1. Scanning Electron Microscopy

2. The Scanning Electron Microscope is an instrument that investigates the surfaces of solid samples.

3. Magnification range ~ 5x-500,000x

4. The Scanning Electron Microscope is an instrument that investigates the surfaces of solid samples. Magnification range ~ 5x-500,000x Sensitive to: Topography

5. The Scanning Electron Microscope is an instrument that investigates the surfaces of solid samples. Magnification range ~ 5x-500,000x Sensitive to: Topography Chemistry

6. The Scanning Electron Microscope is an instrument that investigates the surfaces of solid samples. Magnification range ~ 5x-500,000x Sensitive to: Topography Chemistry Crystallography

7. The Scanning Electron Microscope is an instrument that investigates the surfaces of solid samples. Magnification range ~ 5x-500,000x Sensitive to: Topography Chemistry Crystallography Etc.

8. The Scanning Electron Microscope is an instrument that investigates the surfaces of solid samples. Magnification range ~ 5x-500,000x Sensitive to: Topography Chemistry Crystallography Etc. Resolution down to 1nm. point-to-point

9. Products of interaction of electrons with matter:

10. Secondary Electrons (Low energy)

11. Products of interaction of electrons with matter: Secondary Electrons (Low energy) Back-scattered electrons (High energy)

12. Products of interaction of electrons with matter: Secondary Electrons (Low energy) Back-scattered electrons (High energy) X-rays

13. Products of interaction of electrons with matter: Secondary Electrons (Low energy) Back-scattered electrons (High energy) X-rays Auger electrons (Medium energy)

14. Products of interaction of electrons with matter: Secondary Electrons (Low energy) Back-scattered electrons (High energy) X-rays Auger electrons (Medium energy) Light

15. Products of interaction of electrons with matter: Secondary Electrons (Low energy) Back-scattered electrons (High energy) X-rays Auger electrons (Medium energy) Light Etc

16. JEOL 5910 General-Purpose SEM

17. FEI XL30 FEG-ESEM

18. JEOL 6320 High-resolution SEM

19. Features of our SEMs

20. Large sample chambers (6320 more restricted)

21. Features of our SEMs Large sample chambers (6320 more restricted) Secondary detectors

24. Features of our SEMs Large sample chambers (6320 more restricted) Secondary and Backscatter detectors

26. Features of our SEMs Large sample chambers (6320 more restricted) Secondary and Backscatter detectors Energy-dispersive X-ray detectors

28. SECu PbSn

30. BSECu PbSn

33. Features of our SEMs Large sample chambers (6320 more restricted) Secondary and Backscatter detectors Energy-dispersive X-ray detectors Backscatter diffraction patterns

35. Electron Backscatter Diffraction (EBSD) analysis: Define different grains (~0.5  m)

36. Electron Backscatter Diffraction (EBSD) analysis: Define different grains (~0.5  m) Detect Preferred orientations (texture)

37. Electron Backscatter Diffraction (EBSD) analysis: Define different grains (~0.5  m) Detect Preferred orientations (texture) Measure misorientations (~1 o )

38. Electron Backscatter Diffraction (EBSD) analysis: Define different grains (~0.5  m) Detect Preferred orientations (texture) Measure misorientations (~1 o ) Detect different phases

39. Electron Backscatter Diffraction (EBSD) analysis: Define different grains (~0.5  m) Detect Preferred orientations (texture) Measure misorientations (~1 o ) Detect different phases BUT – Needs VERY well prepared samples!

40. What else can we do? Stereo Imaging

41. What else can we do? Stereo Imaging Height Mapping (Using MeX software)

42. What else can we do? Stereo Imaging Height Mapping (Using MeX software) Feature analysis (Using Image Analysis software)

43. Introduction to Scanning Electron Microscopy Patrick Boisvert Thu Jan 25, 10-11:00am, 13-2137 The lecture will provide an introduction to the basic principles of Scanning Electron Microscopy with an approach to EDX, EBSD, and BSE. Contact: Patrick Boisvert, 13-1018, x3-3317, pboisver@mit.edu