1. 1998 DAITO ELECTRON CO., LTD. All rights reserved. Terms of Use. Created by Ryuichi Yoshida and Hideki Isobe DAITO ELECTRON GROUP PRODUCT INFORMATION

2. 1998 DAITO ELECTRON CO., LTD. All rights reserved. Terms of Use. Created by Ryuichi Yoshida and Hideki Isobe. Machine External Drawing Development Concept Precision & Specifications Comparison Chart NACHI Ingot Circumference Grinder For English, Click here For English, Click here ■ For Inquiries ■ Reference Model: EOF30N Welcome to FUJIKOSHI’s web site. We offer a comprehensive line of mechanical and electronic equipment.

3. Machine External Diagram (1) Top View Utility Specifications NACHI Ingot Grinder Presentation CONTROL PANEL COOLANT WATER AIR HYDRAULIC UNIT GRINDING WATER DRAIN GATE EXHAUST OUTLET VALVE STAND OPERATION PANEL SAFETY MAT X-AXIS CONTROLLER STOCKER OPERATION PANEL

4. Machine External Diagram (2) Side View Diameter & Notch Groove Measuring Mechanism NACHI Ingot Grinder Presentation

5. Utility Specifications NACHI Ingot Grinder Presentation

6. Description of UnitsDescription of UnitsDescription of UnitsDescription of Units SpecificationsSpecificationsSpecifications PrecisionPrecisionPrecision OptionsOptionsOptions Precision & Specifications Click on any text line. NACHI Ingot Grinder Presentation

7. Circumference Cylindrical Grinding OF (Notch) Grinding Circumference Cylindrical Grinding OF (Notch) Grinding ① After the ingot is formed, it undergoes a series of automated operations:Circumference Cylindrical Grinding, Crystal Axis Orientation Measurement, and OF (Notch) Grinding.Circumference Cylindrical GrindingOF (Notch) Grinding ② Accepts a wide range of wafers measuring 5-inch to 12-inch in diameter. Ingot Specifications Diameter ： Max. 330mm Total Length ： 300 ～ 2,400mm （ Body section ） Weight ： Max. 400kg ③ Double Grinding Wheel ③ Double Grinding Wheel used for pre- and final grinding to actualize a single-pass grinding operation. Double Grinding Wheel Double Grinding Wheel ④ Minimal air cut and reduced cycle time are achieved using a shoulder detector mechanism. ⑤ Wafer diameter measurements are taken before and after grinding, and data is fed-back to the NC controller. Thus resulting in greater processing precision. ⑥ Features a reinforced chuck that is able to bear heavy loads and also reduces warping for processing accuracy. ⑦ The crystal axis detector installed in the X-ray unit (RIGAKU) executes high precision OF/Notch grinding operation. ⑧ Designed with fully automatic specifications to enable wafer processing from carry-in, grinding, orientation detection, size measurement, and carry-out. ⑨ Work data (lot number, diameter, total length, processing parameters, etc.) is transmitted to the host computer to enable fully unmanned machine operation. ⑩ Specifications NACHI Ingot Grinder Presentation

8. Cylindrical Grinding ① Work deviation for circumference diameter Under 0.06mm ( in relation to designated value) ② RoundnessUnder 0.06mm ③ CylindricityUnder 0.06/1,000mm OF Grinding ① OF(Notch) orientationWithin ±10° (0.17°) Notch Grinding ② Work deviation for B diameterUnder 0.06mm (in relation to designated value) ③ Measuring precision Circumference diameterUnder 0.06mm B diameterUnder 0.06mm ④ Crystal axis 4°OFF Precision NACHI Ingot Grinder Presentation

9. Processing Name Description Cylindrical Grinding ① Centering of the as-grown work is automatically performed (during loading, the work is centered in line with the chuck) using one or several passes. The work is then processed until the designated final work size is obtained. ② Final work dimensions 8-inchφ 199 ～ φ203±0.2mm 12-inchφ300 ～ φ305±0.2mm OF Grinding or Notch Grinding ① After cylindrical grinding is completed, OF or notch grinding is executed for the specified work surface using one pass operation. ② OF processing is available only for 8-inch wafers. ③ OF and notch processing shapes OF WIDTH REFERENCE VALUES (EDGE: R0.5 ～ 0.7MM) OF GRINDING NOTCH GRINDING OF WIDTH: UNDER 65MM ④ For OF/notch grinding, a total of three edges can be processed per ingot. ⑤ A special OF grinding function is also available. After normal OF grinding is completed, surface grinding (4mm width) is executed on the squared-off section of the OF.

10. Description of Units Loader Unit Clamp Unit Operation Panel NACHI Ingot Grinder Presentation

11. Operation Panel NC Monitor POD Monitor POD Monitor NC Monitor: Displays machine coordinates only (Program display) POD Monitor: Operation screen (Data input, data display, specified manual operations) NACHI Ingot Grinder Presentation

12. Loader Unit Revolving Video Loading Unloading NACHI Ingot Grinder Presentation As Seen From Stocker SideAs Seen from Grinder Side

13. Loading （ Video ） NACHI Ingot Grinder Presentation

14. Unloading （ Video ） NACHI Ingot Grinder Presentation

15. Clamp Section Grindin g Wheel Grinding Wheel Notch Grinding Wheel NACHI Ingot Grinder Presentation

16. During Grinding （ Video ） NACHI Ingot Grinder Presentation

17. Target Work Dimensions Amount of pre- grinding Amount of final grinding Double Grinding Wheel Feed Direction Pre-Grinding Wheel Final Grinding Wheel Shift Direction Pre-Grinding Wheel Final Grinding Wheel Feed Direction Pre-Grinding Wheel Final Grinding Wheel Pre-Grinding Wheel Final Grinding Wheel NACHI Ingot Grinder Presentation

18. Grinding Wheel Double Grinding Wheel Pre-/final grinding wheels are combined into a single unit (one cup method) resulting in faster feed speed and improved work surface grain. Company SS uses a double cup method with pre- and final grinding wheels placed side-by-side. Grinding START (Animation) Grinding START (Animation) Go To Specifications Go To Specifications Go to Grinder Go to Grinder Pre-Grinding Wheel Final Grinding Wheel #80 #230 #80#200#180 Grinding START (Video) Grinding START (Video) NACHI Ingot Grinder Presentation

19. Optional StockerStockerStocker Conveyor SystemConveyor SystemConveyor SystemConveyor System NACHI Ingot Grinder Presentation

20. Conveyor System CONVEYOR OPERATION OPERATOR CIRCULAR GRINDER OPERATION BAND SAW OPERATION RETRIEVE CONE/TAIL TRAY SUPPLY CART RETRIEVE SAMPLE LOAD MEASURING STATION CROP INGOT ＯＵＴ CONVEYOR OPERATION ＮＡＣＨＩ will manufacture and set-up construction of hand saw, cylindrical grinder and conveyor system. NACHI Ingot Grinder Presentation

21. Stocker Vendor: TIMEC Max. storage: 6 Ingots NACHI Ingot Grinder Presentation

22. Input/Output Data NACHI Ingot Grinder Presentation

23. ■ For Inquiries ■ Tokyo Machinery Sales Dept. 6, Kojimachi 1-chome, Chiyoda-Ku, Tokyo 102-8730 TEL(03)3264-0211 FAX(03)3221-7509 Sendai Sales Office 10, Futsukamachi 3-chome, Aoba-Ku, Sendai MIYAGI 980-0802 TEL(022)711-0321 FAX(022)711-0341 Nagoya Machinery Sales Office 13-1, Sakae 2-chome, Naka-Ku, Nagoya AICHI 460-0008 TEL(052)203-1591 FAX(052)221-1790 Osaka Machinery Sales Office 6-6, Funakoshi-cho 1-chome, Chuo-Ku, Osaka 540-0036 TEL(06)946-1301 FAX(06)949-1870 Fukuoka Machinery Sales Office 1-26, Hakataekihigashi 3-chome, Hakata-Ku, Fukuoka 812-0013 TEL(092)475-1521 FAX(092)475-1520 DAITO ELECTRON CO., LTD. TOKYO OFFICE Tel (03) 3237-1051 Fax (03) 5210-7677 DAITO ELECTRON CO., LTD. OSAKA OFFICE Tel (06) 946-1306 Fax (06) 943-8631 DAITO ELECTRON CO., LTD. TAIPEI OFFICE Tel (02) 2567-3827 Fax (02) 2543-1415 DAITO ELECTRON CO., LTD. KUALA LUMPUR OFFICE Tel (03) 7336247 Fax (03) 7348885 DAITO ELECTRON CO., LTD. MUNICH OFFICE Tel (89) 23035210 Fax (89)23035281 DAITRON, INC. (Subsidiary) Portland, Oregon, USA Tel (503) 682-7560 Fax (503) 682-2861 NACHI Ingot Grinder Presentation

24. Nachi-Fujikoshi Corp. Namerikawa Plant NACHI Ingot Grinder Presentation Namerikawa, Toyama