1. MOS-AK meeting, Leuven, September 2004 University of Wales Power Device Compact Modelling Phil Mawby University of Wales Swansea

2. MOS-AK meeting, Leuven, September 2004 University of Wales Outline  Thermal Compact Models  Electrical Compact Models  MOSFET  PiN Diode  NPTIGBT  PTIGBT  Model Validation Examples

3. MOS-AK meeting, Leuven, September 2004 University of Wales  ET compact models of the semiconductor devices as a connection between electrical and thermal networks Physically Based Electro-Thermal Compact Modelling Approach

4. MOS-AK meeting, Leuven, September 2004 University of Wales Structure diagram of the ET compact model Electro-Thermal Modelling Strategy

5. MOS-AK meeting, Leuven, September 2004 University of Wales Thermal Compact Models – Thermal Networks Star-shaped resistance network

6. MOS-AK meeting, Leuven, September 2004 University of Wales Extraction of the RC Thermal Network Parameters: Thermal Transient Response Function

7. MOS-AK meeting, Leuven, September 2004 University of Wales Extraction of the RC Thermal Network Parameters: Thermal Transient Response Function First step is to obtain thermal transient response function of the device for a step function excitation.

8. MOS-AK meeting, Leuven, September 2004 University of Wales Extraction of the RC Thermal Network Parameters: Thermal Transient Response Function 3D FEM prediction of the SML5020BN device temperature distribution after t=1000s

9. MOS-AK meeting, Leuven, September 2004 University of Wales Extraction of the RC Thermal Network Parameters: Thermal Transient Response Function

10. MOS-AK meeting, Leuven, September 2004 University of Wales Deconvolving above equation by the fixed function exp(z-exp(z)), Y(x) spectrum can be extracted from the transient response. Extraction of the RC Thermal Network Parameters: Deconvolution Method

11. MOS-AK meeting, Leuven, September 2004 University of Wales Thermal Transient Response Function: SML5020BN MOSFET

12. MOS-AK meeting, Leuven, September 2004 University of Wales Thermal Transient Response Function: STY15NA100 MOSFET

13. MOS-AK meeting, Leuven, September 2004 University of Wales Cross sectional view of HEXFET The introduction of the polysilicon-gate allowed the structure to be self aligned, and allows a cellular structure which increases the packing density. This increases the active channel to total area ratio significantly compared to rectangular cell or striped structures Fairly economical process – 6/7 masks cf. 20-28 for CMOS Note whole of upper surface is coated with Source metal. This makes processing and packaging easier. Typical cell densities are greater than 2M/in 2 (300K/cm 2 ) Source contact

14. MOS-AK meeting, Leuven, September 2004 University of Wales SEM of trench structure Presented ISPSD 2001 J.Zeng et.al. – Fairchild Ultra dense trench 1.1  m trench spacing – 0.18m .cm 2

15. MOS-AK meeting, Leuven, September 2004 University of Wales Where does RDS(ON) come from? N - epitaxial layer Gate Source R drift R jfet R sub RaRa R chan R source  R DS(ON) is made up of the series combination of all the parts of the device between the source and drain where there is a voltage drop  Some of these components are negligible in some voltage ranges  An approximate value can be arrived at using hand calculations.  R DS(ON) = R source + R chan + R a + R jfet + R drift + R sub Drain R contact Note: all calculation carried out per unit area

16. MOS-AK meeting, Leuven, September 2004 University of Wales Electrical Compact Models: Power MOSFET

17. MOS-AK meeting, Leuven, September 2004 University of Wales

18. MOS-AK meeting, Leuven, September 2004 University of Wales

19. MOS-AK meeting, Leuven, September 2004 University of Wales Electrical Compact Models: PiN Diode Compact Model

20. MOS-AK meeting, Leuven, September 2004 University of Wales PiN Diode Compact Model: Plasma Decay During Turn-off

21. MOS-AK meeting, Leuven, September 2004 University of Wales PiN Diode Compact Model: Diode Turn-off

22. MOS-AK meeting, Leuven, September 2004 University of Wales Electrical Compact Models: Non Punch Through IGBT Compact Model

23. MOS-AK meeting, Leuven, September 2004 University of Wales Electrical Compact Models: Punch Through IGBT Compact Model

24. MOS-AK meeting, Leuven, September 2004 University of Wales Electrical Compact Models: NPTIGBT and PTIGBT Compact Model Parameters ATotal IGBT active area (cm2) A DG Gate-drain overlap area (cm2) BVnBreakdown voltage index BVfBreakdown voltage multiplication constant C GS Total gate-source oxide capacitance (nF) C OXD Total gate-drain overlap oxide capacitance (nF) I LN0 Electron end leakage saturation current (A) K PLIN Transconductance in linear region (A/V2) K PSAT Transconductance in saturation region (A/V2) N D Base region doping density (cm-3) NpGaussian peak doping density (cm-3) V BI Junction built in potential (V) V TD Gate-drain overlap area threshold voltage (V) V TH Threshold voltage (V) WBase region width (cm) Channel length modulation parameter (V-1)  Transverse field factor (V-1)  Doping spreading factor (cm)  Ambipolar lifetime (s)  P Hole lifetime inside the buffer layer (s) W B Buffer layer width (cm) n F Emitter efficiency N B Buffer layer doping density (cm-3)

25. MOS-AK meeting, Leuven, September 2004 University of Wales IGBT Compact Model: Clamped Inductive Load Circuit – Gate Controlled Turn-off Value for the V aa is chosen to be greater (500V) than the maximum clamping voltage V clamp (300V). Clamp inductive load circuit

26. MOS-AK meeting, Leuven, September 2004 University of Wales Clamped Inductive Load Circuit – Gate Controlled Turn-off: At the beginning of the turn-off process, as soon as gate voltage decreases below V TH the MOS channel is turned-off. Then, the channel current (I ch ), which is an electron current, decreases abruptly and the anode voltage starts to rise. When the anode voltage reaches the clamp voltage (V A = V clamp ), it stays constant. The remaining current tail will decay with a longer time constant via carrier recombination and diffusion. As suggested by the arrow, the higher the clamping voltage (V clamp ) the higher will be the initial current tail size.  Simulated NPTIGBT anode current and voltage turn-off waveforms

27. MOS-AK meeting, Leuven, September 2004 University of Wales Clamped Inductive Load Circuit – Gate Controlled Turn-off:  Carrier concentration at the left (anode) plasma edge decay during NPTIGBT turn-off - carrier concentration decreases monotonically during turn-off

28. MOS-AK meeting, Leuven, September 2004 University of Wales Clamped Inductive Load Circuit – Gate Controlled Turn-off:  Simulated PTIGBT anode current and voltage turn-off waveforms – PTIGBT has a shorter turn-off time than a corresponding NPTIGBT since the carriers are cleared away from the PTIGBT base by the depletion region as it reaches the buffer layer.

29. MOS-AK meeting, Leuven, September 2004 University of Wales IRG4BC20UD (International Rectifier) IGBT  Anode current and voltage turn-on waveforms  Anode current and voltage turn-off waveforms

30. MOS-AK meeting, Leuven, September 2004 University of Wales ET PiN Diode Simulation

31. MOS-AK meeting, Leuven, September 2004 University of Wales ET PiN Diode Simulation Anode Current vs. time Anode Voltage vs. time

32. MOS-AK meeting, Leuven, September 2004 University of Wales Step-Up Converter: Schematic of an Electro-Thermal Model f=20kHz

33. MOS-AK meeting, Leuven, September 2004 University of Wales Step-Up Converter: Drain Voltage Vs. Time

34. MOS-AK meeting, Leuven, September 2004 University of Wales Step-Up Converter: Output Voltage and Junction Temperature

35. MOS-AK meeting, Leuven, September 2004 University of Wales Synchronous Buck Converter: Topology and Typical Power Losses

36. MOS-AK meeting, Leuven, September 2004 University of Wales Isolated Forward Converter: Topology and Typical Power Losses

37. MOS-AK meeting, Leuven, September 2004 University of Wales Conclusions  MOSFET model is simple cf. deep sub micron  Electro Thermal interactions are key  Bipolar Plasma modelling is very challenging  Long real times for simulations

38. MOS-AK meeting, Leuven, September 2004 University of Wales Aknowledgement  Thanks to Dr.P.Igic