1. PAUL SCHERRER INSTITUT M. Furlan I. Jerjen E. Kirk Ph. Lerch A. Zehnder Cryogenic Detectors Development at PSI

2. PAUL SCHERRER INSTITUT PSI Cryo-detector Work SIS STJ Ta-STJ, Single pixel and strips Mn- X-Ray, Optical Caloriemeter MoAu TES, Mn-X-ray SIN STJ

3. PAUL SCHERRER INSTITUT Si Si-nitride Mo/Au PAUL SCHERRER INSTITUT Mo/Au Microcalorimeter Mo/Au-TES Au Absorber Si-nitride membrane, “bad” thermal link Thesis J. Olsen.

4. PAUL SCHERRER INSTITUT Ta-Al/AlOx/Al-Ta-Nb produced by E. Kirk Basic tunneling junction

5. PAUL SCHERRER INSTITUT STJ Detector fabrication in cross section Photoresist etch mask, dry and wet etching to pattern strips … … and detectors Lift-off mask for SiO2 … … and wiring

6. PAUL SCHERRER INSTITUT I-V characteristics

7. PAUL SCHERRER INSTITUT Response to red LED

8. PAUL SCHERRER INSTITUT

9. VUV spectrometer 10 - 30 eV Ta-STJ 20’000 e/eV @ 300 mK IR rejection !

10. PAUL SCHERRER INSTITUT imaging with diffusion

11. PAUL SCHERRER INSTITUT energy position 5.9 keV 6.4 keV Substrate Phonons

12. PAUL SCHERRER INSTITUT STJ, 500 mK calorimeter, 100 mK Si, 300 K Summary Mn-X-ray results at PSI

13. PAUL SCHERRER INSTITUT Kurakados 40series x 20paralle STJ’s, each 50  m Diameter

14. PAUL SCHERRER INSTITUT Future plans at PSI Close SIS-STJ work in 2005 Thesis I. Jerjen: Sensitivity of Ta-STJ to optical light Measure 10-50eV photons Collaboration with Kurakado on series-STJ fabrication and testing SIN Junction studies + S being Absorber, small gap + N being Si (degenerated doped). ++ Profit from Si technology + No magnetic fields - no backtunneling - low temperature (<100mK)