1. (Deep Level Transient Spectroscopy)
Introduction to DLTS
(Deep Level Transient Spectroscopy)
III. Our DLTS System
O. Breitenstein
MPI MSP Halle

2. Outline:
1. Basic principles
Application field of DLTS
Principles of DLTS
Basic measurement techniques
2. Advanced techniques
Advanced DLTS measurement techniques
3. Our DLTS system
- Philosophy
- Hardware
- User surface

3. Recapitulation: DLTS routine (repeating!) :
reverse
reverse
reduced
or forward Vr
bias t e- e- e-
band
diagram e- e-
RF-
capacitance t DC t

4. Generation of the DLTS signal
low T
opt. T
high T t1 t2 t t1 t2 t
DCmeas t1 t2 t
"rate window": T
Tpeak
DCpeak
DLTS signal = C(t1)-C(t2)
If T is slowly varying, at a certain temperature a DLTS peak occures

5. DLTS measurements at different rate windows allow one to measure Et
ln(en)
1000/T
DLTS
This "Arrhenius plot" allows an identification of a deep level defect

6. Advanced techniques
DLTS on Schottky diodes only reveals majority carrier taps
DLTS on pn junctions also reveals minority carrier traps
Optically excited DLRS (MCDLTS) also reveals minority carrier traps in Schottky diodes
There are special DLTS procedures for measuring:
- concentration depth profiles (Vimp scan)
- electric field dependence of en;p (Vimp scan)
- capture cross sections for electrons and holes (timp scan)
Extended defects are usually characterized by a logarithmic capture behavior and often show non-exponential emission (broadened DLTS peaks)

7. Philosophy of our DLTS system
1. We don’t save DLTS data but transient data
Conventional approach: On-line conversion of transient data to DLTS data, saving DLTS(T) (1-dimensional vector of data).
Advantage: Small file sizes. Disadvantage: No flexibility with respect to different correlation techniques (see below)
Our approach: C(t, T) is saved as a 2-dimensional data file
Advantage: Flexible DLTS correlation. Disadvantage: Larger file sizes (see below).

8. 2. We have both linear and logarithmic time scale at choice
Linear time scale: time resolution for large times is the same as immediately after the filling pulse. May be advantageous for software-based multiexponential transient deconvolution
tmin tn
tn = n tmin
Logarithmic time scale (base 2, also 1.1 possible): Time resolution proportional to elapsed time, drastic savings in file size
averaging over differently sized periods!
tmin
tn = (2n-1) tmin tn

9. 3. We have three different kinds of DLTS correlation at choice
3.1. Modified 2-Point correlation: DLTS = C(t1)-C(t2)
Mathematical formulation:
C(t)
K(t) t1 t2 t3
good compromise between resolution and sensitivity, many rate windows

10. 3.2. Exponential correlation: High sensitivity, but less resolution
K(t) t
DLTS T
DC(0)
2-point

11. 3.3. High resolution correlation: Low sensitivity
K(t) t
DLTS T
DC(0)
2-point

12. Hardware C-Meter working at 1 MHz, made at our electronic workshop
applied HF signal: 100 mV (pk-pk) or 1 V (pk-pk) at choice
electronic C- and G- (conductivity) compensation
manual or automatic compensation
sample bias range: V
pulse bias range: V. If pulse bias > bias: injection !
preamplifier separated, connected with main unit by 1 m cable
computer controlled via 2x16 bit ADC / DAC interface card
T control unit, controlled via RS232 by computer
linear or exponential T-ramp at choice, speed adjustable

13. C Meter and T controller

14. DLTS system wiring scheme
bias pulse bias Delta C C-compens computer preamp.
ext ext out out
rear side
C-meter
front side
delta C bias out
Computer
preamplifier
+ Probe
- Probe
Probe
extern
INPUT CH.1 INPUT CH EXT.TRIG.
Oscilloscope
Cryostat T-
controller RS
232
"Trig."
ADC 0
ADC 2
DAC 0
sample

15. 2 different cryostats
at choice:
1. Bath cryostat
only for samples mounted on TO5 transistor holders
manually immersing in liquid nitrogen (cool down), measurement after lifting above LN2 level, quick measurement
not optimum for very slow T-ramps or constant T measurements

16. 2. Evaporator cryostat
for samples mounted on TO5 or TO18 holders or bare samples
fully automatic cooling down and heating up (software controlled)
slower measurement, larger LN2 consumption

17. Software
Made by MSC Technik Halle (

18. “settings” menu:

19. “display” menu

20. What this system can do:
DLTS measurements from 78 K to 400 K
sample capacitance < 500 pF
sample parallel resistance > 500 W
bias and pulse bias range: V
samples mounted on transistor holders or as raw chips
linear and logarithmic sampling (to base 2 or 1.1)
rate window range from < 1 s-1 to 104 s-1
monitoring and storage of C0(T) (basic capacitance)
sensitivity < 10-4pF for 0.1V HF (pk-pk), < 10-5pF for 1 V HF
“batch” measurements for bias, pulse bias, tmin, and timp
display of up to 10 DLTS traces
export of C transients, C0(T) and DLTS traces as ASCII files
system is available in room B.2.05, to be used only after personal introduction by O.B. !

21. Plans for the future:
Establishment of Minority Carrier DLTS (optical excitation)
DLTS peak evaluation software (parameter fitting etc.)
3 ppt Files of this introduction and the DLTS operation manual are available on-line