASED: Physical Principle of Multi-Stage Pre-Concentr. robert.higashi@honeywell.com

4. Phased Heater Array Structure for Enhanced Detection Schematic Views of the Phased Heater Array with Individual Heaters, H 1, H n,….H n-1, H n, and a Thermal Conductivity Sensor, TC Operation, Structure, Envisioned output PHASED: Operation, Structure, Envisioned output ulrich.bonne@honeywell.com

5. Thermal Modeling of PHASED (cont’d.) Ulrich.bonne@honeywell.com

6. Thermal Modeling of PHASED (cont’d.) Ulrich.bonne@honeywell.com

7. Thermal Modeling of PHASED (cont’d.) burgess.johnson@honeywell.com

8. Simulations predicted: Speed, Separation, Flow control and # of PreConc.Elements 1 st gen. PHASED chips fabricated Stat. film material survives 200-250ºC in air Patterning demonstrated and Specific surface area ~800 m 2 /g unaffected Heater FET switch chips fabricated 1 st gen. electronic circuit designed & built Millisecond desorption response time feasible PHASED: Technical Progress  =600

9. PHASED: TC Detector Response Time Ulrich.Bonne@Honeywell.com PHASED TC Capability TC Sensor Length: 0.03 cm Gas Velocity: 100 cm/s Response Time: < 1 ms PHASED Output: (t R  100 ms) Resolution,  t ½ ~ t R /R  3 ms Top View of Honeywell Microbridge Flow or TC Sensor

10. Thermal Modeling of PHASED (cont’d) Ulrich.bonne@honeywell.com

11. PHASED: Flow Control Ulrich.bonne@honeywell.com

12. PHASED Layout Proposed layout of 20-Element Concentrator. Die: 7.3 x 8 mm

13. PHASED Layout 20 Elements 100 mm Wafer Honeywell Confidential and Proprietary robert.higashi@honeywell.com

14. 20-Element Pre-Concentrator, Diff. TC, 20-Element Separator Integrated Version of PHASED, Showing Sensors, Concentrator and Separator.

15. PHASED: Progress with Chip Fabrication

17. Ulrich.bonne@honeywell.com PHASED: PCB w/Chip-PCBs

18. Performance Modeling of PHASED Ulrich.bonne@honeywell.com

19. Performance Modeling of PHASED (cont’d.) Ulrich.bonne@honeywell.com

20. Predicted Output for Air Sample Analysis

21. Gas Chromatograph: Outputs of C1-C3 in He k’ = (t R - t o ) / t o

22. PHASED: Simulated Outputs for C1-C3 Gases in Air Ulrich.bonne@honeywell.com

23. PHASED: Simulated Outputs for C1-C3 Gases in Air Ulrich.bonne@honeywell.com

25. Status of PHASED as of Jan. ‘2003 Ulrich.bonne@honeywell.com Conclusions: Demonstrated: PHASED-I MEMS fabrication and flow control; operational demonstration is next Operational feasibility risk reduction: Simulations, Materials, Fabrication: 1,000-10,000:1-concentration gain, 15:1-Resolution, 3-sec, 10-ppb Resolution: Adjust gas velocity for max. (=min. plate height) Min. Time: Minimize film thickness w/o starving the capillary’s gasvolume MEMS Enablers  Thin-film stationary phase enhances resolution and  shortens analysis time  Thin-film substrate reduces power  MEMS enables integration GC components, multi-stage pre-con. & electr. injection  Compatibility with NeSSI Challenges  Most power is consumed by column temperature ramping  Selectivity & peak ID; then pump and valve

26. PHASED Flow Calibration