1. P. Grutter Contacting the Nanoworld Peter Grutter Physics Department McGill University NSERC, FCAR, CIAR, McGill, IBM, CIHR, GenomeQuebec, CFI, NanoQuebec

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3. Moore’s Law

4. P. Grutter Challenges and Opportunities for Semiconductor R&D Production Year199920022005200820112014 DRAM half pitch180nm Overlay accuracy65nm Gate length140nm CD control14nm9nm Oxide thickness2nm1.9nm Nature, 406, 1023 (2000)

5. P. Grutter Challenges and Opportunities for Semiconductor R&D Production Year199920022005200820112014 DRAM half pitch180nm 130nm100nm70nm50nm35nm Overlay accuracy65nm45nm35nm Gate length140nm80nm65nm46nm30nm20nm CD control14nm9nm Oxide thickness2nm1.9nm Nature, 406, 1023 (2000)

6. P. Grutter Challenges and Opportunities for Semiconductor R&D Production Year199920022005200820112014 DRAM half pitch180nm 130nm100nm70nm50nm35nm Overlay accuracy65nm45nm35nm25nm20nm15nm Gate length140nm80nm65nm46nm30nm20nm CD control14nm9nm6nm4nm3nm2nm Oxide thickness2nm1.9nm1.5nm1.2nm0.8nm0.5nm Nature, 406, 1023 (2000)

7. P. Grutter Definition of Nanoscience Nanoscience and Nanotechnology investigates and applies phenomena, systems and structures where: at least one dimension l c is a few nm properties qualitatively differ for l < l c

8. P. Grutter Science Fiction: 7 of 9 on Star Trek

9. P. Grutter Sub-micron is not nano! ‘Nanotechnology on silicon products: Intel leads in production and research’ (Wall Street Journal)

10. P. Grutter Nano - or micro: why care? Nanosomes (L’Oréal) Is it just academic to distinguish nano from micro? YES: advertising NO: R&D, $$$ extrapolations are not valid when you cross the disruptive nano-micro boundary

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12. SPM applied to nanoelectronics: the Grutter Research Group Magnetic reversal Molecular electronics Quantum dots Interfacing to living neurons MFM with in-situ field UHV AFM/STM/FIM, AFM/STM/SEM 4K, 8T cryogenic AFM DI Bioscope + patch clamp + single photon fluorescence

13. P. Grutter Magnetic reversal of microfabricated magnetic particles Aim: use coupled magnetic particles to process and store information Issue: switching field distribution Ph.D. Thesis of X. Zhu

14. P. Grutter Magnetic reversal of microfabricated magnetic particles Aim: use coupled magnetic particles to process and store information Issue: switching field distribution Ph.D. Thesis of X. Zhu

15. P. Grutter Cryogenic MFM of Nb flux lattice Ph.D. Thesis of M. Roseman

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17. Crossbar architecture

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19. Molecular electronics: the issues Contacts Structure-function relationship between transport process and molecular structure Dissipation Crosstalk (interconnects) Architecture I-O with a trillion processors Fault tolerance Manufacturing costs

20. P. Grutter Does atomic structure of the contact matter? YES !

21. P. Grutter Does atomic structure of the contact matter? Mehrez, Wlasenko, et al., Phys. Rev. B 65, 195419 (2002)

22. P. Grutter Comparison of Experimental and Modeling Results Mehrez, Wlasenko, et al., Phys. Rev. B 65, 195419 (2002)

23. P. Grutter Low-T UHV STM/AFM/FIM 140K, 10 -11 mbar quick change between FIM - AFM/STM mode Stalder, Ph.D. Thesis 1995 Cross et al. PRL 80, 4685 (1998) Schirmeisen et al. NJP 2, 29.1 (2000)

24. P. Grutter Field Ion Microscopy (FIM) E. Muller, 1950’s

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26. FIM of W(111) tip Imaging at 5.0 kV

27. P. Grutter FIM of W(111) tip Imaging at 5.0 kV Manipulating at 6.0 kV

28. P. Grutter FIM of W(111) tip Imaging at 5.0 kV Manipulating at 6.0 kV

29. P. Grutter FIM of W(111) tip Imaging at 5.0 kV Manipulating at 6.0 kV

30. P. Grutter Single Au atom on W(111) tip Imaged at 2.1 KV

31. P. Grutter W(111) tip on Au(111) Cross et al. PRL 80, 4685 (1998) Schirmeisen et al, NJP 2, 29.1 (2000 )

32. P. Grutter Molecular Dynamics Simulations U. Landman et al, Science 248, 454 (1990)

33. P. Grutter W(111) trimer tip on Au(111) E ad = 21 eV  = 0.2 nm

34. P. Grutter Tip relaxation effects Hofer, Fisher, Wolkow and Grutter Phys. Rev. Lett. 87, 236104 (2001) W tip on Au(111) surface

35. P. Grutter Tip relaxation effects Hofer, Fisher, Wolkow and Grutter Phys. Rev. Lett. 87, 236104 (2001) W tip on Au(111) surface

36. P. Grutter F(z) and I(z) of W(111) trimer on Au(111) Schirmeisen et al, NJP 2, 29.1 (2000 )

37. P. Grutter Yan Sun, Sarah Burke Henrik Mortensn

38. P. Grutter Self-assembled quantum dots 50 nm diameter InAs Qdots grown on 10 nm InP and a InGaAs 2DEG Sample grown at NRC IMS J. Levebvre, P. Poole, R. Williams et al J. Crystal Growth (2002)

39. P. Grutter First results of cryogenic electrostatic force spectroscopy R. Stomp, Y. Miyahara S. Studenkin (NRC) A. Sachrajda (NRC)

40. P. Grutter distance tipgap2DEGQdot

41. P. Grutter distance tipgap2DEGQdot Force between capacitor plates

42. P. Grutter E distance tipgap InP InAs InGaAs 2DEGQdot Force between capacitor plates

43. P. Grutter E distance tipgap InP InAs InGaAs 2DEGQdot Electrical potential applied between tip and 2DEG

44. P. Grutter E distance tipgap InP InAs InGaAs 2DEGQdot Electrical potential applied between tip and 2DEG

45. P. Grutter E distance tipgap InP InAs InGaAs 2DEGQdot 30-50 nm Electrical potential lever arm can be tuned by: applied V tip-sample tip-sample separation sample structure

46. P. Grutter First results of cryogenic electrostatic force spectroscopy R. Stomp, Y. Miyahara S. Studenkin (NRC) A. Sachrajda (NRC)

47. P. Grutter Contacting a nano-dot with a Au wire M. Pumarol S. Studenkin (NRC IMS)

48. P. Grutter Live Cell Imaging: Time-lapse sequence after contraction stimulation (~20min/frame). Images are 50X50  m. Smooth muscle cell from rat trachea. The contractile dynamics are relevant in the study of asthma.

49. P. Grutter B. Smith, N. Duriscic P.Wiseman (McGill) Y. deKonik (Laval) Dendritic Spines: AFM Topograph Force-Volume Elasticity Map 2-photon fluorescence images View of AFM cantilever scanning fixed hippocampal cultures.

50. P. Grutter Force Spectroscopy

51. P. Grutter Stimulation of Single Ligand-Gated Ion Channels Natural Process: Synaptic Transmission Goal: To study channel gating kinetics and binding forces, while maintaining precise control of agonist location. Experiment: Ligand-functionalized AFM tip

52. P. Grutter N. Cameron, B. Lennox (McGill) Tethering Scheme: GABA v.s. GABOB Is it possible to tether a molecule of GABA without destroying its functionality?

53. P. Grutter Tethering Scheme: Polymer Linker Au -S-(CH 2 ) 12 -(O-CH 2 -CH 2 ) 23 -O-GABOB {alkanethiol} {PEO} Colloid simulates the AFM tip Keeps the colloid complex soluble (?)

54. P. Grutter Planar Patch-Clamp Chips Advanced microstructuring techniques are used to produce apertures in planar glass or quartz substrates. Low noise recordings have been realized from both artificial lipid bilayers and whole cells. Fertig et. al. Phys Rev E Stat Phys Plasmas Fluids Relat Interdiscip Topics 2001 Oct;64(4-1):040901.

55. P. Grutter Loading Rate Dependent Unbinding: Most probable unbinding force: Ligand-receptor dissociation forces and rates depend on the rate at which the bond is ruptured!!! Distinct binding states can be identified from a force v.s. loading rate plot. Good review: Evans, E. Annu. Rev. Biophys. Biomol. Struct. 2001. 30:105-28.

56. P. Grutter F(z) as a function of pulling speed Clausen-Schaumann et al., Current Opinions in Chem. Biol. 4, 524 (2000) Merkel et al., Nature 397, (1999) Allows the determination of energy barriers and thus is a direct measure of the energy landscape in conformational space. Evans, Annu. Rev. Biophys. Biomol. Struct., 30, 105 (2001)

57. P. Grutter Imaging and pulling on a protein 5  m scan Force-distance spectroscopy Pro-granulin, a protein precursor for a polypeptide growth regulator A. Bateman, N. Durisic

58. P. Grutter DNA ‘unwinding’ AFM probe Au surface Nature - DNA replication, polymerization Experiment - AFM force spectroscopy

59. P. Grutter Anselmetti et. al. Single Mol. 1, 58 (2000)

60. P. Grutter Cantilever as a Sensor 10 -15 g. in Vacuum Nanoparticles, E.Coli 10 -5 Kelvin Sensitivity Atomic Resolution Imaging 10 pW, 20 fJ Sensitivity H 2 + O 2  H 2 O Phase Transitions Specific Target Molecules: Alcohols, Hydrogen DNA Sequencing H.P.Lang et al., Analytica Chimica Acta 393 (1999) 59-65

61. P. Grutter Making a Surface Selective and Responsive Analytes Immobilized Receptors Thiol Monolayer M.Godin, V. Tabard-Cossa, B. Lennox, P. Grutter

62. P. Grutter Stress due to thiol absorption

63. P. Grutter Summary Tools, both experimental and theoretical, drive our capabilities to understand the nanoworld! We develop and apply SPM techniques to interface to: 1. Molecules 2. Quantum dots 3. Neurons

64. P. Grutter Supported by NSERC, FCAR, CIAR, NanoQuebec CFI, IBM, GenomeQuebec, CIHR McGill Dawson Scholarship 14 graduate students, 6 post doctoral fellows

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