1. MAS.961 Special Topics: How To Make Something That Makes (almost) Anything NanoFabrication J. Jacobson – MIT – 02/17/09 jacobson@media.mit.edu

2. Outline Optical Fabrication Technologies Probe/MEMS Fabrication Technologies Imprint Fabrication Technologies Particle Beam Fabrication Technologies

3. Immersion Lithography 22-nm immersion interference lithography T. M. Bloomstein, M. F. Marchant, S. Deneault, D. E. Hardy, and M. Rothschild 10 July 2006 / Vol. 14, No. 14 / OPTICS EXPRESS 6434 Received 11 May 2006; revised 23 June 2006; accepted 23 June 2006

4. Immersion Lithography (Air) (Liq)

5. Stereolithography SpeedResolution – Two Photon

6. Laser CVD http://www.me.gatech.edu/Lackey/nsfgranteesjan02.pdf Mechanism: Pyrolitic (Heating in absense of O 2 ) Chemical Vapor Deposition (500 to 2000°C local temperature). Rates: Fiber growth rates > 2 mm/s,metals and ceramics. Linear growth rate of 200 mm/s Carbon volumetric deposition rate of 50 mm3/s carbon. Materials: Cu, Au, Si, Al, W, C, WC, B, TiC, TiN, SiC, and Si3N4.

7. www.optomec.com LENS (Laser Engineered Net Shaping)

8. Outline Optical Fabrication Technologies Probe/MEMS Fabrication Technologies Imprint Fabrication Technologies Particle Beam Fabrication Technologies

9. Dip-Pen Nanolithography Mirkin et. al.

10. Contact Mode Nanoparticle AFM Hubert et.al.

11. Massively Parallel Dip-Pen Nanolithography with 55 000- Pen Two-Dimensional Arrays Chad A. Mirkin, et. al. 1 * Angewandte Chemie Volume 45, Issue 43, Pages 7220-7223 Massively Parallel Dip-Pen Nanolithography with 55 000- Pen Two-Dimensional Arrays http://mass.micro.uiuc.edu/research/current/nanolithography/2006-focus- intro/slide12.html

12. http://www.microfab.com/research_areas/electronics/electronics.htm#anchor250555 Solder Jet 25 micron resolution

13. Outline Optical Fabrication Technologies Probe/MEMS Fabrication Technologies Imprint Fabrication Technologies Particle Beam Fabrication Technologies

14. …Can we use this map as a guide towards future directions in fabrication ? Cost Per Resolution Element The Case for Printed Electronics

15. Stephen Chou (Michigan/Princeton) et. al. Imprint Lithography

16. http://www.molecularimprints.com/Technology/technology2.html Step & Flash Lithography

17. Emerging Lithographic Technologies X, edited by Michael J. Lercel, Proc. of SPIE Vol. 6151, 61510J, (2006) · 0277-786X/06/$15 · doi: 10.1117/12.655604 Proc. of SPIE Vol. 6151 61510J-1 MultiLayer Step and Flash Lithography

18. HP – Self Aligned Imprint Lithography - SAIL

19. Offset Liquid Embossing (OLE) Bulthaup et. Al. APL 79(10): 1525 (2001) Nanoparticle Inks 2  m 200 nm

20. Nanomoulding with Amorphous Metals Golden Kumar, Hong X. Tang & Jan Schroers Vol 457| 12 February 2009| doi:10.1038/nature07718

21. Outline Optical Fabrication Technologies Probe/MEMS Fabrication Technologies Imprint Fabrication Technologies Particle Beam Fabrication Technologies

22. FEI Corp. Focused Ion Beam

23. Focused Ion Beam - Milling Toshiaki Fujii, and Takashi Kaito http://www.siint.com/en/technol ogy/ion_beam_applications_e. html NanoLathe FIB Fabricated Stamps

24. FIB Fabricated MOSFET FIB CVD Pt (gate electrode) Au contact pad nanowire Pt SiO 2 Focused Ion Beam - Writing FIB Pt CVD

25. ARCAM.Com E Beam Metal Melting

26. http://www.che.vt.edu/Wilkes/electrospinning/electrspinning.html Electrospinning https://www.uni-marburg.de/fb15/ag-wendorff/research/Electrospinning/fiber-hair http://en.wikipedia.org/wiki/Electrospinning

29. 1D and 2D Composites

30. Notes

31. http://www.2objet.com Objet: Ink Jet + UV Cure 16 micron layers