1. Confidential Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Mega SBD100 Slurry Blend and Dispense System Models 133 & 134 Level 1 Training Home

2. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Module 1: Safety

3. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Safety Rules Before operating any Mega Fluid Systems, Inc. equipment, follow these safety rules: All personnel must have proper training in related safety procedures. Do not allow unauthorized or untrained personnel in the area of the system. Maintain compliance with all local, state, and federal regulations, ordinances, laws, etc., that require handling all processing solutions, chemicals, and acids, as well as all wastes produced by this system. Personal Protective Equipment (PPE) is required. Follow requirements listed in the MSDS for the appropriate chemical. Follow all site specific rules for PPE. Treat all chemical exposures as potentially serious. Neutralize and irrigate the exposed area and seek first aid immediately as outlined in the MSDS. Use extreme caution when working with electrical equipment. Always assume high voltage exists; use lockout and tagout procedures during maintenance. Treat all chemical spills or leaks as hazardous and clean up immediately. Safety Rules

4. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Safety Features Emergency Machine Off (EMO) The EMO provides the means to immediately shut down the tool. Pressing the EMO immediately interrupts system power and stops all functions of the tool. Door Interlocks Opening an interlocked door triggers an alarm (unless the interlock bypass is activated) To prevent disrupting chemical/slurry dispense, bypass interlocked doors before opening (as needed; return to normal operating mode as soon as possible) Leak Detectors Stops the tool and activates a critical alarm Safety Features

5. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Safety Hazards & Symbols Pick one (until you’ve picked all 3) Pay attention to system labeling! DANGER WARNING CAUTION Safety Hazards & Symbols

6. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Safety Hazards & Symbols Pay attention to system labeling! DANGER indicates a hazardous situation which, if not avoided, WILL result in death or serious injury. Safety Hazards & Symbols DANGER WARNING CAUTION

7. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Safety Hazards & Symbols Pay attention to system labeling! WARNING indicates a potentially hazardous situation which, if not avoided, COULD result in death or serious injury. Safety Hazards & Symbols DANGER WARNING CAUTION

8. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Safety Hazards & Symbols CAUTION indicates a potentially hazardous situation which, if not avoided, may result in minor or moderate injuries. Pay attention to system labeling! Safety Hazards & Symbols DANGER WARNING CAUTION

9. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Lockout/Tagout 1.Bleed off the pressure or flush all lines carrying hazardous chemicals. 2.Turn off or return all operating controls to the neutral mode. 4.Place the AC Disconnect switch in the Off position. 3.Relieve, disconnect, restrain, or otherwise render safe residual or stored energy such as capacitors, gas, steam, water pressure, air, and hydraulic. 5.Place and lock a padlock on the disconnect switch. 6.Attach a lockout tag to the switch which indicates the system is locked out for service purposes and identifies those employees authorized to remove the lock and tag. 7.Test the valve or switch to ensure the control cannot be moved to the activated position. 8.Ensure all energy sources have been de-energized on dual or multi-energy source operations prior to beginning work. 9.Re-test the controls of the individual machine or equipment to verify the operation is positively off. Lockout/Tagout

10. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Emergency Off (EMO) The EMO provides the means to immediately shut down the tool. Pressing the EMO immediately interrupts system power and stops all functions of the tool. CAUTION EMO button must be accessible! Never disable or cover an EMO button. This can prevent the system from being stopped in the event of an emergency. Pressing the EMO button is not a safe alternative to the prescribed lockout/tagout procedure. Emergency Off (EMO)

11. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Key Failure Points Changing out an empty supply drum/tote Sampling system chemical Flushing the system Checking for leaks Performing a particle count Transporting chemicals to the system Filling the pipes with air Changing pumps, valves, filters, pressure switches, etc. Handling PPE after use The following procedures (but not limited to) may place you at risk of chemical exposure:

12. Confidential Safety Rules Safety Features Safety Hazards & Symbols Lockout/Tagout Emergency Off (EMO) Key Failure Points Spill Mitigation Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Spill Mitigation Treat all chemical spills as extremely hazardous. Notify the proper site authority. Follow all site specific rules for chemical spills. Follow all information contained in the MSDS. If possible, contain the spill with absorbent barriers. If possible, neutralize the spill according to the MSDS. Mega systems are designed to minimize the possibility of an unwanted chemical release. The cabinet is designed to contain 110% of the total piping volume plus the total contents of the largest reservoir. If a spill should happen:

13. Confidential SOO Overview System Overview Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Module 2: System Overview The SBD consists of three primary functional subsystems: Raw Slurry Supply sub-system, Blend/Distribution system, and Distribution Filter sub-system. System Overview ControlsTank AProcessTank B The Mega SBD100 is a two-process station system (A-station and B- station) designed to blend up to three liquid constituents, and distribute the resulting slurry to dual global loops with multiple points-of-use (POU).

14. Confidential SOO Overview System Overview Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Sequence of Operations Overview SOO Overview Raw Slurry Supply Sub-system The Raw Slurry Supply Sub-system is designed to continuously supply raw slurry to the main Slurry Blend and Distribution (SBD) System. The basic function of the system can be divided into two primary activities: supply and recirculation. The Raw Slurry Supply Subsystem includes the following features: Centrifugal pump with redundant diaphragm pump DI flush/purge and drain capability Spray atomizer drum humidifier One Mykrolis Chemlok type 10” length filter blow/head

15. Confidential SOO Overview System Overview Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Drum #1 Sequence of Operations Overview, continued SOO Overview Raw Slurry Supply Sub-system: Operation Start AnimationWait…Next Page Station A Tank Supply Station B Tank Supply Drain DIW N2 DIW CDA Drum #2 Raw slurry is supplied to the SBD system from one drum while Raw slurry from the other drum recirculates through the Raw Slurry Supply Sub- system. Press Start Animation

16. Confidential SOO Overview System Overview Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Sequence of Operations Overview, continued Blend and distribution functions are affected simultaneously, with one station in blend mode while the other station is in distribution mode. When the distribution mode has been completed, the station switches to blend mode and the other station switches to distribution mode. This ensures a continuous supply of slurry to the global loop. 1.The SBD receives slurry from the Raw Slurry Supply Sub-system and blends this with both house supplied chemical and water, based on the recipe specification. 2.When a batch is being constructed, both water and slurry are added using a weight- based technique; chemical is added either by weight or flow meter. 3.Once the constituents have been added, the blend contents are circulated in a local process circuit. 4.The quality of the blend is analyzed during the local circulation process, and values are compared to upper and lower control limits prior to releasing the batch for distribution (Model 134 only). SBD: Blending SOO Overview

17. Confidential SOO Overview System Overview Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Sequence of Operations Overview, continued SBD: Blending SOO Overview ABPR Filter Bank Drain Global Loop #1 Loop #2 Global Loop #2 Loop #1 To Sample PortDIW Supply Slurry from Filter Slurry from Drum N2/CDA Chem #1 Calibration Port Process Drain CDA M134 only Wait… Slurry is blended with chemical and water, based on the recipe specification (up to 5 recipe steps). Once the constituents have been added, the blend contents are circulated in a local process circuit. The blend quality is analyzed during local circulation prior to releasing the batch for distribution (Model 134 only). Start AnimationNext Page Return Supply Press Start Animation

18. Confidential SOO Overview System Overview Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Sequence of Operations Overview, continued 1.When the level of the tank in the distribution station reaches the low-level setting, the station which has completed its blend becomes available for distribution. 2.A complex series of steps begins which allow the nearly bump-less pressure transfer of slurry from the spent batch to the newly completed batch, which brings the newly completed batch online, distributing to the global loop. 3.The distribution function of the SBD is enabled by redundant centrifugal pumps coupled with active back-pressure regulation of the global loop return line. 4.Pressure readings in the global loop return line of the distribution circuit are used to control the back-pressure regulator attenuation setting, ensuring the appropriate point- of- use pressure is achieved for the given pump flow. SBD: Distribution SOO Overview

19. Confidential SOO Overview System Overview Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Sequence of Operations Overview, continued SBD: Distribution SOO Overview Filter Bank Drain Global Loop #1 Loop #2 Global Loop #2 Loop #1 To Sample PortDIW Supply Slurry from Filter Slurry from Drum N2/CDA Chem #1 Calibration Port Process Drain CDA M134 only Wait…Start AnimationNext Page ABPR Return Supply The SBD distribution function is enabled by redundant centrifugal pumps coupled with active back-pressure regulation of the global loop return line. Press Start Animation

20. Confidential SOO Overview System Overview Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Sequence of Operations Overview, continued The Distribution Filter Sub-system is a three filter, three bank filtration process designed to allow for single-staged slurry filtration flowing through dual global loops with a redundant bank as backup. Distribution Filter Sub-system One filter bank services the main system’s A-side One filter bank services the main system’s B-side, and The third filter bank acts as backup for either the A-side or B-side. Pressure transducers located before and after the filters in the bank will monitor the pressure across the filters. If this pressure drop exceeds a predetermined filter change-out setpoint, the filter bank switching function will be initiated. The filter switching function consists of a process whereby the standby filter bank is brought online and filled with slurry to enable the online filter bank to be brought offline for servicing. 1.The standby filter bank is first isolated and nitrogen is charged into the filter bank cavity at a pressure slightly lower than the pressure of the online bank. 2.Drain valves are opened and the inlet isolation valve to the bank opens to allow slurry to fill the void spaces in the filter bank and push out the purge nitrogen. 3.The standby filter bank discharge isolation valve is opened and the offline filter bank is isolated from the discharge path. Filter Bank Switching SOO Overview

21. Confidential SOO Overview System Overview Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Start Animation Sequence of Operations Overview, continued Distribution Filtration SOO Overview To Tank To Loop Switch Manifold To Tank To Loop Switch Manifold N2 Drain DIW BANK #1 BANK #2 N2 Drain DIW N2 Drain DIW From Distribution Tank Slurry is dispensed through the filter bank to the Loop. Slurry can be returned to the Tank without dispensing to the Loop. Filter bank switching occurs to bring the online filter bank offline for servicing. Wait… Press Start Animation Next Page

22. Confidential SOO Overview System Overview Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Sequence of Operations Overview, continued The flush & purge function can be accessed when the system is placed in Maintenance Manual mode. 1.The tank is filled with water, the water is circulated throughout the system for a period, after which a series of pumped-drain and passive-drain steps are applied. 2.After these steps, the system is purged and drained with N 2 until most liquid, if not all, has been removed. SBD: Flush/Purge Blend or distribution sampling can be accessed and initiated during Automatic modes. The amount of blended slurry to be removed can be controlled, then a series of prompts occur for removing sample slurry, closing the sample door, and initiating the sample flush and purge process. SBD: Sampling SOO Overview

23. Confidential HMI Overview System Startup Login/Logout Automatic Operation Manual Operation Restarting after EMO Flush/Purge Sampling Module 3: Operation Module 4: Alarms Module 5: Maintenance Module 1: Safety Module 2: System Overview Module 3: Operation

24. Confidential HMI Overview System Startup Login/Logout Automatic Operation Manual Operation Restarting after EMO Flush/Purge Sampling Module 3: Operation Module 4: Alarms Module 5: Maintenance Module 1: Safety Module 2: System Overview HMI Overview Touch Screen Graphics Function Buttons Process Data Pumps Automatic Valves Click to view touch screen items Menu Bar Tank

25. Confidential HMI Overview System Startup Login/Logout Automatic Operation Manual Operation Restarting after EMO Flush/Purge Sampling Module 3: Operation Module 4: Alarms Module 5: Maintenance Module 1: Safety Module 2: System Overview System Startup The system is initially set up and powered on by an operator or engineer with an administrative password. Refer to Restarting after EMO if restarting the system. 1.Toggle the AC Disconnect switch to the ON position. 2.Ensure the EMO is disengaged (pulled out). 3.Press the green Start button on the front of the Controls cabinet. When the startup is complete, the Home screen is displayed.

26. Confidential HMI Overview System Startup Login/Logout Automatic Operation Manual Operation Restarting after EMO Flush/Purge Sampling Module 3: Operation Module 4: Alarms Module 5: Maintenance Module 1: Safety Module 2: System Overview Login/Logout Password Permissions The user password authorizes the user to view and/or edit various controls in the system. The touch screen interface is set up with the following three levels of permissions: Default - enables an operator to view all screens in the system. Admin - enables the user access to all screens and their functions, particularly to modify critical controls in the system. Mega - enables an operator to view and edit the controls required to run the system.

27. Confidential HMI Overview System Startup Login/Logout Automatic Operation Manual Operation Restarting after EMO Flush/Purge Sampling Module 3: Operation Module 4: Alarms Module 5: Maintenance Module 1: Safety Module 2: System Overview Login/Logout, continued Login/Logout Logging In Logging Out 1.Touch Login on the Menu bar located at the top of the screen. 2.Press the User Name field to enter a login name. 3.Use the on-screen keypad to enter a name, and then press the return key. Your login name appears as the system user. 4.Press Password to enter the corresponding login password. 5.Use the on-screen keypad to enter a password, and then press Enter. 6.Press OK to exit the Log On Dialog. Press the Logout button on the Menu bar to log out of the system.

28. Confidential HMI Overview System Startup Login/Logout Automatic Operation Manual Operation Restarting after EMO Flush/Purge Sampling Module 3: Operation Module 4: Alarms Module 5: Maintenance Module 1: Safety Module 2: System Overview Automatic Operation 1.Press Maintenance to display the Tool Maintenance screen. 2.Ensure the pumps are ready for operation, and then toggle each pump online by pressing the applicable pump switch to Online mode. 3.Press the Auto/Manual Mode Control button to toggle the station(s) to Auto operation. The Flush/Purge sequence begins. See Flush/Purge. The following procedure places the system into Automatic operation.

29. Confidential HMI Overview System Startup Login/Logout Automatic Operation Manual Operation Restarting after EMO Flush/Purge Sampling Module 3: Operation Module 4: Alarms Module 5: Maintenance Module 1: Safety Module 2: System Overview Manual Operation CAUTION Monitor the System in Manual Mode! Some alarms may not function in Manual mode. Potential hazards may be created. Use caution. If …Start… Opening valvesDownstream and move in the upstream direction. Closing valvesUpstream and move downstream. Placing the system in Manual mode de-energizes all solenoid valves. This sets all valves in their normal (safe) state when Manual mode is activated. In Manual mode, combinations of valves can accidentally be opened or closed that are outside the scope of the equipment design. The operator assumes all responsibility for running the system in Manual mode.

30. Confidential HMI Overview System Startup Login/Logout Automatic Operation Manual Operation Restarting after EMO Flush/Purge Sampling Module 3: Operation Module 4: Alarms Module 5: Maintenance Module 1: Safety Module 2: System Overview Manual Operation, continued Manual Operation 1.Login with Admin credentials for placing the system in Manual Mode. 2.Press Maintenance from the Home screen. 3.Press the Auto/Manual Control Mode button to toggle the station to Manual mode. 4.Press the Previous button to return to the Home screen. 5.Press the appropriate Station Overview button. 6.Press valve icons on the Overview screen to energize or de-energize the selected valve. A green valve is open. A red valve is closed. 7.Return the system to Automatic mode as soon as possible.

31. Confidential HMI Overview System Startup Login/Logout Automatic Operation Manual Operation Restarting after EMO Flush/Purge Sampling Module 3: Operation Module 4: Alarms Module 5: Maintenance Module 1: Safety Module 2: System Overview Restarting after an EMO Restarting after EMO If the system shuts down while running an operation, it does not continue where it left off after the restart. An Abort decision is required before continuing to Local or Global recirculation to ensure a high-quality batch in the tank. 1.If the system is shut down due to an EMO condition, pull the EMO button out before the next step. 2.Press the green Start button. After the system fully initializes, the Flush/Purge Control Dialog displays. 3.Continue with the steps in Flush/Purge.

32. Confidential HMI Overview System Startup Login/Logout Automatic Operation Manual Operation Restarting after EMO Flush/Purge Sampling Module 3: Operation Module 4: Alarms Module 5: Maintenance Module 1: Safety Module 2: System Overview Flush/Purge Batch aborts (flush/purge) may be necessary if process parameters, such as pH and density, are out of specification range or if the batch becomes contaminated. A flush/purge is used to drain and flush the blend tank, and when a thorough cleaning is necessary. A gravity drain dumps the entire blend tank contents to the drain, however, residual fluid is left in the process piping. NOTICE Obtain Appropriate Authorization! Batch Abort dumps the tank contents to the drain. Obtain authorization before proceeding with a Flush/Purge. Batch Abort Flush/Purge

33. Confidential HMI Overview System Startup Login/Logout Automatic Operation Manual Operation Restarting after EMO Flush/Purge Sampling Module 3: Operation Module 4: Alarms Module 5: Maintenance Module 1: Safety Module 2: System Overview Flush/Purge, continued Flush/Purge 1.Select the type of abort (flush/purge) sequence you would like to perform. Gravity Drain Only Complete Flush/Purge Reset Flush/Purge 3.Press the Execute button to start the Abort (Flush/Purge) sequence. 4.Repeat for the remaining station(s). If you choose…Your choices are… Gravity Drain OnlyPut station in Manual Put station in Standby Start a new batch (Blend station only) Complete Flush/Purge Put station in Manual Put station in Standby Start a new batch (Blend station only) Reset Flush/PurgePut station in Standby Start a new batch (Blend station only) Put station in local recirculation 2.Based on the abort sequence chosen, select the action you prefer to perform at the end of the abort sequence. Flushing and Purging

34. Confidential HMI Overview System Startup Login/Logout Automatic Operation Manual Operation Restarting after EMO Flush/Purge Sampling Module 3: Operation Module 4: Alarms Module 5: Maintenance Module 1: Safety Module 2: System Overview Sampling CAUTION Chemical Hazard! Sampling system chemistry exposes the operator to chemical hazards. Wear the following PPE when taking samples: Acid-resistant gloves Chemical safety goggles and full-face shield Protective clothing such as a lab coat, apron, or coveralls Use an approved container to hold the sample.

35. Confidential HMI Overview System Startup Login/Logout Automatic Operation Manual Operation Restarting after EMO Flush/Purge Sampling Module 3: Operation Module 4: Alarms Module 5: Maintenance Module 1: Safety Module 2: System Overview Sampling, continued Sampling 1.From the station Overview screen, press the Sample button. 2.Press the Start Sampling button. A flush/purge of the sample port is automatically performed. 3.Follow the on-screen steps to complete the sampling process.

36. Confidential Alarm Types Responding to Alarms Overriding Alarms Possible Causes/Resolutions Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Module 4: Alarms

37. Confidential Alarm Types Responding to Alarms Overriding Alarms Possible Causes/Resolutions Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Alarm Types Alarms are activated when a system interlock is tripped. There are three levels of alarms: CRITICAL alarms are activated by urgent situations that require immediate attention and threaten the performance of the system. A critical alarm sounds the audible annunciator and shuts down the system. A chemical system shutdown (CSS) critical alarm stops the distribution pumping. WARNING alarms are activated by situations that do not threaten the performance of the system. These situations do not require immediate attention, but must be fixed before the situation escalates into a situation that could threaten the performance of the system. A warning alarm sounds the audible annunciator. PROCESS alarms are activated by situations that require immediate attention, but do not threaten the performance of the system. An audible annunciator is sounded and the sequence of actions are paused. Process Alarms shut down the affected station.

38. Confidential Alarm Types Responding to Alarms Overriding Alarms Possible Causes/Resolutions Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Responding to Alarms 5.Once the problem has been corrected, press the Reset Inactive Alarms button and all inactive alarms will be removed from the list. 1.To silence the alarm, press the Silence button on the Menu bar. 2.Press the Alarms button on the Menu bar to open the Alarm Overview screen. 3.Press the scroll bar to move through the alarm list. Acknowledge the alarm(s) by pressing (Ack All) Silence Alarms. 4.Read the alarm message and correct the problem. If the problem still exists, the alarm remains active and is written back to the list.

39. Confidential Alarm Types Responding to Alarms Overriding Alarms Possible Causes/Resolutions Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Overriding Alarms The alarm override disables all alarms. Overriding alarms is not recommended for normal operation. Use the alarm override to perform certain maintenance functions that would normally trigger an interlock, such as rinsing spilled chemical in the cabinet to the drain. Use caution with the alarm override; it overrides all system alarms. For example, if the override is activated to bypass a faulty sensor, a concurrent leak or pressure alarm is also overridden. CAUTION Monitor System in Alarm Override mode! Alarms do not function in alarm override mode. Potential hazards may be created. Use caution. WARNING Chemical Hazard! Alarm override may cause conditions that expose the operator to chemicals. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls if exposed to chemicals. Refer to the site MSDS for chemical-specific information.

40. Confidential Alarm Types Responding to Alarms Overriding Alarms Possible Causes/Resolutions Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Overriding Alarms, continued Overriding Alarms Activating/De-activating Alarm Bypass 1.Press the Maintenance button to display the Tool Maintenance screen. 2.Press the Enabled/Disabled toggle button Disabled (to activate) or Enabled (to de- activate). 3.Press the Previous button to return to the previous screen. NOTICE Configure Interlocks to Safe Standby Mode! It is recommended that interlocks be configured to bring the system to a safe standby mode when activated. Defeating this capability may result in non-compliance with SEMI S2, Section 11.3 requirements.

41. Confidential Alarm Types Responding to Alarms Overriding Alarms Possible Causes/Resolutions Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Possible Causes & Resolutions Possible Causes/Solutions Refer to the Alarms & Warnings chapter in the following manuals for possible causes and resolutions to alarm conditions. Mega SBD100 Slurry Blending and Distribution, Model 133 Mega SBD100 Slurry Blending and Distribution, Model 134

42. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Module 5: Maintenance

43. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Parker two-way split valve Component Description Swagelok Relief Valve Parker MV-20 Manual Valve* Parker PV-10 Automatic Valve Parker PV-20 Automatic Valve* Valves Parker Check Valve Manual Valves *Refer to Manual for removal/installation instructions

44. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Component Description, continued Electronic Flowmeter Pressure Transducer Using a nonmetallic pressure sensing technology, the electronic flowmeter uses differential pressure to provide an accurate and reliable flow and pressure measurement. Flow and pressure measurements are not affected by bubbles or trapped vapor. Measuring line pressure allows for obtaining valuable and critical diagnostic information, which is used for monitoring or controlling process conditions such as DI water and chemical dispense. Electronic Flowmeter Pressure Transducer Component Description

45. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Component Description, continued Regulators Reducing Regulators Flow regulators consist of a solid float inside a tapered vertical tube that widens at the top. Fluid enters at the base of the tube, causing the float to rise. The upward or downward movement of the float corresponds to the rate of fluid flow in the tube. A rotameter consists of a tapered tube with a float inside that is pushed up by flow and pulled down by gravity. At a higher flow rate the float rises. The float is shaped so it rotates axially as the fluid passes. Reducing regulators control the incoming pressure to an exact pressure no matter what happens to the incoming pressure. The regulator design is based on a diaphragm and needle through a hole principle. The diaphragm moves to compensate for any changes in incoming N 2 pressure. Flow Regulator Rotameter Component Description

46. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Component Description, continued Pressure Switches Pressure switches notify the PLC when conditions meet or do not meet specifications and are associated with alarm conditions. The digital pressure switch is generally used for communicating the system pressure (psi) and two pressure switch outputs. Setpoints are adjustable from the front panel keys. Component Description Level Sensors Liquid Level Sensor Able to read and monitor the liquids levels through clear tubing (transparent). Able to read and monitor the liquids levels through the walls of the tank (not transparent). Omron Level Sensor

47. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Component Description, continued The Tank scale weighs the liquid batch within the tank. Bench Scales Component Description Tank Scales Tanks are used to blend and distribute slurry to the Local /Global Loops. Different sized tanks are used to blend and distribute slurry, chemicals, or UPW (Ultra Pure Water). Tanks

48. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Component Description, continued Component Description Filters Filters catch large particles being pumped through systems. An indication of clogged filters is an increase in differential pressure.

49. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Setting Timers & Setpoints Setting Timers/Setpoints Alarm Setpoints Alarm Setpoints are set from the Alarm Setpoints screens. Alarm setpoint values should only be changed with permission. 1.Log in with the appropriate Maintenance credentials. 2.Press the Maintenance button to access the Tool Maintenance screen. 3.Press the Alarm Setup button. The Alarm Setpoint screen displays. 4.Press the appropriate Alarm type button to access the alarm list. 5.Select the alarm to change. The Setpoint Editor displays. 6.Change the New Delay alarm value. 7.Change the Alarm Type, if necessary. 8.Press Download (and confirm) to update and save the changed timer value in the system.

50. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Setting Timers & Setpoints, continued Setting Timers/Setpoints Process Setpoints Process setpoints are set from the Process Setpoints screen. Process setpoints should only be changed with permission. 1.Log in with the appropriate Maintenance credentials. 2.Press the Maintenance button to access the Tool Maintenance screen. 3.Press the Process Setpoints button. The Process Setpoints screen displays. 4.Select the appropriate setpoint tab to access the setpoints. 5.Change the New setpoint value and press Enter. 6.Press Download (and confirm) to update and save the changed setpoint value in the system.

51. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Setting Timers & Setpoints, continued Setting Timers/Setpoints Refracto Setpoints CR-288 Refracto setpoints are set from the Refracto Setpoints screen. Refracto setpoint values should only be changed with permission. 1.Log in with the appropriate Maintenance credentials. 2.Press the Maintenance button to access the Tool Maintenance screen. 3.Press the CR-288 button. The Refracto Setpoints screen displays. 4.Change the appropriate value in the New field and press Enter. 5.Press Download (and confirm) to update and save the changed setpoint value in the system.

52. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Setting Timers & Setpoints, continued Setting Timers/Setpoints Timer Configuration System timers are set from the Timer Configuration screen. Timer values should only be changed with permission. 1.Log in with the appropriate Maintenance credentials. 2.Press the Maintenance button to access the Tool Maintenance screen. 3.Press the Timer Config button. The Timer Configuration screen displays. 4.Change the appropriate value in the New field and press Enter. 5.Press Download (and confirm) to update and save the changed setpoint value in the system.

53. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Setting Timers & Setpoints, continued Setting Timers/Setpoints The accumulation of system runtimes is reset from the Runtimes screen. 1.Log in with the appropriate Maintenance credentials. 2.Press the Maintenance button to access the Tool Maintenance screen. 3.Press the Runtimes button. The Runtimes screen displays. System Runtimes 4.Press the Reset Acc button of the runtime function you wish to change. The runtime timer will reset to zero (0).

54. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Preventive Maintenance Before performing system preventive maintenance: Why is Preventive Maintenance Important? What Should I Consider Before? Effective Preventive Maintenance (PM) maintains the system in optimal working order and ensures that the warranty extends to the equipment. Preventive maintenance also helps prevent unexpected downtime and disruption of the blend and distribution system. Follow site specific procedures for notifying affected personnel before performing preventive maintenance. Review all site requirements and procedures, including spill procedures, buddy systems, and PPE. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Review site MSDS for each chemical used in the system. Review all appropriate maintenance procedures. Ensure all equipment is available, work permits are approved, and all affected personnel have been notified. Before replacing any components, ensure the components are on hand.

55. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Verifying Device Settings Obtain the latest device settings list for the system. 1.Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. 2.Locate each device on the Device Settings List, and compare the actual setting with the recorded setting. Use the P&ID to aid in locating each device. 3.Record all deviations from the previously recorded settings on the Device Settings Record Sheet. 4.Consult with the Process Engineer to verify that deviations require correction. 5.Correct deviations, as required.

56. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Humidifier Settings A humidifier is essential to prevent slurry from drying on the sides of the tanks. Malfunction can occur for several reasons: The air pressure is too high or too low to create the mist. The mist pad is clogged and the pad does not work correctly. The drain is clogged. The water pressure is too high or low to create the proper mist. The water pressure is too high and the water sheets down the walls creating no mist (the mixture goes down the drain).

57. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Humidifier Settings, continued 1.Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. 2.Visually verify the humidifier is operating correctly. The water droplets should accumulate on the humidifier walls. There should be a minimal flow of water through the humidifier drain. 3.If the humidifier requires adjustments adjust the humidifier CDA/ N 2 and DI water pressure. CDA/ N 2 pressure should always be greater than water pressure. 4.To measure the DI water flow rate, shut off the CDA/ N 2 supply and measure the volume of water draining from the humidifier drain line. The flow rate should be approximately 15 ml/min. Humidifier Settings

58. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters Filters catch large particles being pumped through systems. An indication of clogged filters is an increase in differential pressure. Mykrolis’ Chemlock filter cartridges are locked into the bowl with a 1/4-turn. For filter cartridge removal, do not grab the filter cartridge body, simply unscrew the locking ring and the filter cartridge will disengage from the housing head. WARNING Chemical Hazard! The exhaust effluent may contain chemical (vapor or liquid). Handle and treat to comply with safety and pollution control regulations. Supplemental exhaust may be required for maintenance tasks. Refer to the site MSDS for chemical- specific information.

59. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Changing Filters, continued 1.Wear the proper PPE. Refer to the MSDSs and site regulations. Cleaning Strainers 3.Unscrew the locking ring and the filter cartridge will disengage from the housing head. 5.Insert the filter cartridge into the bowl. 6.Twist the filter cartridge 1/4-turn to lock. 7.Attach the bowl to the head. 8.Tighten the locking ring to seat the double O-rings. Use a housing wrench to ensure proper tightening. 2.Ensure the filter bank has been taken off line and the manual drain valve has been opened to release all cartridge and bowl contents. Note:Filters are mounted with the bowl up on slurry systems and with the bowl down on chemical systems. 4.Remove the filter cartridge and discard according to MSDS and site regulations. Insert Twist Attach Tighten

60. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Checking Pump Operation 1.If the doors must be opened, wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. 2.Ensure the pump is operating. 3.Record the pump operating pressure on the Preventive Maintenance List. 4.Force a pump switchover for redundant pumps by closing the manual valve downstream of the pressure switch. Ensure that pump 1 faults and pump 2 begins operation. 5.Reset the pump fault alarm. BPS-4 Pump ARO Diaphragm Pump 6.Ensure the pump is correctly set online or offline. Typically, all pumps are online. Schedule maintenance for pumps that are not ready for operation. 7.Record the pump runtime from the Timers Setpoint screen. If the pump value exceeds the maintenance setpoint, verify the date of the last maintenance completed. If the last maintenance was recent, ensure that the runtime was reset. If the run timer was not reset, consult a supervisor and reset the run timer upon approval

61. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Checking Leak Detectors 1.The leak detector LED should be green, indicating no leak. The corresponding input LED on the PLC should also be lit. 2.Spray a small amount of water on the leak detector with the hand sprayer. The LED should change to red, indicating a leak. The corresponding input LED on the PLC should turn off. If the sensor does not change, test the wiring with another leak detector. If the replacement sensor functions, the first sensor was faulty. If the replacement sensor does not function, check leak detector wiring. Replace the leak detector or repair the wiring, if required. WARNING Chemical Hazard! Leak detectors are placed at the most likely spot to sense leaks. Chemical may be present. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the site MSDS for chemical-specific information.

62. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Checking and Replacing Fittings Checking Fittings Inspecting the fittings requires opening the cabinet doors. Take the proper precautions to avoid chemical and electrical hazards. Place the system in Manual mode and open all drain fittings to relieve all pressure from the chemical lines before replacing fittings. Flared and threaded fittings can loosen due to system vibrations. Teflon fittings should be hand-tightened to prevent the development of leaks. Stainless steel fittings should be checked with a NO-GO gap gauge. Checking Fittings WARNING Electrical Hazard – Type 3! Risk of exposure to hazardous electrical current. Use extreme caution during preventive maintenance procedures to avoid accidental contact with energized parts. CAUTION Pressure Hazard! Relieve pressure in lines before loosening and replacing fittings.

63. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Checking and Replacing Fittings Checking Fittings, continued Ensure all fittings are tight. Loose plastic fittings should be hand-tightened. Stainless steel fittings should be checked with a NO-GO gap gauge. If the fitting leaks after it is tightened, replace it. Avoid over-tightening fittings! Over-tightening fittings may strip the fitting threads. Place the system in Automatic operation and check for leaks. Checking Fittings

64. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Checking and Replacing Fittings, continued Replacing Fittings 1.Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. 2.Place the system into Manual operating mode. 3.Flush and purge the pipes in the area of the repair. 4.Vent the line pressure by opening valves to the drain or exhaust. 5.Close the closest isolation valves in order to isolate the fitting. 6.Lockout/tagout the isolation valves. 7.Remove the leaking fitting and the necessary plumbing. 8.Replace the leaking fitting and install removed plumbing. 9.Remove the lockout/tagout devices. 10.Open the isolation valves. 11.In Manual mode, fill the repaired area with liquid (or gas) and check for leaks. If the fitting leaks, ensure the fitting is tight. If the fitting still leaks, return to Step 3. 12.Flush and purge the pipes in the area of the repair. Checking Fittings

65. Confidential Component Description Setting Timers/Setpoints Preventive Maintenance Verifying Device Settings Module 1: Safety Module 2: System Overview Module 3: Operation Module 4: Alarms Module 5: Maintenance Humidifier Settings Changing Filters Checking Pump Operation Checking Leak Detectors Checking Fittings Cabinet Cleaning Clean the cabinet after all other PM procedures are completed. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Rinse all chemical residue from the cabinet interior using the hand sprayers or wipes saturated in 10% IPA solution. Thoroughly dry the cabinet interior. Wipe the cabinet exterior clean. Dispose of all wipes according to site requirements and MSDS recommendations.