1. Fire Sentry Corporation
2 Stage Electro-Optical Fire Detectors for Semiconductor Wet Benches
Prevent Costly Clean Room Fire Damage and Business Interruptions
“World Leader in Electro-Optical Fire Detection Technology”

2. Fires Cause Major Losses to Semiconductor Fabs
Over 1,000 semiconductor fabs worldwide totaling $1 Trillion US dollars in assets are at risk due to fire in tools constructed of combustible materials using flammable solvents and gasses.
Business disruption losses due to these fires can be more costly than property damage.
In the USA, the average is 2 to 8 weeks production downtime resulting in business interruption.
In the USA, property damage costs from fire range from $2 million to $60 million US dollars.
Two recent international semiconductor fabs were severely damaged due to catastrophic fires resulting in $1 Billion US dollars in property damages and unrecoverable production downtimes.
In the USA during 1995, there was one fire loss for every 10 insured fabs with an average loss in excess of $8 Million US dollars.

3. Property Damage and Business Interruptions are due to:
Fire itself.
Black smoke caused by the fire.
Corrosive by-products of smoke caused by fire.

4. Fire Hazards Wet Benches manufactured from Polypropylene or PVC
Flammable chemicals such as isopropyl alcohol (IPA), acetone, etc.
Flammable gasses, such as Silane and Hydrogen
Wet Benches and tools manufactured from non-burn materials but using flammable gases and chemicals

5. Fire Hazards
Semiconductor tools constructed of plastic combustible materials that may present a serious fire threat in the clean room are:
1. Steppers
2. Plating benches.
3. Spray acid tools.
4. Ion Implanters.
5. Spray Coaters.
Cleaning equipment using flammable chemicals such as IPA and acetone

6. Fire Hazards Silane & Hydrogen gas cylinder cabinets.
Valve manifold boxes that regulate flammable gasses.
Outdoor bulk gas storage and distribution areas for silane, hydrogen and other flammable gasses
Central Chemical Supply Systems
Chemical Storage Areas

7. Traditional Fire Detection Apparatus

8. Heat-Activated Sprinklers
Heat-activated sprinklers alone are inadequate to prevent extensive damage to wet benches because they are slow to react to a fire.
Once a tool, such as a wet bench, constructed of plastic, (i.e., polypropylene, PVC, etc.), catches on fire, the fire burns with such intensity that heat-activated overhead sprinklers CANNOT contain the fire damage. The resulting black, corrosive smoke permeates the clean room contaminating costly product, processing equipment, and the clean room surface environment.
Wet benches have enclosed hidden compartments and obstructions which typically are not protected by sprinklers.
Overhead sprinklers do not meet the business needs of the Semiconductor Industry and the Insurance Companies.

9. Smoke, Aspirating Smoke, and Heat Detectors
High air flow in wet benches prevents fast detection, therefore the response time is too slow for wet bench fire detection.
By the time smoke or heat detectors do respond, the polypropylene is fully burning and releasing black smoke into the clean room and it may not possible to extinguish the fire.
Smoke and heat detectors are not sealed in leak-proof and corrosion-proof housings, and should not be installed inside the plenum and on the surface areas of wet benches.

10. Electro-Optical Fire Detectors

11. Electro-Optical Fire Detectors provide Fast Detection of Wet Bench Fires
Electro-Optical Fire Detectors with a Two-Stage Alarm respond before damaging black, corrosive smoke, (from a fully burning polypropylene fire), is released and permeates the Clean Room.
Each detection stage level is based on the radiant heat output of the fire, not the time period of the fire, which only the Fire Sentry Multi-Spectral Wide Band IR™ fire sensing technology can provide, (detects over 88% of the fire’s spectral radiant energy).
A Two-Stage fire response approach avoids costly destruction of in-process product while providing early warning that a fire exists in the bench.

12. Near Band Infrared 0.7 to 1.1 Microns
Infrared Sensor Wavebands
Near Band Infrared 0.7 to 1.1 Microns
0.7
1.1
3.5
4.3

13. 1st Stage Response - Alert
Alert condition, (4kw fire), energizes a relay for external audible and visual alarms to notify operators of the Fire Early Warning condition.
Alert provides time for operators to select the following actions to deal with the fire condition:
1. Wait to finish the chip production batch if a fire is non-threatening and appears to be retreating and may self-extinguish on its own.
2. Apply a localized suppression agent with a portable extinguisher.
3. Manually shut off electrical power to the wet bench, which potentially could be the ignition source.
4. Download FirePicTM which records 8 seconds of Detector spectral data preceding the fire, to enable a postulation of the cause of the fire.

14. 2nd Stage Response - Alarm
If the fire still exists and grows to the Factory Mutual specified heat level criteria of 13 kW*, the following occurs:
1. Energize relays for remote annunciation notifying operators of the Fire ALARM condition, and signal for suppression release.
2. Automatically shut off electrical power to the wet bench.
3. FirePic data stored in the detector’s non-volatile memory.
* 13kW is the equivalent of a 8” polypropylene fire 8 feet from the detector. This level of energy will not ignite polypropylene

15. Two-Stage Early Warning Electro-Optical Fire Detection
May also be used for:
Plating Benches
Steppers
Ion Implanters
Spray Coaters
Spray Acid Tools
Gas Cabinets

16. FSC Electro-Optical Fire Detection Advantages & Benefits
1. Wide Band IRTM (0.7 to 3.5 microns) sees all hydrocarbon & non-hydrocarbon fires, (i.e., polypropylene, IPA, acetone, silane, hydrogen, etc.)
2. Wide Band IR sees through smoke, gasses, fumes, chemical vapors, as well as fire suppression agents such as water mist, FM200, and CO2, (should the fire re-flash).
3. Wide Band IR provides an accurate measure of Factory Mutual’s 13 kW fire alarm criteria.
4. No false alarms which could cause product loss and production downtime.
5. No Ultraviolet sensors, as UV is easily blinded by smoke, acetone, suppression agents, etc. UV is susceptible to false alarms.
6. Two-Stage response to fire provides an early warning that a fire exists.

17. FSC Electro-Optical Fire Detection Advantages & Benefits
7. Solid-state Wide Band Infrared, Near Band Infrared and Visible sensors, and digital electronics for stability, long-life, and reliability.
8. Automatic electro-optical test source to assure Detector operational readiness at all times.
9. Wide 120 degree field-of-view
10. Built-in temperature compensation using temperature transducer & software
11. Leak-proof, heat-sealed, corrosion-proof housing rated for IP67 with corrosion-proof cabling, enables the Fire Detectors to be installed in plenum areas.
12. Ease of Installation using Detector snap slide mounting brackets

18. FSC Electro-Optical Fire Detection Advantages & Benefits
13. FirePic™ stores in detector’s non-volatile memory Alert and Alarm Fire data for up to six 8 second fire events.
14. User-friendly PC software for monitoring:
a. Graph on a PC screen in real-time what the installed Detector “sees”.
b. Display and save FirePic Alert and Alarm fire data for up to six 8 second fire events.
c. Event Log downloads a Controller’s and/or Detector’s event history.
d. Documented Certification provides hard-copy of system configuration data.
15. Proven track record with large installed user base worldwide.
16. FM Approved family of stand alone detectors and detector/controller combinations for all types of applications.

19. Fire Sentry Fire Detectors for Semiconductor Applications
Wet Benches and Tools
Model FS Fire Detector, used with: - Model FS7-130-SX Controller (12 Detectors) - Model S Controller (22 Detectors) - Model FSWB-1 Wall Mount Controller (7 Detectors)
Model FS RP Stand Alone Fire Detector with Alert, Alarm and Fault relays

20. Fire Sentry Controllers
Model FS7-130-SX Controller (12 Detectors) - designed to work with new or existing Fire control panels - 4 programmable zones

21. Fire Sentry Controllers
Model S Controller (22 Detectors) - 24 hour battery back up - Single Zone

22. Fire Sentry Controllers
Model FSWB-1 Wall Mount Controller (7 Detectors) - 24 hour battery back up - Single Zone - Outputs for Suppression Release and Annunciators - Inputs for smoke, heat & gas detection

23. Fire Sentry Fire Detectors for Semiconductor Applications
Silane Gas Cabinets and Silane Bulk Storage
Model SS4-A UV/IR Fire Detector - Explosion-proof - Fire Alarm, Verified Fire Alarm & Fault Relays - use unitized or with CM1-A Wallmount Controller

24. FSC Electro-Optical Fire Detection Review
Overhead Heat-Activated Sprinklers are too slow.
Ionization and Photoelectric Smoke Detectors, Aspirating Smoke Detection Systems, and Heat Detectors are too slow.
Fire Sentry’s Electro-Optical Fire Detectors are fast. The fire is caught BEFORE fire damage and smoke permeation.
No false alarms due to Digital Signal Processing and Wide Band IR Technology
Thousands of proven detector operating hours. Used by all major semiconductor manufacturers. The worldwide industry standard.

25. Application and Installation of Electro-Optical Fire Detection for Semiconductor Wet Benches

26. Inverse Square Law
As a fire event is located closer to a Detector, the Detector’s ALARM activation threshold is correspondingly reduced by the “Inverse Square Law”
13 kW
1.6 kW
0.4 kW
Model FS7-2173
Electro-Optical
Fire Detector
8ft
7ft
6ft
5ft
4ft
3ft
2ft
1ft
Distance
FS Fire Detector will ALARM to a 13 kW fire at 8 ft,
which is the equivalent of:
a 1.6 kW fire at 2 ft or
a 0.4 kW fire at 1 ft

27. Potential Fire Ignition Sources
Heaters
Transformers
Terminal Blocks
Power Cable Connections
Static Electricity
Chemical Reactions
Flammable liquids in Plastic Heated Modules

28. Fire Control Panel Actions
Audible and Visual Warnings via Horn/Strobe mounted on Wet Bench or in immediate area
Wet Bench Electrical Shutdown, in ALARM response, via Power Control Module, (Emergency Off)
Notify Facility Alarm System of fire, via Control Panel outputs

29. Location of Electro-Optical Fire Detectors in a typical 34 ft Wet Bench
Head Case
Surface Area detection, including robot deck area across
Process Tanks
Plenum Area under Process Tanks
Robot Wafer Load and Unload Area
Equipment Area behind Wet Bench

30. FS7-2173 Electro-Optical Fire Detector
Typical location of Fire Detectors, Control Panel, Manual Pull Station and Horn/Strobe in a 34 ft Wet Bench
FS Electro-Optical Fire Detector
Model S Control Panel
Horn/Strobe
Headcase
with Model S hour Battery Back-Up Panel
Note: Model FS has a 120 Degree Field of View
FS Electro-Optical Fire Detector
Working Surface
Equipment
Area
Side View
Manual Pull Station
Robot
Process
Tank
Area
Plenum

31. Fire Detection System Schematic for 34 ft Wet Benches
Emergency Off (EMO)
Alarm Output to Plant Facilities
FS Fire Detector
FS Fire Detector
FS Fire Detector
Model S Power Control Module
FS Fire Detector
Horn/Strobe
Model S Control Panel
S7-2179 JB
S7-2179 JB
Up to total of 22 FS Fire Detectors
S7-2179 JB
Manual Pull Station
24VDC
FS Fire Detector
FS Fire Detector
FS Fire Detector
Model S Battery Back-Up Panel
120VAC

32. Typical location of FS7-2173 Fire Detectors in a Small Wet Bench - Front View
Headcase
Headcase
Working Surface
Field of View
Field of View
Model FS Fire Detectors
Note: Detector has a 120 Degree Field of View
Plenum
Front View

33. Typical location of FS7-2173 Electro-Optical Fire Detectors in a Small Wet Bench - Side View
FS Fire Detectors
Note: Detector has a 120 Degree Field of View
Field of View
Process
Tank
Plenum
Equipment
Area
FS Fire Detectors
Side View

34. No. of FS7-2173 Fire Detectors
Typical Location and Quantities of FS Fire Detectors in Different Size Wet Benches
No. of FS Fire Detectors
Description of Detector Location
8 foot Wet Bench
34 foot Wet Bench
Plenum Areas Underneath the Process Tanks 2 5
Surface Area, including Robot Deck Area across Process Tanks 1 5
Equipment Area behind Wet Bench 2 5
Robot Load and Unload Areas
N/A 2
Head Case Area 1 2
___________________________
Total 7 22

35.
“World Leader in Electro-Optical Fire Detection Technology”