1. 14ME404 INTRODUCTION TO MEMS DISCIPLINE ELECTIVE-II Thanking everyone for MEMS as an elective subject Dr.J.S.Senthilkumaar, Professor Mechanical Engineering.

2. Objectives  Gain a fundamental understanding of standard micro fabrication techniques and its issues  Know the major classes, components and applications of MEMS devices / systems and to demonstrate an understanding of the fundamental principals behind the operation of these devices / systems.  Understand the unique requirements, environments and applications of MEMS  Apply the knowledge of micro fabrication techniques and applications to the design and manufacturing of MEMS device or a Microsystems.  Foster interest for further study.

3. Syllabus  Unit 1: OVERVIEW AND WORKING PRINCIPALS OF MEMS AND MICROSYSTEMS  UNIT 2: ENGINEERING SCIENCE FOR MICROSYSTEMS DESIGN AND FABRICATION  UNIT 3: MICROSYSTEMS DESIGN  UNIT 4: MATERIALS FOR MEMS  UNIT 5: MICROSYSTEMS AND THEIR FABRICATION

4. UNIT 1: OVERVIEW AND WORKING PRINCIPLES OF MEMS AND MICROSYSTEMS  MEMS and Microsystems  Evolution of microfabrication,  Microsystems and microelectronics  Microsystems and miniaturization  Applications of MEMS in Industries  Micro sensors, micro actuation, MEMS with micro actuators  Micro accelerometers  Micro fluidics

5. WHAT IS MEMS?  MEMS = MicroElectroMechanical System  Any engineering system that performs electrical and mechanical functions  with components in micrometers is a MEMS. (1 μm = 1/10 of human hair)  Available MEMS products include:  ● Micro sensors (acoustic wave, biomedical, chemical, inertia, optical,  pressure, radiation, thermal, etc.)  ● Micro actuators (valves, pumps and microfluidics;  electrical and optical relays and switches;  grippers, tweezers and tongs;  linear and rotary motors, etc.)  ● Read/write heads in computer storage systems.  ● Inkjet printer heads.  ● Micro device components (e.g., palm-top reconnaissance aircrafts, mini  robots and toys, micro surgical and mobile telecom equipment, etc.)

6. HOW SMALL ARE MEMS DEVICES?  They can be of the size of a rice grain, or smaller!  Two examples:  - Inertia sensors for air bag deployment systems in automobiles  - Microcars

7. Inertia Sensor for Automobile “Air Bag” Deployment System

8. Micro Cars

9. MEMS  MEMS = a pioneer technology for Miniaturization –  A leading technology for the 21 st Century, and  an inevitable trend in industrial products and  systems development