1. 9/9/2015 Weizmann Institute of Science 1 Nanotechnology Cleanroom Design Considerations Scott Mackler Tim Loughran

2. 9/9/2015 Weizmann Institute of Science 2 Outline How to Define the User Requirements? Basic Contaminate Control Design Concepts? Case Studies? Outline Requirements? First- Tell us about your level of expertise and understanding.

3. 9/9/2015 Weizmann Institute of Science 3 What is Nanotechnology? Research and technology development at the atomic, molecular or macromolecular levels Ability to control or manipulate on the atomic scale Creating and using structures, devices and systems that have novel properties due to their small and/or intermediate sizes

4. 9/9/2015 Weizmann Institute of Science 4 Size of Nanometer 1 Nanometer = One-Billionth of a Meter Nanometer sized particles are smaller than a living cell and can be seen only with the most powerful microscopes Width of human hair is approx. 80,000 nanometers The average human can see in the 80,000 nanometer range One small dust particle seen in a ray of sun equates to approx. 60,000 nanometers DNA is in the 2.5 nanometer range

5. 9/9/2015 Weizmann Institute of Science 5 The Scale of Things

6. 9/9/2015 Weizmann Institute of Science 6 Nanotechnology Applications Creation of new materials w/ superior strength, electrical conductivity, resistance to heat and other properties Microscopic machines, including probes that could be injected into the body for medical diagnosis and repair Creation of “bio-chips” that detect food- borne contamination, dangerous substances in the blood or chemical warfare agents in the air

7. 9/9/2015 Weizmann Institute of Science 7 Defining a Cleanroom Designed, built, and operated to provide cleanliness, control, and/or isolation Built with smooth, hard, cleanable surfaces Air filtration system is critical – HEPA filters (High Efficiency Particulate Air) Strict procedures control operation, personnel, process and materials

8. 9/9/2015 Weizmann Institute of Science 8 Why have a Cleanroom? To protect the product or process from contamination To restrict access to the product or process To contain hazards located within the cleanroom

9. 9/9/2015 Weizmann Institute of Science 9 What is Contamination? Contamination is anything (material, substance, or energy) which corrupts the process or makes the product impure by either touching or mixing with it Solid / Liquid / Gas Organic / Non-Organic Airborne / Surface Chemical Makeup Size and Shape Static Charge + / -

10. 9/9/2015 Weizmann Institute of Science 10 How is Cleanroom Contamination Measured? Measured in microns or micrometers 1 micron = One millionth of a meter There are 25,400 microns in an inch A human hair is approx. 75 microns in diameter Human eye can see particles down to about 50 microns Bacteria is approx. 2 to 10 microns in size

11. 9/9/2015 Weizmann Institute of Science 11 How is Cleanroom Contamination Measured? Cleanrooms are measured in the amount of ½ micron size particles in one cubic foot of sampled air. (½ micron particle =.00001968”)

12. 9/9/2015 Weizmann Institute of Science 12 What Creates Contamination? Personnel activity within the cleanroom generates and transports contamination Moving Talking Breathing Scratching Sneezing

13. 9/9/2015 Weizmann Institute of Science 13 What Creates Contamination? People Contaminate! ActivityPPM Motionless100,000 PPM Walking @ 2mph5,000,000 PPM Walking @ 3.5mph 7,000,000 PPM Walking @ 5mph10,000,000 PPM Horseplay100,000,000 PPM

14. 9/9/2015 Weizmann Institute of Science 14 What Creates Contamination? People generate contamination Skin flakes and oil Spittle (smokers especially) Hair Perspiration Clothing debris (lint, fibers, etc.)

15. 9/9/2015 Weizmann Institute of Science 15 What Creates Contamination? Materials generate contamination Wood products Construction materials (drywall, concrete dust, etc.) Pencils Duct tape Cardboard and paper Paint and coatings

16. 9/9/2015 Weizmann Institute of Science 16 What Creates Contamination? Equipment generates contamination Electric motors Scaffolds Ladders Gang boxes Brooms, mops and dusters

17. 9/9/2015 Weizmann Institute of Science 17 What are Cleanroom Classifications? All cleanrooms are not built or operated to the same cleanliness standard due to the size of the devices that are being built or handled at each customers location. ISO 14644-1, which replaces Federal Standard 209E, is the basis of Cleanroom Classification. ISO 14644 classifies a Cleanroom based on the size and number of airborne particles

18. 9/9/2015 Weizmann Institute of Science 18 What are Cleanroom Classifications? Chart of ISO-14644 & FED-STD-209E classifications ISO 14644- 1 Class FED-STD- 209E Class 0.5µm particles per meter cubed 0.5µ particles per foot cubed 8100,0003,520,000100,000 710,000352,00010,000 61,00035,2001,000 51003,520100 41035210 31351

19. 9/9/2015 Weizmann Institute of Science 19 Clean-Build Goals and Methods Minimize and remove contaminants from the environment Don’t allow contaminate into the cleanroom Control behaviors in the clean room Continual clean-up and removal of debris Vacuuming, wet mopping, wipe downs

20. 9/9/2015 Weizmann Institute of Science 20 Clean-Build Goals and Methods Neutralize the threat within the environment Grounding (Electro-Static Discharge control) Safety Immediate spill cleanup

21. 9/9/2015 Weizmann Institute of Science 21 Case Studies Purdue University- Birck Nanotechnology Center Brookhaven National Laboratory (BNL)- Center for Functional Nanomaterials University of North Carolina and North Carolina AT&T- Joint School of Nanoscience and Nanoengineering (JSNN) Iberian National Laboratory (INL)- Brage Portugal

22. 9/9/2015 Weizmann Institute of Science 22 Purdue University

23. Purdue Birck Nanotechnology Center 9/9/2015 23 Weizmann Institute of Science

24. Purdue Birck Nanotechnology Center Cleanroom Floor Plan 9/9/2015 24 Weizmann Institute of Science

25. 9/9/2015 Weizmann Institute of Science 25 Brookhaven National Laboratories

26. BNL Center for Functional Nanomaterials Cleanroom 9/9/2015 26 Weizmann Institute of Science

27. BNL Center for Functional Nanomaterials Cleanroom Floor Plan 9/9/2015 27 Weizmann Institute of Science

28. 9/9/2015 Weizmann Institute of Science 28 UNC and NC A&T

29. UNC and NC A&T Joint School of Nanoscience and Nanoengineering (JSNN) Cleanroom 9/9/2015 29 Weizmann Institute of Science

30. UNC and NC A&T Joint School of Nanoscience and Nanoengineering (JSNN) Cleanroom 9/9/2015 30 Weizmann Institute of Science

31. 9/9/2015 Weizmann Institute of Science 31 Iberian National Laboratory

32. Iberian National Laboratory (INL)Cleanroom 9/9/2015 32 Weizmann Institute of Science

33. Iberian National Laboratory (INL) Cleanroom 9/9/2015 33 Weizmann Institute of Science

34. 9/9/2015 Weizmann Institute of Science 34 Define Requirements Functions/Processes Control Parameters Type of Room- Bay Chase vs. Ballroom Type of Systems- Air Delivery Vibration Criteria EMI Requirements Nano Bio Functions and Interface

35. 9/9/2015 Weizmann Institute of Science 35 Define Requirements Functional Processes: –Wet Process/Etch –Dry Etch –Photolithography –Thermal –Deposition –MBE –Inspection –Characterization –Nano Bio

36. 9/9/2015 Weizmann Institute of Science 36 Define Requirements Control Parameters: –ISO Class –Temperature/RH –Process Services –Exhaust Streams

37. 9/9/2015 Weizmann Institute of Science 37 Define Requirements Type of Rooms: –Bay/Chase –Ballroom

38. 9/9/2015 Weizmann Institute of Science 38 Define Requirements Type of Systems- Air Delivery: –Fan Filters –Duct Supply/Open Return –Ducted Supply/Ducted Return –Make Up Air Introduction

39. 9/9/2015 Weizmann Institute of Science 39 Define Requirements Vibration Criteria: –Equipment Requirements –Location within building –Adjacent spaces –Parameters (Millimeters per Second): 125 MPS Areas 200 to 500 MPS Areas Over 500 MPS Areas

40. 9/9/2015 Weizmann Institute of Science 40 Define Requirements EMI Requirements: –Equipment Requirements –Fields AC and/or DC (milliGAUSS) –0.1 mG peak-to-peak

41. 9/9/2015 Weizmann Institute of Science 41 Define Requirements Nano Bio Functions –What is different? –How does it interface with the function fab?

42. 9/9/2015 Weizmann Institute of Science 42 Conclusion Questions Stated Design Parameters