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Marina Artuso1 Pixel 2000 - notes Topics covered –Sensor –Front end electronics –Integration: Bump bonding (including roundtable featuring AMS,IZM, VTT) Multichip modules Hybrids Web page: http://www.ge.infn.it/Pix2000/slides.html
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Marina Artuso2 Sensor Interpixel insulation: –ATLAS “moderated p-spray” –CMS “p-stop double open ring” 250 m sensors –At Elba meeting CSEM, SINTEF not too enthusiastic, CANBERRA ok 200 m –CiS produced 1 st “moderated p-spray” in 200 m –IRST (Trento, Italy) has tried to produce “p-spray” and “moderated p-spray”
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Marina Artuso3 Sensor - continued Discussion with SINTEF –HERA-B sensors: moderated p-spray (3 different B doses for implantation ) Before irradiation breakdown at about 200 V (guard ring) worsened upon irradiation. Theory: p+ guard ring on the ohmic side create problem (punch through when depletion region reaches guard ring) –P-spray versus p-stop, latter easier, very important for p-spray to achieve quite smooth implantation densities + need to negotiate with MPI (design patented ?).
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Marina Artuso4 ROSE collaboration results Several talks on oxygenated wafers both at ELBA (2) and at PIXEL2000 (1). Oxygenated wafers very popular. SINTEF in the ROSE collaboration & ok, CSEM had problems with the first iteration of oxygenated wafers for Horisberger, they will try again.
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Marina Artuso5 Bump bonding Industry representatives: –Annamaria Fiorello – AMS, Italy (In) –Juergen Wolf – IZM, Germany (Solder) –Ikka Suni – VTT, Finland (Solder, including low melting eutectic used for an X ray pixel device with bump size 15 m on 30 m pitch –Roland Horisberger reported on PSI experience Both In and Solder seem adequate technologies
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Marina Artuso6 Hybridization ATLAS specifications for flex hybrid module: - 2 metal layers –* kapton substrate, metal traces on both faces (25 micron thick) –* Copper traces: 7 m thick, 75 m minimal distance, critical issues: - wire bonds - stress induced on the bumps (different CTE) and wirebonds
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Marina Artuso7 Hybridization (II) First results presented on “thin” flex- hybrid: electronics thinned down to 150 m –3 modules tested at Genova (2 bonded by AMS) –Module 2 is the best with very few dead channels and threshold 3900 260 e - and mean noise about 210 e - (however with rather long tail) (see Paulina Netchaeva’s talk).
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