1. Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin 2007/11/21 Parylene microvalve Presenter : Chia-Min Lin (9535811)

2. Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin 2007/11/21 Outline  Motivation  Design concept / Fabrication process  Results  Summary  Reference

3. Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin 2007/11/21 Motivation  As used in drug delivery a dualvalved device can more accurately deliver a dose and prevent overdelivery of medication when the fluidic pressure is higher than the regular range.  Such a configuration can also be fully integrated in lab-on-a-chip systems for refined flow regulation in life science analysis and research.

4. Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin 2007/11/21 Parylene deposition mechanism Parylene CParylene DParylene N Young’s modulus (GPa) 43.83.5 Melting point ( ℃ ) 290380420

5. Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin 2007/11/21 Generation #1 X.-Q. Wang et al., IEEE MEMS’99. Operation mechanism s-shape beamorifice Fabrication process smooth PR roughen 20μm

6. Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin 2007/11/21 Cont’d Fabrication resultsFlow results 25 ml/min

7. Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin 2007/11/21 Generation #2 J. Xie et al., IEEE MEMS’01. Operation mechanismFabrication process O 2 plasma NC

8. Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin 2007/11/21 Cont’d Fabrication resultsFlow results 250 nl/min

9. Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin 2007/11/21 Generation #3 P. -J. Chen et al., JMEMS, 2007. Design concept

10. Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin 2007/11/21 Cont’d Fabrication process

11. Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin 2007/11/21 Cont’d Fabrication results and test setup

12. Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin 2007/11/21 Cont’d Testing results 4.0 l/min 16 l/min 1.3 l/min

13. Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin 2007/11/21 Generation #4 P. –J. Chen et al., IEEE MEMS’07. Design concept

14. Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin 2007/11/21 Cont’d Fabrication processFabrication results

15. Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin 2007/11/21 Cont’d Testing results 7 l/min

16. Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin 2007/11/21 Summary G1G2G3 G4 Valve typeNONCNONCFloating disk Cracking pressure (psi) 0.11 0.30 Breakdown pressure (psi) 873025 44 Main structure material is parylene,and the device is biocompatibility.

17. Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin 2007/11/21 Reference  X. –Q. Wang, Q. –Lin, and Y. –C. Tai, ”A parylene micro check valve,” 12 th IEEE MEMS Conference, 1999, pp177-182.  J. Xie, X. Yang, Q. X. Wang, and Y. –C. Tai, ”Surface micromachined leakage proof parylene check valve,” 14 th IEEE MEMS Conference, 2001, pp539-542.  P. –J. Chen, D. C. Rodger, E. M. Meng, M. S. Humayun, and Y. –C. Tai, ” Surface-Micromachined Parylene Dual Valves for On-Chip Unpowered Microflow Regulation,” JMEMS, 16, pp223-231, 2007.  P. –J. Chen, and Y. –C. Tai, ”FLOATING-DISK PARYLENE MICRO CHECK VALVE,” 20 th IEEE MEMS Conference, 2007, pp453-456.

18. Sensing and Actuation in Miniaturized Systems presentation#2 Chia-Min Lin 2007/11/21 Thanks for your attention !