1. Evaluation of Elastic Property of Thin Films by MEMS
Results
Key Idea
For elastically isotropic thin film
Strain
Biaxial Elastic Modulus
Free-hang
Bridge

2. Fundamental Adhesion Energy Measurement
Buckling under Residual Compressive Stress & Energy Balance
Results
T : Elastic energy
U : Bending strain energy
Δγ : Surface energy
=(- gfs+ gfv+ gsv)

3. In-situ Stress Measurement
System
He-Ne laser : 632.8nm
Step-motor : 1 rpm
Lens FL : 500mm
PSD : S1300 (13×13mm)
Mirror
Mirror
Step-
Motor
Beam Splitter
Chamber
He-Ne
laser
In-situ stress measurement with
temperature variation
i.e. Stress relaxation mechanism.
In-situ stress measurement under
various environments
i.e. Stress vs. Humidity
Mirror
PSD
Interface 5

4. Residual Stress Measurement
Principle
Measurement of curvature
Results
Curvature (R) ds df
Assumptions
1.The bending displacement is small compared with the thickness of the substrate
2. For a very thin deposit. ( ds << df )
Residual stress versus. DC bias voltage
In Filtered Cathodic Arc Deposition

5. Current-Voltage Measurement
I-V Curve & Fluctuation Measuring System
Emission Pattern Observing System
CCD
Viewing
System
Spacer
Phosphor coated ITO-glass y
Viewing
System e
Cathode e z
CCD
Visible
Light
Anode x
3-D Manipulator
Cathode
Keithley 6517
Electrometer
SRS PS350
Power Supply
SRS PS350
Power Supply
Computer
Interface
Keithley 6517
Electrometer
Emission Behavior from Vitreous Carbon
Emission Pattern from Vitreous Carbon
I-V Curve
F-N Plot

6. Friction Behaviors of Pure DLC and Si-DLC in Ambient Environment
Ball On Disc Type Tribometer
Principle
Results
따라서 본 연구에서는 낮은 마찰계수와 Si-rich oxide debris 사이의 관계를 좀 더 자세히 연구하기 위해 Si 함유 DLC 필름의 환경변화에 따른 마찰 특성과 Tribochemical reacion 과의 관계를 조사하고, 특히 대기중에서의 마찰거동에 많은 영향을 주는 습기와 산소가 없는 Dry Air와 vacuum 분위기에서 마찰특성을 실험으로써 Si 함유 DLC 필름의 대기중에서의 낮고 안정된 마찰 거동의 원인과 메카니즘을 규명하고자 하였습니다. Fn
Ball
Film Ft
Substrate
Ft : Tangential Force Fn : Normal Force
Friction Behaviors of Pure DLC and Si-DLC in Ambient Environment
Friction Coefficient

7. Surface Energy Measurement
Results
Principle l
Sessile-drop  s
sl
Substrate
High Surface Energy
Low Surface Energy
s : Substrate tension
l : Liquid tension
sl : Interface tension
 : Contact angle 
p : Polar component
d : Dispersive component
Effects of CF4 Plasma Treatment of DLC Films

8. Adhesion Measurement Scratch tester Results Principle (a) (b)
Visual examination of the scratch to determine the critical load Fc that causes adhesion failure
Analysis of emission of acoustic signals that are small in magnitude when the film adheres at low load
(b)
Fractures morphology of DLC films
(a) DLC on Tool Steel
(b) DLC on Tool Steel with W interlayer